DE69415982D1 - Kapazitiver Druckwandler mit zwei Kammern - Google Patents

Kapazitiver Druckwandler mit zwei Kammern

Info

Publication number
DE69415982D1
DE69415982D1 DE69415982T DE69415982T DE69415982D1 DE 69415982 D1 DE69415982 D1 DE 69415982D1 DE 69415982 T DE69415982 T DE 69415982T DE 69415982 T DE69415982 T DE 69415982T DE 69415982 D1 DE69415982 D1 DE 69415982D1
Authority
DE
Germany
Prior art keywords
chambers
pressure converter
capacitive pressure
capacitive
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69415982T
Other languages
English (en)
Other versions
DE69415982T2 (de
Inventor
Hideyuki Bingo
Yasuhide Nishimuara
Kazuhisa Matsuda
Nobuo Kakui
Tomonori Moriyama
Kouji Shimomoto
Yoshihiro Umeuchi
Takaji Nakamura
Yoshitaka Sunagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Application granted granted Critical
Publication of DE69415982D1 publication Critical patent/DE69415982D1/de
Publication of DE69415982T2 publication Critical patent/DE69415982T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE1994615982 1994-10-07 1994-10-07 Kapazitiver Druckwandler mit zwei Kammern Expired - Fee Related DE69415982T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19940115830 EP0706038B1 (de) 1994-10-07 1994-10-07 Kapazitiver Druckwandler mit zwei Kammern

Publications (2)

Publication Number Publication Date
DE69415982D1 true DE69415982D1 (de) 1999-02-25
DE69415982T2 DE69415982T2 (de) 1999-09-09

Family

ID=8216367

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994615982 Expired - Fee Related DE69415982T2 (de) 1994-10-07 1994-10-07 Kapazitiver Druckwandler mit zwei Kammern

Country Status (2)

Country Link
EP (1) EP0706038B1 (de)
DE (1) DE69415982T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1307380B1 (it) * 1999-08-17 2001-11-06 Bross Exp Ag Dispositivo per il controllo del funzionamento di pompe
JP2004069555A (ja) * 2002-08-07 2004-03-04 Omron Corp 圧力センサおよびその製造方法
DE102005046331A1 (de) * 2005-09-27 2007-03-29 Endress + Hauser Flowtec Ag Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße
JP6206981B2 (ja) * 2015-01-09 2017-10-04 国立研究開発法人防災科学技術研究所 圧力センサの出力周波数平滑化方法およびそれを用いた気圧観測による津波警報装置、津波警報システム
JP6206980B2 (ja) * 2015-01-09 2017-10-04 国立研究開発法人防災科学技術研究所 圧力センサの出力周波数算出方法およびそれを用いた気圧観測による津波警報装置、津波警報システム
JP6605971B2 (ja) * 2016-01-26 2019-11-13 京セラ株式会社 センサ用パッケージおよびセンサ装置
CN113063528B (zh) * 2021-03-19 2022-09-23 上海铭控传感技术有限公司 一种压力表的密封结构

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3479879A (en) * 1968-03-29 1969-11-25 Schwien Eng Inc Manometer
US4016764A (en) * 1976-07-19 1977-04-12 The United States Of America As Represented By The Secretary Of The Navy Temperature compensated, high resolution pressure transducer based on capacitance change principles
US4104595A (en) * 1976-12-27 1978-08-01 Borg-Warner Corporation Signal translating circuit for variable area capacitive pressure transducer
JPS60178331A (ja) * 1984-02-24 1985-09-12 Shimadzu Corp 静電容量式絶対圧伝送器
US4732043A (en) * 1986-08-11 1988-03-22 Bell Microsensors, Inc. System and method for obtaining digital outputs from multiple transducers
US4907449A (en) * 1986-10-31 1990-03-13 A.I.R., Inc. Meteorological data encoder for measuring atmospheric conditions
US4864463A (en) * 1988-04-19 1989-09-05 Allied-Signal Inc. Capacitive pressure sensor
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
JPH03170826A (ja) * 1989-11-29 1991-07-24 Toshiba Corp 容量型圧力センサ
DE4033053C1 (de) * 1990-10-18 1992-03-05 Hottinger Baldwin Messtechnik Gmbh, 6100 Darmstadt, De
US5291534A (en) * 1991-06-22 1994-03-01 Toyoda Koki Kabushiki Kaisha Capacitive sensing device
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors

Also Published As

Publication number Publication date
EP0706038B1 (de) 1999-01-13
EP0706038A1 (de) 1996-04-10
DE69415982T2 (de) 1999-09-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee