DE69416368D1 - Akustische Oberflächenwellenanordnung und Verfahren zu deren Herstellung - Google Patents

Akustische Oberflächenwellenanordnung und Verfahren zu deren Herstellung

Info

Publication number
DE69416368D1
DE69416368D1 DE69416368T DE69416368T DE69416368D1 DE 69416368 D1 DE69416368 D1 DE 69416368D1 DE 69416368 T DE69416368 T DE 69416368T DE 69416368 T DE69416368 T DE 69416368T DE 69416368 D1 DE69416368 D1 DE 69416368D1
Authority
DE
Germany
Prior art keywords
making
same
acoustic wave
surface acoustic
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69416368T
Other languages
English (en)
Other versions
DE69416368T2 (de
Inventor
Masami Hattori
Hideo Torii
Masaki Aoki
Eiji Fujii
Atsushi Tomozawa
Ryoichi Takayama
Ken Kamata
Yasuhiko Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69416368D1 publication Critical patent/DE69416368D1/de
Publication of DE69416368T2 publication Critical patent/DE69416368T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69416368T 1993-09-16 1994-09-15 Akustische Oberflächenwellenanordnung und Verfahren zu deren Herstellung Expired - Fee Related DE69416368T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP23022193 1993-09-16
JP23021893 1993-09-16
JP23020393 1993-09-16
JP9175094 1994-04-28
JP9175194 1994-04-28

Publications (2)

Publication Number Publication Date
DE69416368D1 true DE69416368D1 (de) 1999-03-18
DE69416368T2 DE69416368T2 (de) 1999-06-10

Family

ID=27525560

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69416368T Expired - Fee Related DE69416368T2 (de) 1993-09-16 1994-09-15 Akustische Oberflächenwellenanordnung und Verfahren zu deren Herstellung

Country Status (3)

Country Link
US (1) US5521454A (de)
EP (1) EP0644651B1 (de)
DE (1) DE69416368T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5759753A (en) * 1995-07-19 1998-06-02 Matsushita Electric Industrial Co., Ltd. Piezoelectric device and method of manufacturing the same
EP0762640B1 (de) * 1995-09-01 2001-02-14 Murata Manufacturing Co., Ltd. Akustische Oberflächenwellenanordnung
KR100694928B1 (ko) * 1999-07-26 2007-03-14 도꾸리쯔교세이호진 상교기쥬쯔 소고겡뀨죠 ＺｎＯ계 화합물 반도체발광소자 및 그 제조방법
JP5650553B2 (ja) * 2011-02-04 2015-01-07 太陽誘電株式会社 弾性波デバイスの製造方法
US10164605B2 (en) 2016-01-26 2018-12-25 Avago Technologies International Sales Pte. Limited Bulk acoustic wave resonator with piezoelectric layer comprising lithium niobate or lithium tantalate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577223A (en) * 1978-12-05 1980-06-10 Matsushita Electric Ind Co Ltd Surface elastic wave element
JPS5631213A (en) * 1979-08-24 1981-03-30 Matsushita Electric Ind Co Ltd Surface elastic wave element
JPH04358410A (ja) * 1991-06-05 1992-12-11 Sumitomo Electric Ind Ltd 表面弾性波素子及びその製造方法
EP0534354A1 (de) * 1991-09-25 1993-03-31 Sumitomo Electric Industries, Limited Akustische Oberflächenwellenanordnung und ihr Herstellungsverfahren
JPH0590871A (ja) * 1991-09-27 1993-04-09 Sumitomo Electric Ind Ltd 表面弾性波素子

Also Published As

Publication number Publication date
EP0644651A1 (de) 1995-03-22
EP0644651B1 (de) 1999-02-03
DE69416368T2 (de) 1999-06-10
US5521454A (en) 1996-05-28

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee