DE69426451T2 - Dielektrisch isolierter Mikroresonanzwandler - Google Patents
Dielektrisch isolierter MikroresonanzwandlerInfo
- Publication number
- DE69426451T2 DE69426451T2 DE69426451T DE69426451T DE69426451T2 DE 69426451 T2 DE69426451 T2 DE 69426451T2 DE 69426451 T DE69426451 T DE 69426451T DE 69426451 T DE69426451 T DE 69426451T DE 69426451 T2 DE69426451 T2 DE 69426451T2
- Authority
- DE
- Germany
- Prior art keywords
- microresonance
- converter
- dielectrically isolated
- dielectrically
- isolated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/02—Microphones
- H04R17/025—Microphones using a piezoelectric polymer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
- G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Medicines Containing Material From Animals Or Micro-Organisms (AREA)
- Compounds Of Unknown Constitution (AREA)
- Preparation Of Compounds By Using Micro-Organisms (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/095,343 US5417115A (en) | 1993-07-23 | 1993-07-23 | Dielectrically isolated resonant microsensors |
PCT/US1994/008258 WO1995004265A2 (en) | 1993-07-23 | 1994-07-22 | Dielectrically isolated resonant microsensors |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69426451D1 DE69426451D1 (de) | 2001-01-25 |
DE69426451T2 true DE69426451T2 (de) | 2001-04-26 |
Family
ID=22251475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69426451T Expired - Fee Related DE69426451T2 (de) | 1993-07-23 | 1994-07-22 | Dielektrisch isolierter Mikroresonanzwandler |
Country Status (7)
Country | Link |
---|---|
US (1) | US5417115A (de) |
EP (1) | EP0710357B1 (de) |
JP (1) | JP3481627B2 (de) |
AU (1) | AU7402794A (de) |
CA (1) | CA2167398C (de) |
DE (1) | DE69426451T2 (de) |
WO (1) | WO1995004265A2 (de) |
Families Citing this family (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5606473A (en) * | 1993-11-02 | 1997-02-25 | Seagate Technology, Inc. | Unitary rigid and flexible circuit package for disk drives |
US5922212A (en) * | 1995-06-08 | 1999-07-13 | Nippondenso Co., Ltd | Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body |
US5729075A (en) * | 1995-06-12 | 1998-03-17 | National Semiconductor Corporation | Tuneable microelectromechanical system resonator |
GB9524624D0 (en) * | 1995-12-01 | 1996-01-31 | Weston Aerospace Ltd | Pressure sensor |
EP0794616B1 (de) * | 1996-03-08 | 2003-01-29 | Matsushita Electric Industrial Co., Ltd. | Elektronisches Bauteil und Herstellungsverfahren |
US5948981A (en) * | 1996-05-21 | 1999-09-07 | Alliedsignal Inc. | Vibrating beam accelerometer |
US5772322A (en) * | 1996-05-31 | 1998-06-30 | Honeywell Inc. | Resonant microbeam temperature sensor |
JP3045089B2 (ja) * | 1996-12-19 | 2000-05-22 | 株式会社村田製作所 | 素子のパッケージ構造およびその製造方法 |
US5808210A (en) * | 1996-12-31 | 1998-09-15 | Honeywell Inc. | Thin film resonant microbeam absolute pressure sensor |
US5747705A (en) * | 1996-12-31 | 1998-05-05 | Honeywell Inc. | Method for making a thin film resonant microbeam absolute |
TW425478B (en) * | 1997-09-26 | 2001-03-11 | Hokuriku Elect Ind | Acceleration sensor and 3-axis acceleration sensor |
US5959214A (en) * | 1997-12-22 | 1999-09-28 | Delco Electronics Corp. | Strain gauge with steel substrate |
US6031944A (en) * | 1997-12-30 | 2000-02-29 | Honeywell Inc. | High temperature resonant integrated microstructure sensor |
US6445106B1 (en) * | 2000-02-18 | 2002-09-03 | Intel Corporation | Micro-electromechanical structure resonator, method of making, and method of using |
US6698295B1 (en) | 2000-03-31 | 2004-03-02 | Shipley Company, L.L.C. | Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
US7026697B2 (en) * | 2000-03-31 | 2006-04-11 | Shipley Company, L.L.C. | Microstructures comprising a dielectric layer and a thin conductive layer |
EP1164378B1 (de) * | 2000-06-16 | 2012-03-14 | Infineon Technologies AG | Beschleunigungsaufnehmer |
IT1318295B1 (it) * | 2000-07-31 | 2003-07-28 | Abb Ricerca Spa | Dispositivo per la misura della pressione di un fluido |
US6584857B1 (en) | 2000-11-20 | 2003-07-01 | Eastman Kodak Company | Optical strain gauge |
US6487913B2 (en) | 2000-12-18 | 2002-12-03 | Eastman Kodak Company | Strain gauge with resonant light modulator |
JP2002257616A (ja) * | 2001-03-06 | 2002-09-11 | Seiko Epson Corp | センサおよびセンサの製造方法 |
FR2851659B1 (fr) * | 2003-02-24 | 2005-06-24 | Sagem | Capteur vibrant a ecran radiatif |
US6739199B1 (en) | 2003-03-10 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for MEMS device with strain gage |
US7920906B2 (en) | 2005-03-10 | 2011-04-05 | Dexcom, Inc. | System and methods for processing analyte sensor data for sensor calibration |
US9247900B2 (en) | 2004-07-13 | 2016-02-02 | Dexcom, Inc. | Analyte sensor |
DE102004010295A1 (de) * | 2004-03-03 | 2005-09-22 | Robert Bosch Gmbh | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
US20050248424A1 (en) * | 2004-05-07 | 2005-11-10 | Tsung-Kuan Chou | Composite beam microelectromechanical system switch |
US20060270922A1 (en) | 2004-07-13 | 2006-11-30 | Brauker James H | Analyte sensor |
US7713574B2 (en) | 2004-07-13 | 2010-05-11 | Dexcom, Inc. | Transcutaneous analyte sensor |
JP2006029984A (ja) * | 2004-07-16 | 2006-02-02 | Yokogawa Electric Corp | 振動式圧力センサ |
US7176048B1 (en) | 2004-12-12 | 2007-02-13 | Burns David W | Optically coupled sealed-cavity resonator and process |
US7443509B1 (en) | 2004-12-12 | 2008-10-28 | Burns David W | Optical and electronic interface for optically coupled resonators |
US7605391B2 (en) * | 2004-12-12 | 2009-10-20 | Burns David W | Optically coupled resonator |
US7379629B1 (en) | 2004-12-12 | 2008-05-27 | Burns David W | Optically coupled resonant pressure sensor |
US7499604B1 (en) | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
US7017418B1 (en) | 2004-12-15 | 2006-03-28 | General Electric Company | System and method for sensing pressure |
US7546772B2 (en) * | 2004-12-30 | 2009-06-16 | Honeywell International Inc. | Piezoresistive pressure sensor |
US20070236213A1 (en) * | 2006-03-30 | 2007-10-11 | Paden Bradley E | Telemetry method and apparatus using magnetically-driven mems resonant structure |
WO2008157325A2 (en) * | 2007-06-15 | 2008-12-24 | Charles Stark Draper Laboratory, Inc. | Devices, systems, and methods for measuring glucose |
US7589329B1 (en) | 2008-04-23 | 2009-09-15 | Honeywell International Inc. | Systems and methods for remote optical sensing |
US8076737B2 (en) * | 2008-05-20 | 2011-12-13 | Honeywell International Inc. | Systems and methods for acoustic sensing |
US8181531B2 (en) * | 2008-06-27 | 2012-05-22 | Edwin Carlen | Accessible stress-based electrostatic monitoring of chemical reactions and binding |
US9011670B2 (en) * | 2008-08-14 | 2015-04-21 | The Charles Stark Draper Laboratory, Inc. | Three-dimensional metal ion sensor arrays on printed circuit boards |
US7938016B2 (en) * | 2009-03-20 | 2011-05-10 | Freescale Semiconductor, Inc. | Multiple layer strain gauge |
JP5158160B2 (ja) * | 2010-09-10 | 2013-03-06 | 横河電機株式会社 | 振動式トランスデューサ |
JP2014115209A (ja) * | 2012-12-11 | 2014-06-26 | Seiko Epson Corp | Mems素子、電子デバイス、高度計、電子機器および移動体 |
US9861524B2 (en) * | 2013-03-14 | 2018-01-09 | New Jersey Institute Of Technology | Smart shunt devices and methods |
CN103479382B (zh) * | 2013-08-29 | 2015-09-30 | 无锡慧思顿科技有限公司 | 一种声音传感器、基于声音传感器的肠电图检测系统及检测方法 |
CN104614115A (zh) * | 2015-01-30 | 2015-05-13 | 河海大学 | 一种实时测量水压的mems器件及其测量方法 |
US10580605B2 (en) | 2015-11-23 | 2020-03-03 | University Of Utah Research Foundation | Very low power microelectromechanical devices for the internet of everything |
TWI708511B (zh) * | 2016-07-21 | 2020-10-21 | 聯華電子股份有限公司 | 壓阻式麥克風的結構及其製作方法 |
GB2561886B (en) | 2017-04-27 | 2022-10-19 | Cambridge Entpr Ltd | High performance micro-electro-mechanical systems accelerometer |
GB2561889B (en) * | 2017-04-27 | 2022-10-12 | Cambridge Entpr Ltd | High performance micro-electro-mechanical systems accelerometer with electrostatic control of proof mass |
FR3110284B1 (fr) * | 2020-05-14 | 2023-01-13 | Commissariat Energie Atomique | Dispositif de détection utilisant une transduction piézorésistive |
CN116448290B (zh) * | 2023-06-13 | 2023-09-01 | 无锡芯感智半导体有限公司 | 一种高频动态mems压阻式压力传感器及其制备方法 |
CN117929782B (zh) * | 2024-03-21 | 2024-06-07 | 中国工程物理研究院电子工程研究所 | 一种低应力摆式微加速度计 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3486383A (en) * | 1965-01-04 | 1969-12-30 | Singer General Precision | Vibrating beam transducer |
US3413573A (en) * | 1965-06-18 | 1968-11-26 | Westinghouse Electric Corp | Microelectronic frequency selective apparatus with vibratory member and means responsive thereto |
US3470400A (en) * | 1967-12-21 | 1969-09-30 | Singer General Precision | Single beam force transducer with integral mounting isolation |
US3657667A (en) * | 1969-04-23 | 1972-04-18 | Citizen Watch Co Ltd | Oscillator with three-arm mechanical vibrator connected to suppress spurious vibrations |
US4598381A (en) * | 1983-03-24 | 1986-07-01 | Rosemount Inc. | Pressure compensated differential pressure sensor and method |
US4535638A (en) * | 1983-10-03 | 1985-08-20 | Quartztronics, Inc. | Resonator transducer system with temperature compensation |
US4649630A (en) * | 1985-04-01 | 1987-03-17 | Motorola, Inc. | Process for dielectrically isolated semiconductor structure |
DE8712331U1 (de) * | 1986-09-26 | 1988-01-28 | Flowtec AG, Reinach, Basel | Corioliskraft-Massendurchflussmesser |
US4982263A (en) * | 1987-12-21 | 1991-01-01 | Texas Instruments Incorporated | Anodizable strain layer for SOI semiconductor structures |
JPH07104217B2 (ja) * | 1988-05-27 | 1995-11-13 | 横河電機株式会社 | 振動式トランスデューサとその製造方法 |
US4901586A (en) * | 1989-02-27 | 1990-02-20 | Sundstrand Data Control, Inc. | Electrostatically driven dual vibrating beam force transducer |
US5060526A (en) * | 1989-05-30 | 1991-10-29 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with vibrating element |
US5090254A (en) * | 1990-04-11 | 1992-02-25 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers |
US5165289A (en) * | 1990-07-10 | 1992-11-24 | Johnson Service Company | Resonant mechanical sensor |
US5275055A (en) * | 1992-08-31 | 1994-01-04 | Honeywell Inc. | Resonant gauge with microbeam driven in constant electric field |
US5511427A (en) * | 1993-07-21 | 1996-04-30 | Honeywell Inc. | Cantilevered microbeam temperature sensor |
-
1993
- 1993-07-23 US US08/095,343 patent/US5417115A/en not_active Expired - Lifetime
-
1994
- 1994-07-22 AU AU74027/94A patent/AU7402794A/en not_active Abandoned
- 1994-07-22 EP EP95906824A patent/EP0710357B1/de not_active Expired - Lifetime
- 1994-07-22 JP JP50589495A patent/JP3481627B2/ja not_active Expired - Fee Related
- 1994-07-22 WO PCT/US1994/008258 patent/WO1995004265A2/en active IP Right Grant
- 1994-07-22 CA CA002167398A patent/CA2167398C/en not_active Expired - Fee Related
- 1994-07-22 DE DE69426451T patent/DE69426451T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5417115A (en) | 1995-05-23 |
JPH10508090A (ja) | 1998-08-04 |
EP0710357A1 (de) | 1996-05-08 |
AU7402794A (en) | 1995-02-28 |
WO1995004265A3 (en) | 1995-08-03 |
DE69426451D1 (de) | 2001-01-25 |
CA2167398A1 (en) | 1995-02-09 |
EP0710357B1 (de) | 2000-12-20 |
WO1995004265A2 (en) | 1995-02-09 |
JP3481627B2 (ja) | 2003-12-22 |
CA2167398C (en) | 2006-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69426451T2 (de) | Dielektrisch isolierter Mikroresonanzwandler | |
DE69409163D1 (de) | Leistungskonverter | |
DE69427776D1 (de) | Elektromagnetisch-akustischer wandler | |
DE69423801T2 (de) | Frequenzumsetzer | |
DE69521972T2 (de) | Umrichtergerät | |
NO971143L (no) | Ultralyd-stempelomformer | |
DE69403368D1 (de) | Photokopplerapparat | |
DE69416796D1 (de) | Leistungsumwandler | |
DE59407292D1 (de) | Spannungswandler | |
DE69310576D1 (de) | Frequenzumsetzer | |
DE69605433D1 (de) | Unicode-wandler | |
KR940023666U (ko) | 주파수 변환기 | |
DE59307800D1 (de) | Wandlerschaltung | |
KR950012703U (ko) | 전력변환장치 | |
ATA222993A (de) | Elektroakustischer wandler | |
FI1155U1 (fi) | Konverterbar ljusstake | |
DE59405794D1 (de) | Diacylperoxidester | |
KR950005495U (ko) | 조립식 가구 | |
DK0697165T3 (da) | Mikrobølgeovn | |
KR950019879U (ko) | 전자렌지 | |
KR950004951U (ko) | 직류-교류 변환기 | |
KR950004953U (ko) | 전압 변환장치 | |
KR940022295U (ko) | 노-트 | |
KR940005332U (ko) | 수첩 | |
KR940022970U (ko) | 조립식 가구 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |