DE19581833T1 - Verfahren und Vorrichtung zur Plasmamassenanalyse mit verringerten Raumladungseffekten - Google Patents

Verfahren und Vorrichtung zur Plasmamassenanalyse mit verringerten Raumladungseffekten

Info

Publication number
DE19581833T1
DE19581833T1 DE19581833T DE19581833T DE19581833T1 DE 19581833 T1 DE19581833 T1 DE 19581833T1 DE 19581833 T DE19581833 T DE 19581833T DE 19581833 T DE19581833 T DE 19581833T DE 19581833 T1 DE19581833 T1 DE 19581833T1
Authority
DE
Germany
Prior art keywords
space charge
mass analysis
plasma mass
reduced space
charge effects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19581833T
Other languages
English (en)
Inventor
Scott D Tanner
Donald J Douglas
Lisa Cousins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordion Inc
Original Assignee
MDS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MDS Inc filed Critical MDS Inc
Publication of DE19581833T1 publication Critical patent/DE19581833T1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • H01J49/044—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for preventing droplets from entering the analyzer; Desolvation of droplets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE19581833T 1994-11-09 1995-10-31 Verfahren und Vorrichtung zur Plasmamassenanalyse mit verringerten Raumladungseffekten Ceased DE19581833T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/338,221 US5565679A (en) 1993-05-11 1994-11-09 Method and apparatus for plasma mass analysis with reduced space charge effects
PCT/CA1995/000619 WO1996015547A1 (en) 1994-11-09 1995-10-31 Method and apparatus for plasma mass analysis with reduced space charge effects

Publications (1)

Publication Number Publication Date
DE19581833T1 true DE19581833T1 (de) 1999-11-25

Family

ID=23323923

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19581833T Ceased DE19581833T1 (de) 1994-11-09 1995-10-31 Verfahren und Vorrichtung zur Plasmamassenanalyse mit verringerten Raumladungseffekten

Country Status (6)

Country Link
US (1) US5565679A (de)
JP (1) JPH11500566A (de)
AU (1) AU3739095A (de)
DE (1) DE19581833T1 (de)
GB (1) GB2309580B (de)
WO (1) WO1996015547A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010043410B4 (de) * 2009-12-17 2020-09-24 Agilent Technologies Inc. Ionentrichter für die Massenspektrometrie

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JPH09270421A (ja) * 1996-04-01 1997-10-14 Mitsubishi Electric Corp 表面処理装置および表面処理方法
JP3492081B2 (ja) * 1996-05-15 2004-02-03 セイコーインスツルメンツ株式会社 プラズマイオン源質量分析装置
US5869831A (en) * 1996-06-27 1999-02-09 Yale University Method and apparatus for separation of ions in a gas for mass spectrometry
GB2324906B (en) * 1997-04-29 2002-01-09 Masslab Ltd Ion source for a mass analyser and method of providing a source of ions for analysis
US6122050A (en) * 1998-02-26 2000-09-19 Cornell Research Foundation, Inc. Optical interface for a radially viewed inductively coupled argon plasma-Optical emission spectrometer
US6265717B1 (en) * 1998-07-15 2001-07-24 Agilent Technologies Inductively coupled plasma mass spectrometer and method
GB9820210D0 (en) 1998-09-16 1998-11-11 Vg Elemental Limited Means for removing unwanted ions from an ion transport system and mass spectrometer
US6248999B1 (en) * 1998-09-24 2001-06-19 Finnigan Corporation Assembly for coupling an ion source to a mass analyzer
US6257835B1 (en) * 1999-03-22 2001-07-10 Quantachrome Corporation Dry vacuum pump system for gas sorption analyzer
US6630665B2 (en) 2000-10-03 2003-10-07 Mds Inc. Device and method preventing ion source gases from entering reaction/collision cells in mass spectrometry
CA2317085C (en) 2000-08-30 2009-12-15 Mds Inc. Device and method for preventing ion source gases from entering reaction/collision cells in mass spectrometry
USRE39627E1 (en) * 2000-08-30 2007-05-15 Mds Inc. Device and method preventing ion source gases from entering reaction/collision cells in mass spectrometry
US7119330B2 (en) 2002-03-08 2006-10-10 Varian Australia Pty Ltd Plasma mass spectrometer
GB0210930D0 (en) 2002-05-13 2002-06-19 Thermo Electron Corp Improved mass spectrometer and mass filters therefor
JP2003344230A (ja) * 2002-05-24 2003-12-03 Hitachi Ltd ガス導入装置とガス分析システム
ATE450050T1 (de) * 2003-02-14 2009-12-15 Mds Sciex Atmosphärendruck-diskriminator für geladene teilchen für massenspektrometrie
JP4162138B2 (ja) * 2003-10-27 2008-10-08 株式会社リガク 昇温脱離ガス分析装置
GB0411426D0 (en) 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
US7351960B2 (en) * 2005-05-16 2008-04-01 Thermo Finnigan Llc Enhanced ion desolvation for an ion mobility spectrometry device
US7742167B2 (en) * 2005-06-17 2010-06-22 Perkinelmer Health Sciences, Inc. Optical emission device with boost device
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
WO2009030048A1 (en) * 2007-09-07 2009-03-12 Ionics Mass Spectrometry Group, Inc. Multi-pressure stage mass spectrometer and methods
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
US9105457B2 (en) * 2010-02-24 2015-08-11 Perkinelmer Health Sciences, Inc. Cone-shaped orifice arrangement for inductively coupled plasma sample introduction system
US9190253B2 (en) 2010-02-26 2015-11-17 Perkinelmer Health Sciences, Inc. Systems and methods of suppressing unwanted ions
CN203325832U (zh) 2010-02-26 2013-12-04 珀金埃尔默健康科技有限公司 允许单元在包括碰撞模式和反应模式的至少两种模式之间切换的系统和操作质谱仪的工具套件
SG10201501031YA (en) 2010-02-26 2015-04-29 Perkinelmer Health Sci Inc Fluid chromatography injectors and injector inserts
CN106463329B (zh) * 2014-02-14 2019-09-24 珀金埃尔默健康科学公司 用于多模式电感耦合等离子体质谱仪的自动化优化的系统及方法
CN104576289B (zh) * 2014-12-31 2017-08-25 聚光科技(杭州)股份有限公司 一种可调真空压力的电感耦合等离子体质谱仪
DE202018000285U1 (de) * 2018-01-18 2019-04-23 Leybold Gmbh Vakuumpumpen-System

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE33386E (en) * 1983-01-14 1990-10-16 Method and apparatus for sampling a plasma into a vacuum chamber
CA1245778A (en) * 1985-10-24 1988-11-29 John B. French Mass analyzer system with reduced drift
US4963735A (en) * 1988-11-11 1990-10-16 Hitachi, Ltd. Plasma source mass spectrometer
GB8901975D0 (en) * 1989-01-30 1989-03-22 Vg Instr Group Plasma mass spectrometer
JP2543761B2 (ja) * 1989-03-23 1996-10-16 セイコー電子工業株式会社 誘導結合プラズマ質量分析装置
JPH03194843A (ja) * 1989-12-25 1991-08-26 Hitachi Ltd プラズマイオン源極微量元素質量分析装置
JPH03261062A (ja) * 1990-03-09 1991-11-20 Hitachi Ltd プラズマ極微量元素質量分析装置
US5381008A (en) * 1993-05-11 1995-01-10 Mds Health Group Ltd. Method of plasma mass analysis with reduced space charge effects
US5316955A (en) * 1993-06-14 1994-05-31 Govorchin Steven W Furnace atomization electron ionization mass spectrometry

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010043410B4 (de) * 2009-12-17 2020-09-24 Agilent Technologies Inc. Ionentrichter für die Massenspektrometrie

Also Published As

Publication number Publication date
JPH11500566A (ja) 1999-01-12
US5565679A (en) 1996-10-15
WO1996015547A1 (en) 1996-05-23
GB2309580B (en) 1999-02-10
AU3739095A (en) 1996-06-06
GB2309580A (en) 1997-07-30
GB9708279D0 (en) 1997-06-18

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection