DE69426808D1 - Kombiniertes Interferometer und Refraktometer - Google Patents

Kombiniertes Interferometer und Refraktometer

Info

Publication number
DE69426808D1
DE69426808D1 DE69426808T DE69426808T DE69426808D1 DE 69426808 D1 DE69426808 D1 DE 69426808D1 DE 69426808 T DE69426808 T DE 69426808T DE 69426808 T DE69426808 T DE 69426808T DE 69426808 D1 DE69426808 D1 DE 69426808D1
Authority
DE
Germany
Prior art keywords
refractometer
combined interferometer
interferometer
combined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69426808T
Other languages
English (en)
Other versions
DE69426808T2 (de
Inventor
David Roberts Mcmurtry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of DE69426808D1 publication Critical patent/DE69426808D1/de
Application granted granted Critical
Publication of DE69426808T2 publication Critical patent/DE69426808T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69426808T 1993-12-04 1994-11-25 Kombiniertes Interferometer und Refraktometer Expired - Fee Related DE69426808T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939324926A GB9324926D0 (en) 1993-12-04 1993-12-04 Combined interferometer and refractometer

Publications (2)

Publication Number Publication Date
DE69426808D1 true DE69426808D1 (de) 2001-04-12
DE69426808T2 DE69426808T2 (de) 2001-06-13

Family

ID=10746158

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69426808T Expired - Fee Related DE69426808T2 (de) 1993-12-04 1994-11-25 Kombiniertes Interferometer und Refraktometer

Country Status (6)

Country Link
US (1) US5517308A (de)
EP (1) EP0657713B1 (de)
JP (1) JP3830547B2 (de)
CN (1) CN1047841C (de)
DE (1) DE69426808T2 (de)
GB (1) GB9324926D0 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6229619B1 (en) 1996-02-12 2001-05-08 Massachusetts Institute Of Technology Compensation for measurement uncertainty due to atmospheric effects
GB2365142B (en) * 2000-07-27 2002-06-19 Michael John Downs Jamin-type interferometers and components therefor
CN1826512B (zh) * 2003-06-04 2013-05-22 突慧公司 利用光的传播模式测量物质中的光学不均匀性和其他属性
US7006209B2 (en) 2003-07-25 2006-02-28 Advanced Micro Devices, Inc. Method and apparatus for monitoring and controlling imaging in immersion lithography systems
US7061578B2 (en) 2003-08-11 2006-06-13 Advanced Micro Devices, Inc. Method and apparatus for monitoring and controlling imaging in immersion lithography systems
GB2414812B (en) * 2004-06-03 2007-05-02 Nanobeam Ltd Laser interferometer mirror assembly
US20060063989A1 (en) * 2004-08-19 2006-03-23 Hogan Josh N Compact non-invasive analysis system
US20090046297A1 (en) * 2007-02-14 2009-02-19 Nikon Corporation Atmosphere-density-fluctuation monitors for interferometer beams, and atmosphere-supplying systems comprising same
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
WO2011145289A1 (ja) * 2010-05-19 2011-11-24 コニカミノルタセンシング株式会社 干渉光学系
CN105589326A (zh) * 2014-10-23 2016-05-18 北京自动化控制设备研究所 一种微小型原子气室的制作方法
GB2551968A (en) * 2016-06-28 2018-01-10 Oclaro Tech Ltd Optical locker
JP7220219B2 (ja) 2018-01-31 2023-02-09 エーエスエムエル ネザーランズ ビー．ブイ． 波長追跡システム、波長追跡システムを較正する方法、リソグラフィ装置、可動物体の絶対位置を決定する方法、及び干渉計
WO2020139096A1 (ru) * 2018-12-24 2020-07-02 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования Балтийский Государственный Технический Университет "Военмех" Им. Д.Ф.Устинова (Бгту "Военмех") Интерференционная система измерения абсолютной длины
WO2023182359A1 (ja) * 2022-03-24 2023-09-28 長野計器株式会社 干渉計および物理量測定装置
CN117347287A (zh) * 2023-12-06 2024-01-05 山东大学 一种光学干涉结构式自补偿海水盐度测量装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4813783A (en) * 1987-11-03 1989-03-21 Carl-Zeiss-Stiftung Interferometer system for making length or angle measurements
GB8903725D0 (en) * 1989-02-18 1989-04-05 Cambridge Consultants Coherent tracking sensor
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
DE69222219T2 (de) * 1991-03-08 1998-01-15 Renishaw Transducer Syst Absolutwert-Gasrefraktometer

Also Published As

Publication number Publication date
EP0657713B1 (de) 2001-03-07
CN1047841C (zh) 1999-12-29
EP0657713A2 (de) 1995-06-14
US5517308A (en) 1996-05-14
DE69426808T2 (de) 2001-06-13
EP0657713A3 (de) 1999-06-16
CN1117131A (zh) 1996-02-21
JPH07239208A (ja) 1995-09-12
JP3830547B2 (ja) 2006-10-04
GB9324926D0 (en) 1994-01-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee