DE69506616D1 - Verschleissbeständiger Film - Google Patents
Verschleissbeständiger FilmInfo
- Publication number
- DE69506616D1 DE69506616D1 DE69506616T DE69506616T DE69506616D1 DE 69506616 D1 DE69506616 D1 DE 69506616D1 DE 69506616 T DE69506616 T DE 69506616T DE 69506616 T DE69506616 T DE 69506616T DE 69506616 D1 DE69506616 D1 DE 69506616D1
- Authority
- DE
- Germany
- Prior art keywords
- wear
- resistant film
- resistant
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6140749A JPH07331414A (ja) | 1994-06-01 | 1994-06-01 | 耐摩耗性膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69506616D1 true DE69506616D1 (de) | 1999-01-28 |
DE69506616T2 DE69506616T2 (de) | 1999-06-24 |
Family
ID=15275846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69506616T Expired - Fee Related DE69506616T2 (de) | 1994-06-01 | 1995-05-11 | Verschleissbeständiger Film |
Country Status (4)
Country | Link |
---|---|
US (1) | US5595814A (de) |
EP (1) | EP0685570B1 (de) |
JP (1) | JPH07331414A (de) |
DE (1) | DE69506616T2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09112448A (ja) * | 1995-10-18 | 1997-05-02 | Matsushita Electric Ind Co Ltd | スクロール圧縮機 |
US6905578B1 (en) * | 1998-04-27 | 2005-06-14 | Cvc Products, Inc. | Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure |
KR100300850B1 (ko) * | 1999-06-14 | 2001-09-22 | 이장무 | 알루미늄 나이트라이드의 표면 개질 방법 |
US7250196B1 (en) | 1999-10-26 | 2007-07-31 | Basic Resources, Inc. | System and method for plasma plating |
US6503379B1 (en) * | 2000-05-22 | 2003-01-07 | Basic Research, Inc. | Mobile plating system and method |
US6521104B1 (en) * | 2000-05-22 | 2003-02-18 | Basic Resources, Inc. | Configurable vacuum system and method |
US20030180450A1 (en) * | 2002-03-22 | 2003-09-25 | Kidd Jerry D. | System and method for preventing breaker failure |
US20050126497A1 (en) * | 2003-09-30 | 2005-06-16 | Kidd Jerry D. | Platform assembly and method |
KR101387178B1 (ko) | 2010-03-26 | 2014-04-21 | 캐논 아네르바 가부시키가이샤 | 스퍼터링 장치 및 전자 디바이스의 제조 방법 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3649359A (en) * | 1969-10-27 | 1972-03-14 | Optical Coating Laboratory Inc | Multilayer filter with metal dielectric period |
US3687713A (en) * | 1971-03-15 | 1972-08-29 | Denton Vacuum Corp | Protective coating for surfaces of silver and mirror fabrication |
FR2276601A1 (fr) * | 1974-06-27 | 1976-01-23 | France Etat | Filtres de bande et application a la fabrication de lunettes de protection |
US4517217A (en) * | 1980-09-09 | 1985-05-14 | Westinghouse Electric Corp. | Protective coating means for articles such as gold-plated jewelry and wristwatch components |
US4673248A (en) * | 1983-04-11 | 1987-06-16 | Nippon Soken, Inc. | Reflecting mirror for an automobile |
JPS60195502A (ja) * | 1984-03-19 | 1985-10-04 | Canon Inc | 金属回転多面鏡 |
DE3608734C1 (de) * | 1986-03-15 | 1987-01-02 | Feldmuehle Ag | Beschichtete Keramik-Wendeschneidplatte |
JPS63121652A (ja) * | 1986-11-08 | 1988-05-25 | Sony Corp | プラスチツク成形用金型 |
JPH02267285A (ja) * | 1989-04-05 | 1990-11-01 | Fujisash Co | アルミニウム製品の製造方法 |
JPH04329866A (ja) * | 1991-05-01 | 1992-11-18 | Kobe Steel Ltd | 耐食性に優れたAlまたはAl合金板 |
-
1994
- 1994-06-01 JP JP6140749A patent/JPH07331414A/ja active Pending
-
1995
- 1995-05-09 US US08/437,303 patent/US5595814A/en not_active Expired - Fee Related
- 1995-05-11 EP EP95107183A patent/EP0685570B1/de not_active Expired - Lifetime
- 1995-05-11 DE DE69506616T patent/DE69506616T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69506616T2 (de) | 1999-06-24 |
JPH07331414A (ja) | 1995-12-19 |
EP0685570A1 (de) | 1995-12-06 |
EP0685570B1 (de) | 1998-12-16 |
US5595814A (en) | 1997-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |