DE69423212T2 - Selbstausrichtendes in-situ ellipsometer und verfahren zur verwendung bei prozessüberwachung - Google Patents

Selbstausrichtendes in-situ ellipsometer und verfahren zur verwendung bei prozessüberwachung

Info

Publication number
DE69423212T2
DE69423212T2 DE69423212T DE69423212T DE69423212T2 DE 69423212 T2 DE69423212 T2 DE 69423212T2 DE 69423212 T DE69423212 T DE 69423212T DE 69423212 T DE69423212 T DE 69423212T DE 69423212 T2 DE69423212 T2 DE 69423212T2
Authority
DE
Germany
Prior art keywords
aligning
self
process monitoring
situ ellipsometer
ellipsometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69423212T
Other languages
English (en)
Other versions
DE69423212D1 (de
Inventor
Shaochung Hsu
N De
L Robison
Tugrul Yasar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69423212D1 publication Critical patent/DE69423212D1/de
Publication of DE69423212T2 publication Critical patent/DE69423212T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69423212T 1993-04-26 1994-01-14 Selbstausrichtendes in-situ ellipsometer und verfahren zur verwendung bei prozessüberwachung Expired - Fee Related DE69423212T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/052,888 US5408322A (en) 1993-04-26 1993-04-26 Self aligning in-situ ellipsometer and method of using for process monitoring
PCT/US1994/000478 WO1994025823A1 (en) 1993-04-26 1994-01-14 Self aligning in-situ ellipsometer and method of using for process monitoring

Publications (2)

Publication Number Publication Date
DE69423212D1 DE69423212D1 (de) 2000-04-06
DE69423212T2 true DE69423212T2 (de) 2000-09-07

Family

ID=21980570

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69423212T Expired - Fee Related DE69423212T2 (de) 1993-04-26 1994-01-14 Selbstausrichtendes in-situ ellipsometer und verfahren zur verwendung bei prozessüberwachung

Country Status (8)

Country Link
US (1) US5408322A (de)
EP (1) EP0696345B1 (de)
JP (1) JP2969950B2 (de)
KR (1) KR960702098A (de)
AU (1) AU6266794A (de)
CA (1) CA2159831A1 (de)
DE (1) DE69423212T2 (de)
WO (1) WO1994025823A1 (de)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012024261A1 (de) * 2012-12-12 2014-03-27 STM Sensor Technologie München GmbH Prüfverfahren und -Vorrichtung für Oberflächen
DE102012024261B4 (de) * 2012-12-12 2015-02-12 Balluff STM GmbH Prüfverfahren und -vorrichtung für Oberflächen

Also Published As

Publication number Publication date
CA2159831A1 (en) 1994-11-10
KR960702098A (ko) 1996-03-28
EP0696345A1 (de) 1996-02-14
EP0696345B1 (de) 2000-03-01
US5408322A (en) 1995-04-18
DE69423212D1 (de) 2000-04-06
JPH08509810A (ja) 1996-10-15
AU6266794A (en) 1994-11-21
WO1994025823A1 (en) 1994-11-10
JP2969950B2 (ja) 1999-11-02

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee