DE69414281T2 - Vorrichtung zum Kühlen einer Anlage zur Behandlung von Halbleitern - Google Patents
Vorrichtung zum Kühlen einer Anlage zur Behandlung von HalbleiternInfo
- Publication number
- DE69414281T2 DE69414281T2 DE69414281T DE69414281T DE69414281T2 DE 69414281 T2 DE69414281 T2 DE 69414281T2 DE 69414281 T DE69414281 T DE 69414281T DE 69414281 T DE69414281 T DE 69414281T DE 69414281 T2 DE69414281 T2 DE 69414281T2
- Authority
- DE
- Germany
- Prior art keywords
- cooling
- treating semiconductors
- semiconductors
- treating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87708—With common valve operator
- Y10T137/87764—Having fluid actuator
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87708—With common valve operator
- Y10T137/87772—With electrical actuation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US1603693A | 1993-02-10 | 1993-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69414281D1 DE69414281D1 (de) | 1998-12-10 |
| DE69414281T2 true DE69414281T2 (de) | 1999-07-08 |
Family
ID=21775037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69414281T Expired - Fee Related DE69414281T2 (de) | 1993-02-10 | 1994-01-21 | Vorrichtung zum Kühlen einer Anlage zur Behandlung von Halbleitern |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5709262A (de) |
| EP (1) | EP0611052B1 (de) |
| JP (1) | JPH06291086A (de) |
| DE (1) | DE69414281T2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6026896A (en) * | 1997-04-10 | 2000-02-22 | Applied Materials, Inc. | Temperature control system for semiconductor processing facilities |
| US6889763B1 (en) * | 2000-10-23 | 2005-05-10 | Advanced Micro Devices, Inc. | System for rapidly and uniformly cooling resist |
| KR100456667B1 (ko) * | 2001-11-01 | 2004-11-18 | 양청수 | 플라즈마를 이용한 보일러 열교환기 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB948295A (en) * | 1961-12-29 | 1964-01-29 | Burnett & Rolfe Ltd | Improvements relating to fluid control valves |
| US3310284A (en) * | 1964-08-20 | 1967-03-21 | Fujitsu Ltd | Hydraulic system rotary pilot valve |
| EP0399676A1 (de) * | 1989-05-01 | 1990-11-28 | Tegal Corporation | Doppeltemperatur-Plasma-Ätzen |
-
1994
- 1994-01-21 DE DE69414281T patent/DE69414281T2/de not_active Expired - Fee Related
- 1994-01-21 EP EP94300470A patent/EP0611052B1/de not_active Expired - Lifetime
- 1994-02-09 JP JP6015029A patent/JPH06291086A/ja not_active Withdrawn
- 1994-08-05 US US08/286,405 patent/US5709262A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69414281D1 (de) | 1998-12-10 |
| US5709262A (en) | 1998-01-20 |
| EP0611052A1 (de) | 1994-08-17 |
| EP0611052B1 (de) | 1998-11-04 |
| JPH06291086A (ja) | 1994-10-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |