DE69501569T2 - High vacuum system - Google Patents

High vacuum system

Info

Publication number
DE69501569T2
DE69501569T2 DE1995601569 DE69501569T DE69501569T2 DE 69501569 T2 DE69501569 T2 DE 69501569T2 DE 1995601569 DE1995601569 DE 1995601569 DE 69501569 T DE69501569 T DE 69501569T DE 69501569 T2 DE69501569 T2 DE 69501569T2
Authority
DE
Germany
Prior art keywords
high vacuum
vacuum system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1995601569
Other languages
German (de)
Other versions
DE69501569D1 (en
Inventor
Norikazu Ishida
Yoshiharu Mae
Kenji Yajima
Takuro Iwamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Application granted granted Critical
Publication of DE69501569D1 publication Critical patent/DE69501569D1/en
Publication of DE69501569T2 publication Critical patent/DE69501569T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
DE1995601569 1994-06-20 1995-05-17 High vacuum system Expired - Fee Related DE69501569T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16059694A JPH083664A (en) 1994-06-20 1994-06-20 Member for vacuum device and vacuum device

Publications (2)

Publication Number Publication Date
DE69501569D1 DE69501569D1 (en) 1998-03-12
DE69501569T2 true DE69501569T2 (en) 1998-06-10

Family

ID=15718373

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1995601569 Expired - Fee Related DE69501569T2 (en) 1994-06-20 1995-05-17 High vacuum system

Country Status (3)

Country Link
EP (1) EP0688879B1 (en)
JP (1) JPH083664A (en)
DE (1) DE69501569T2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4943095B2 (en) * 2006-08-30 2012-05-30 三菱電機株式会社 Copper alloy and manufacturing method thereof
EP3211117A4 (en) 2015-05-21 2018-04-04 JX Nippon Mining & Metals Corporation Copper alloy sputtering target and method for manufacturing same
JP7131376B2 (en) * 2018-12-27 2022-09-06 三菱マテリアル株式会社 Copper material for sputtering targets
CN113290217B (en) * 2021-05-28 2022-09-23 金川集团股份有限公司 Vacuum continuous casting process of high-purity oxygen-free copper rod

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2175009B (en) * 1985-03-27 1990-02-07 Mitsubishi Metal Corp Wire for bonding a semiconductor device and process for producing the same
JPS62207834A (en) * 1986-03-10 1987-09-12 Nippon Mining Co Ltd Copper material for use in high-vacuum atmosphere
JPS62243727A (en) * 1986-04-16 1987-10-24 Hitachi Cable Ltd Rolled copper foil for printed circuit board
JPS63312934A (en) * 1987-06-16 1988-12-21 Hitachi Cable Ltd Lead frame material for semiconductor
JPS643903A (en) * 1987-06-25 1989-01-09 Furukawa Electric Co Ltd Thin copper wire for electronic devices and manufacture thereof
JP2726939B2 (en) * 1989-03-06 1998-03-11 日鉱金属 株式会社 Highly conductive copper alloy with excellent workability and heat resistance

Also Published As

Publication number Publication date
DE69501569D1 (en) 1998-03-12
JPH083664A (en) 1996-01-09
EP0688879B1 (en) 1998-02-04
EP0688879A1 (en) 1995-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee