DE69423931T2 - Befestigung einer Vorrichtung zur Reinigung mittels kryogenem Aerosol - Google Patents
Befestigung einer Vorrichtung zur Reinigung mittels kryogenem AerosolInfo
- Publication number
- DE69423931T2 DE69423931T2 DE1994623931 DE69423931T DE69423931T2 DE 69423931 T2 DE69423931 T2 DE 69423931T2 DE 1994623931 DE1994623931 DE 1994623931 DE 69423931 T DE69423931 T DE 69423931T DE 69423931 T2 DE69423931 T2 DE 69423931T2
- Authority
- DE
- Germany
- Prior art keywords
- nozzle
- gas
- cleaning
- substance
- aerosol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000443 aerosol Substances 0.000 title claims description 76
- 238000004140 cleaning Methods 0.000 title claims description 48
- 239000007789 gas Substances 0.000 claims description 87
- 239000000126 substance Substances 0.000 claims description 45
- 239000007788 liquid Substances 0.000 claims description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- 238000010926 purge Methods 0.000 claims description 15
- 238000011109 contamination Methods 0.000 claims description 9
- 238000009833 condensation Methods 0.000 claims description 7
- 230000005494 condensation Effects 0.000 claims description 7
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 2
- 239000002245 particle Substances 0.000 description 32
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 28
- 238000001816 cooling Methods 0.000 description 25
- 238000000034 method Methods 0.000 description 20
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 18
- 239000000356 contaminant Substances 0.000 description 18
- 230000008569 process Effects 0.000 description 18
- 229910052786 argon Inorganic materials 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- 230000007704 transition Effects 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000007787 solid Substances 0.000 description 10
- 239000001569 carbon dioxide Substances 0.000 description 9
- 229910002092 carbon dioxide Inorganic materials 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 239000008188 pellet Substances 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000011253 protective coating Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012459 cleaning agent Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005453 pelletization Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 231100000206 health hazard Toxicity 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003442 weekly effect Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/076,065 US5486132A (en) | 1993-06-14 | 1993-06-14 | Mounting apparatus for cryogenic aerosol cleaning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69423931D1 DE69423931D1 (de) | 2000-05-18 |
| DE69423931T2 true DE69423931T2 (de) | 2000-10-12 |
Family
ID=22129732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1994623931 Expired - Lifetime DE69423931T2 (de) | 1993-06-14 | 1994-05-06 | Befestigung einer Vorrichtung zur Reinigung mittels kryogenem Aerosol |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE69423931T2 (enrdf_load_stackoverflow) |
| TW (1) | TW257698B (enrdf_load_stackoverflow) |
-
1994
- 1994-05-06 DE DE1994623931 patent/DE69423931T2/de not_active Expired - Lifetime
- 1994-11-14 TW TW83110521A patent/TW257698B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE69423931D1 (de) | 2000-05-18 |
| TW257698B (enrdf_load_stackoverflow) | 1995-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69417109T2 (de) | Wärmetauscher | |
| US5366156A (en) | Nozzle apparatus for producing aerosol | |
| DE69112913T2 (de) | Reinigung einer Oberfläche mittels eines kryogenen Aerosols. | |
| DE3876670T2 (de) | Apparat und verfahren zum entfernen von sehr kleinen teilchen aus einem substrat. | |
| EP0712691B1 (en) | Apparatus for producing cryogenic aerosol | |
| DE4402247B4 (de) | Oberflächenreinigung mit Argon | |
| DE69112506T2 (de) | CVD-Anlage und Verfahren zur Reduzierung der Teilchen-Verseuchung in einem CVD-Verfahren. | |
| DE19860084A1 (de) | Verfahren zum Strukturieren eines Substrats | |
| EP0631846B1 (en) | Mounting apparatus for cryogenic aerosol cleaning | |
| EP1169145B1 (de) | Verfahren und vorrichtung zum reinigen von substraten | |
| DE10335470A1 (de) | Verfahren und Vorrichtung zur Beschichtung oder Modifizierung von Oberflächen | |
| DE69423931T2 (de) | Befestigung einer Vorrichtung zur Reinigung mittels kryogenem Aerosol | |
| DE69415414T2 (de) | Gerät mit Düse zur Erzeugung eines Aerosols | |
| DE69416204T2 (de) | Vorrichtung zur Erzeugung eines kryogenen Aerosols | |
| KR960003112B1 (ko) | 고체 표면 세정 장치 | |
| DE202016008783U1 (de) | Vorrichtung zur Entfernung von Pellikeln | |
| DE19926084A1 (de) | Absaugvorrichtung und Vorrichtung enthaltend eine Absaugvorrichtung | |
| EP0425623A1 (de) | Verfahren zum auftragen von keramischem material. | |
| DE102021112339A1 (de) | Verfahren, Inertisierungsvorrichtung und Inertgasbox zur Herstellung einer Inertgasatmosphäre | |
| EP0713071B1 (en) | Heat exchanger | |
| DE102006013801A1 (de) | Gaseinlassorgan mit gelochter Isolationsplatte | |
| DE19850415C1 (de) | Substrathalter für Mehrkammer-Vakuumbeschichtungsanlagen | |
| KR0145028B1 (ko) | 에어로졸 생성장치 | |
| KR0122874B1 (ko) | 에어로졸 생성용 노즐장치 | |
| KR0145032B1 (ko) | 공구 장착 및 에어로졸 생성장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8320 | Willingness to grant licences declared (paragraph 23) | ||
| 8328 | Change in the person/name/address of the agent |
Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7 |