DE69425332T2 - Verfahren und Vorrichtung zur Plasmamassenspektrometrie - Google Patents

Verfahren und Vorrichtung zur Plasmamassenspektrometrie

Info

Publication number
DE69425332T2
DE69425332T2 DE69425332T DE69425332T DE69425332T2 DE 69425332 T2 DE69425332 T2 DE 69425332T2 DE 69425332 T DE69425332 T DE 69425332T DE 69425332 T DE69425332 T DE 69425332T DE 69425332 T2 DE69425332 T2 DE 69425332T2
Authority
DE
Germany
Prior art keywords
mass spectrometry
plasma mass
plasma
spectrometry
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69425332T
Other languages
English (en)
Other versions
DE69425332D1 (de
Inventor
Stephen Esler Anderson
Ian Lawrence Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Australia Pty Ltd
Original Assignee
Varian Australia Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Australia Pty Ltd filed Critical Varian Australia Pty Ltd
Publication of DE69425332D1 publication Critical patent/DE69425332D1/de
Application granted granted Critical
Publication of DE69425332T2 publication Critical patent/DE69425332T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE69425332T 1993-03-05 1994-03-04 Verfahren und Vorrichtung zur Plasmamassenspektrometrie Expired - Fee Related DE69425332T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPL764393 1993-03-05

Publications (2)

Publication Number Publication Date
DE69425332D1 DE69425332D1 (de) 2000-08-24
DE69425332T2 true DE69425332T2 (de) 2001-02-22

Family

ID=3776749

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69414284T Expired - Fee Related DE69414284T2 (de) 1993-03-05 1994-03-04 Plasma-Massenspektrometrie
DE69425332T Expired - Fee Related DE69425332T2 (de) 1993-03-05 1994-03-04 Verfahren und Vorrichtung zur Plasmamassenspektrometrie

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69414284T Expired - Fee Related DE69414284T2 (de) 1993-03-05 1994-03-04 Plasma-Massenspektrometrie

Country Status (4)

Country Link
US (1) US5519215A (de)
EP (2) EP0614210B1 (de)
CA (1) CA2116821C (de)
DE (2) DE69414284T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996019716A1 (en) * 1994-12-20 1996-06-27 Varian Australia Pty. Ltd. Spectrometer with discharge limiting means
US5691642A (en) * 1995-07-28 1997-11-25 Trielectrix Method and apparatus for characterizing a plasma using broadband microwave spectroscopic measurements
US6353206B1 (en) * 1996-05-30 2002-03-05 Applied Materials, Inc. Plasma system with a balanced source
NO304861B1 (no) * 1997-02-14 1999-02-22 Cato Brede FremgangsmÕte ved elementselektiv deteksjon, mikroplasmamassespektrometer til bruk ved fremgangsmÕten og plasmaionekilde, samt anvendelser av disse
WO2001005020A1 (en) * 1999-07-13 2001-01-18 Tokyo Electron Limited Radio frequency power source for generating an inductively coupled plasma
US6583407B1 (en) * 1999-10-29 2003-06-24 Agilent Technologies, Inc. Method and apparatus for selective ion delivery using ion polarity independent control
DE10019257C2 (de) * 2000-04-15 2003-11-06 Leibniz Inst Fuer Festkoerper Glimmentladungsquelle für die Elementanalytik
US6833710B2 (en) * 2000-10-27 2004-12-21 Axcelis Technologies, Inc. Probe assembly for detecting an ion in a plasma generated in an ion source
US6610978B2 (en) 2001-03-27 2003-08-26 Agilent Technologies, Inc. Integrated sample preparation, separation and introduction microdevice for inductively coupled plasma mass spectrometry
JP4903515B2 (ja) * 2006-08-11 2012-03-28 アジレント・テクノロジーズ・インク 誘導結合プラズマ質量分析装置
GB2498173C (en) * 2011-12-12 2018-06-27 Thermo Fisher Scient Bremen Gmbh Mass spectrometer vacuum interface method and apparatus
WO2014160091A1 (en) * 2013-03-14 2014-10-02 Perkinelmer Health Sciences, Inc. Asymmetric induction devices and systems and methods using them
CN103635004A (zh) * 2013-12-13 2014-03-12 南开大学 一种等离子体中离子种类与数量密度分布的测量方法
US9593420B2 (en) * 2014-11-07 2017-03-14 Denton Jarvis System for manufacturing graphene on a substrate
KR20180092684A (ko) * 2017-02-10 2018-08-20 주식회사 유진테크 Icp 안테나 및 이를 포함하는 기판 처리 장치
US10497568B2 (en) 2017-09-08 2019-12-03 Denton Jarvis System and method for precision formation of a lattice on a substrate

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3958883A (en) * 1974-07-10 1976-05-25 Baird-Atomic, Inc. Radio frequency induced plasma excitation of optical emission spectroscopic samples
JPS5873848A (ja) * 1981-10-27 1983-05-04 Shimadzu Corp 高周波誘導結合プラズマ安定装置
CA1189201A (en) * 1982-12-08 1985-06-18 Donald J. Douglas Method and apparatus for sampling a plasma into a vacuum chamber
US4501965A (en) * 1983-01-14 1985-02-26 Mds Health Group Limited Method and apparatus for sampling a plasma into a vacuum chamber
USRE33386E (en) * 1983-01-14 1990-10-16 Method and apparatus for sampling a plasma into a vacuum chamber
US4629940A (en) * 1984-03-02 1986-12-16 The Perkin-Elmer Corporation Plasma emission source
US4682026A (en) * 1986-04-10 1987-07-21 Mds Health Group Limited Method and apparatus having RF biasing for sampling a plasma into a vacuum chamber
DE3632340C2 (de) * 1986-09-24 1998-01-15 Leybold Ag Induktiv angeregte Ionenquelle
US4955717A (en) * 1986-12-02 1990-09-11 Geochemical Services, Inc. Demand modulated atomization apparatus and method for plasma spectroscopy
JP2543761B2 (ja) * 1989-03-23 1996-10-16 セイコー電子工業株式会社 誘導結合プラズマ質量分析装置
US4982140A (en) * 1989-10-05 1991-01-01 General Electric Company Starting aid for an electrodeless high intensity discharge lamp
US5383019A (en) * 1990-03-23 1995-01-17 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
CA2047571C (en) * 1990-07-24 2001-12-18 Ian Lawrence Turner Inductively coupled plasma spectroscopy
JP2593587B2 (ja) * 1991-03-12 1997-03-26 株式会社日立製作所 プラズマイオン源極微量元素質量分析装置

Also Published As

Publication number Publication date
US5519215A (en) 1996-05-21
EP0734049A3 (de) 1996-12-27
DE69425332D1 (de) 2000-08-24
EP0614210A1 (de) 1994-09-07
DE69414284D1 (de) 1998-12-10
EP0734049B1 (de) 2000-07-19
CA2116821A1 (en) 1994-09-06
CA2116821C (en) 2003-12-23
DE69414284T2 (de) 1999-05-20
EP0734049A2 (de) 1996-09-25
EP0614210B1 (de) 1998-11-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee