DE69419470T2 - Messvorrichtung zur Determinierung der Verschiebung eines bewegbaren Objekts - Google Patents

Messvorrichtung zur Determinierung der Verschiebung eines bewegbaren Objekts

Info

Publication number
DE69419470T2
DE69419470T2 DE69419470T DE69419470T DE69419470T2 DE 69419470 T2 DE69419470 T2 DE 69419470T2 DE 69419470 T DE69419470 T DE 69419470T DE 69419470 T DE69419470 T DE 69419470T DE 69419470 T2 DE69419470 T2 DE 69419470T2
Authority
DE
Germany
Prior art keywords
measuring device
displacement
determining
movable object
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69419470T
Other languages
English (en)
Other versions
DE69419470D1 (de
Inventor
Johannes Wilhelmus Dorot Bosch
Josephus Johannes Maria Braat
Joannes Gregorius Bremer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE69419470D1 publication Critical patent/DE69419470D1/de
Application granted granted Critical
Publication of DE69419470T2 publication Critical patent/DE69419470T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69419470T 1993-09-13 1994-09-07 Messvorrichtung zur Determinierung der Verschiebung eines bewegbaren Objekts Expired - Fee Related DE69419470T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE9300957A BE1007513A3 (nl) 1993-09-13 1993-09-13 Meetinrichting voor het bepalen van de verplaatsing van een beweegbaar voorwerp.

Publications (2)

Publication Number Publication Date
DE69419470D1 DE69419470D1 (de) 1999-08-19
DE69419470T2 true DE69419470T2 (de) 2000-02-17

Family

ID=3887333

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69419470T Expired - Fee Related DE69419470T2 (de) 1993-09-13 1994-09-07 Messvorrichtung zur Determinierung der Verschiebung eines bewegbaren Objekts

Country Status (6)

Country Link
US (1) US5640008A (de)
EP (1) EP0643286B1 (de)
JP (1) JPH07167676A (de)
AT (1) ATE182210T1 (de)
BE (1) BE1007513A3 (de)
DE (1) DE69419470T2 (de)

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Publication number Priority date Publication date Assignee Title
DE19524725C1 (de) * 1995-07-07 1996-07-11 Zeiss Carl Jena Gmbh Fotoelektrischer Kodierer zum Abtasten optischer Strukturen
JPH10132612A (ja) * 1996-10-28 1998-05-22 Mitsutoyo Corp 光学式変位検出装置
FR2765679B1 (fr) * 1997-07-01 1999-09-03 Celerc Microtechniques Codeur optique incremental
JPH11101660A (ja) * 1997-09-26 1999-04-13 Mitsutoyo Corp 光学式変位検出装置
JP3937596B2 (ja) 1998-06-16 2007-06-27 キヤノン株式会社 変位情報測定装置
JP2000321018A (ja) 1999-05-12 2000-11-24 Mitsutoyo Corp 光学式変位検出装置
US6327791B1 (en) 1999-06-09 2001-12-11 The Government Of The United States As Represented By The Secretary Of Commerce Chain code position detector
WO2000077472A1 (en) * 1999-06-16 2000-12-21 Snorkel International, Inc. Chain code position detector
DE29916394U1 (de) * 1999-09-17 2001-02-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
JP4694677B2 (ja) * 2000-07-06 2011-06-08 株式会社ミツトヨ 光学式エンコーダ
JP4694676B2 (ja) * 2000-07-06 2011-06-08 株式会社ミツトヨ 光学式エンコーダ
JP2002228491A (ja) 2001-02-05 2002-08-14 Mitsutoyo Corp 光学式エンコーダ用発光光源装置
JP2003106871A (ja) * 2001-09-28 2003-04-09 Mitsutoyo Corp 発光ユニット、発光受光ユニットおよび光学式変位検出装置
US6970286B1 (en) 2004-06-23 2005-11-29 Corning Incorporated Multiple field of view reflective telescope
US7197828B2 (en) * 2005-05-31 2007-04-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement
TW200841410A (en) * 2006-04-14 2008-10-16 Raintree Scientific Instr Shanghai Corp Optical focusing devices
EP1995567A1 (de) 2007-05-24 2008-11-26 Leica Geosystems AG Optoelektronisches lagemessverfahren und optoelektronische lagemesseinrichtung
US8154712B2 (en) * 2008-07-23 2012-04-10 Corning Incorporated Insertion of laser path in multiple field of view reflective telescope
DE102009031694B3 (de) * 2009-07-04 2010-10-14 Qundis Gmbh Durchflusszähler
EP2693166B1 (de) * 2012-07-31 2015-09-09 SICK STEGMANN GmbH Sende- und Empfangseinheit und Drehgeber mit einer solchen
JP6690998B2 (ja) * 2016-05-27 2020-04-28 株式会社ミツトヨ 発光ユニット、発光受光ユニットおよび光電式エンコーダ
JP6855203B2 (ja) * 2016-10-03 2021-04-07 株式会社ミツトヨ 発光ユニットおよび光電式エンコーダ
JP7051480B2 (ja) * 2017-08-02 2022-04-11 Dmg森精機株式会社 相対位置検出手段
JP7233186B2 (ja) * 2018-09-18 2023-03-06 Dmg森精機株式会社 相対位置検出手段、及び変位検出装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3589235A (en) * 1969-02-07 1971-06-29 Polaroid Corp Compact viewfinder
DE2002891A1 (de) * 1970-01-23 1971-07-29 Wilnjusskij Exnii Metalloresch Winkelmesseinrichtung
NL7403468A (nl) * 1974-03-15 1975-09-17 Philips Nv Inrichting voor het bepalen van de verplaat- sing van een onderdeel van een werktuig.
US4340814A (en) * 1980-10-14 1982-07-20 Dynamics Research Corporation Electro-optical position transducer
JPS6031016A (ja) * 1983-07-29 1985-02-16 Matsushita Electric Works Ltd 光学式のエンコ−ダ
US4601576A (en) * 1983-12-09 1986-07-22 Tencor Instruments Light collector for optical contaminant and flaw detector
DE9006491U1 (de) * 1990-06-08 1991-10-10 Siemens Ag, 8000 Muenchen, De
US5279044A (en) * 1991-03-12 1994-01-18 U.S. Philips Corporation Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device
US5309276A (en) * 1991-08-29 1994-05-03 Optical Research Associates Catoptric optical system including concave and convex reflectors

Also Published As

Publication number Publication date
DE69419470D1 (de) 1999-08-19
JPH07167676A (ja) 1995-07-04
EP0643286B1 (de) 1999-07-14
ATE182210T1 (de) 1999-07-15
US5640008A (en) 1997-06-17
BE1007513A3 (nl) 1995-07-18
EP0643286A1 (de) 1995-03-15

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee