DE69507358T2 - Verbesserter CO2 Bandleiterlaser - Google Patents

Verbesserter CO2 Bandleiterlaser

Info

Publication number
DE69507358T2
DE69507358T2 DE69507358T DE69507358T DE69507358T2 DE 69507358 T2 DE69507358 T2 DE 69507358T2 DE 69507358 T DE69507358 T DE 69507358T DE 69507358 T DE69507358 T DE 69507358T DE 69507358 T2 DE69507358 T2 DE 69507358T2
Authority
DE
Germany
Prior art keywords
improved
stripline laser
stripline
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69507358T
Other languages
English (en)
Other versions
DE69507358D1 (de
Inventor
Dietmar Eisel
Herbert Gross
Christopher L Petersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of DE69507358D1 publication Critical patent/DE69507358D1/de
Application granted granted Critical
Publication of DE69507358T2 publication Critical patent/DE69507358T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0315—Waveguide lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69507358T 1994-03-30 1995-03-09 Verbesserter CO2 Bandleiterlaser Expired - Fee Related DE69507358T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/219,844 US5412681A (en) 1994-03-30 1994-03-30 Slab-waveguide CO2 laser

Publications (2)

Publication Number Publication Date
DE69507358D1 DE69507358D1 (de) 1999-03-04
DE69507358T2 true DE69507358T2 (de) 1999-09-02

Family

ID=22821011

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69507358T Expired - Fee Related DE69507358T2 (de) 1994-03-30 1995-03-09 Verbesserter CO2 Bandleiterlaser

Country Status (5)

Country Link
US (1) US5412681A (de)
EP (1) EP0675579B1 (de)
JP (1) JPH07283461A (de)
CA (1) CA2144471A1 (de)
DE (1) DE69507358T2 (de)

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US6134256A (en) * 1994-06-08 2000-10-17 Qsource, Inc. Slice laser
US5748663A (en) * 1994-06-08 1998-05-05 Qsource, Inc. Retangular discharge gas laser
US5684822A (en) * 1994-11-17 1997-11-04 Cymer, Inc. Laser system with anamorphic confocal unstable resonator
US5661746A (en) * 1995-10-17 1997-08-26 Universal Laser Syatems, Inc. Free-space gas slab laser
US5822354A (en) * 1996-04-22 1998-10-13 Synrad, Inc. Variable-aperture cavity laser
DE19636517B4 (de) * 1996-09-09 2008-04-30 BLZ Bayerisches Laserzentrum Gemeinnützige Forschungsgesellschaft mbH Optische Flachkanalresonatoren mit räumlich inhomogen reflektierenden Littrow-Gittern, insbesondere für linienabstimmbare Bandleiterlaser
US5848091A (en) * 1997-01-21 1998-12-08 The Twentyfirst Century Corp. Laser resonator with improved output beam characteristics
US5881087A (en) * 1997-04-30 1999-03-09 Universal Laser Systems, Inc. Gas laser tube design
US5901167A (en) * 1997-04-30 1999-05-04 Universal Laser Systems, Inc. Air cooled gas laser
US5867517A (en) * 1997-04-30 1999-02-02 Universal Laser Systems, Inc. Integrated gas laser RF feed and fill apparatus and method
DE19852284C2 (de) * 1998-11-13 2000-11-30 Norbert Taufenbach Kleiner CO¶2¶-Slablaser
US6198759B1 (en) * 1999-12-27 2001-03-06 Synrad, Inc. Laser system and method for beam enhancement
US6198758B1 (en) * 1999-12-27 2001-03-06 Synrad, Inc. Laser with heat transfer system and method
US6195379B1 (en) * 1999-12-27 2001-02-27 Synrad, Inc. Laser assembly system and method
US20020107510A1 (en) * 2001-02-05 2002-08-08 Andrews Robert R. Laser apparatus useful for myocardial revascularization
US6879616B2 (en) * 2003-01-24 2005-04-12 Trumpf, Inc. Diffusion-cooled laser system
CN1314173C (zh) * 2003-09-29 2007-05-02 北京礴德恒激光科技有限公司 一维全金属板条波导气体激光器
US7583717B2 (en) * 2004-08-30 2009-09-01 Videojet Technologies Inc Laser system
US8599898B2 (en) * 2004-12-22 2013-12-03 Universal Laser Systems, Inc. Slab laser with composite resonator and method of producing high-energy laser radiation
US7756182B2 (en) * 2007-03-28 2010-07-13 Coherent, Inc. RF excited CO2 slab laser tube housing and electrodes cooling
US8085301B2 (en) * 2009-03-16 2011-12-27 Southwest Research Institute Compact handheld detector for greenhouse gasses
US20100230593A1 (en) 2009-03-16 2010-09-16 Southwest Research Institute Compact handheld non-laser detector for greenhouse gasses
DE102010040298B4 (de) 2010-06-08 2012-09-13 Rofin-Sinar Laser Gmbh Bandleiterlaser
US8295319B2 (en) * 2010-11-23 2012-10-23 Iradion Laser, Inc. Ceramic gas laser having an integrated beam shaping waveguide
US10247606B2 (en) * 2012-08-30 2019-04-02 ITI Scotland—Scottish Enterprise Long wavelength infrared detection and imaging with long wavelength infrared source
CN103117501A (zh) * 2013-01-28 2013-05-22 江苏益林金刚石工具有限公司 射频板条co2激光器电极冷却水流道结构
WO2015033426A1 (ja) * 2013-09-05 2015-03-12 ギガフォトン株式会社 レーザ増幅器、及びレーザ装置、並びに極端紫外光生成システム
US20170179668A1 (en) * 2014-03-28 2017-06-22 Alexander V. Krasnov Gas Flow Laser
US10404030B2 (en) 2015-02-09 2019-09-03 Iradion Laser, Inc. Flat-folded ceramic slab lasers
WO2017015261A1 (en) * 2015-07-20 2017-01-26 Afl Telecommunications Llc Laser feedback control systems
CN105846289B (zh) * 2016-05-13 2019-06-28 清华大学深圳研究生院 一种射频co2激光器及其非稳-波导混合腔
DE102016116779A1 (de) * 2016-09-07 2018-03-08 Rofin-Sinar Laser Gmbh Resonatorspiegel für einen optischen Resonator einer Laservorrichtung und Laservorrichtung
GB201718212D0 (en) * 2017-11-02 2017-12-20 Leonardo Mw Ltd A laser
US11095088B1 (en) 2018-02-21 2021-08-17 Zoyka Llc Multi-pass coaxial molecular gas laser

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US3504982A (en) * 1965-01-22 1970-04-07 Comp Generale Electricite Laser device for measuring variations of a second wavelength by monitoring a first wavelength
US4719639B1 (en) * 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
DE3729053A1 (de) * 1987-08-31 1989-03-16 Deutsche Forsch Luft Raumfahrt Hochleistungs-bandleiterlaser
US5148438A (en) * 1988-12-05 1992-09-15 Quantametrics Inc. Gas laser with discharge in two-dimensional waveguide
US5048048A (en) * 1989-08-11 1991-09-10 Mitsubishi Denki K.K. Gas laser device
DE3937491C2 (de) * 1989-11-10 1996-02-15 Deutsche Forsch Luft Raumfahrt Wellenleiterlaser mit Mikrowellenanregung
DE3937490A1 (de) * 1989-11-10 1991-05-16 Deutsche Forsch Luft Raumfahrt Mikrowellenangeregter hochleistungslaser
US5131003A (en) * 1990-10-12 1992-07-14 Coherent, Inc. RF excited CO2 slab waveguide laser
US5131004A (en) * 1990-10-12 1992-07-14 Coherent, Inc. RF excited CO2 slab waveguide laser
US5123028A (en) * 1990-10-12 1992-06-16 Coherent, Inc. RF Excited CO2 slab waveguide laser
US5237580A (en) * 1990-10-12 1993-08-17 Coherent, Inc. RF excited CO2 slab waveguide laser
US5216689A (en) * 1990-10-12 1993-06-01 Coherent, Inc. Slab laser with enhanced lifetime
US5140606A (en) * 1990-10-12 1992-08-18 Coherent, Inc. RF excited CO2 slab waveguide laser
US5155739A (en) * 1990-10-12 1992-10-13 Coherent, Inc. RF excited CO2 slab waveguide laser
EP0531781B1 (de) * 1991-09-13 1996-01-10 CARL ZEISS JENA GmbH Bandleiterlaser
US5327446A (en) * 1993-03-26 1994-07-05 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Method of exciting laser action and delivering laser energy for medical and scientific applications

Also Published As

Publication number Publication date
US5412681A (en) 1995-05-02
DE69507358D1 (de) 1999-03-04
CA2144471A1 (en) 1995-10-01
JPH07283461A (ja) 1995-10-27
EP0675579B1 (de) 1999-01-20
EP0675579A1 (de) 1995-10-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee