DE69411026D1 - Halbleiter herstellungsflüssigkeitsspritzsystem mit zusatzmischung - Google Patents

Halbleiter herstellungsflüssigkeitsspritzsystem mit zusatzmischung

Info

Publication number
DE69411026D1
DE69411026D1 DE69411026T DE69411026T DE69411026D1 DE 69411026 D1 DE69411026 D1 DE 69411026D1 DE 69411026 T DE69411026 T DE 69411026T DE 69411026 T DE69411026 T DE 69411026T DE 69411026 D1 DE69411026 D1 DE 69411026D1
Authority
DE
Germany
Prior art keywords
spraying system
liquid spraying
semiconductor production
production liquid
additional mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69411026T
Other languages
English (en)
Other versions
DE69411026T2 (de
Inventor
Aleksander Owczarz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Semitool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semitool Inc filed Critical Semitool Inc
Publication of DE69411026D1 publication Critical patent/DE69411026D1/de
Application granted granted Critical
Publication of DE69411026T2 publication Critical patent/DE69411026T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/49—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/10—Maintenance of mixers
    • B01F35/145—Washing or cleaning mixers not provided for in other groups in this subclass; Inhibiting build-up of material on machine parts using other means
    • B01F35/1452—Washing or cleaning mixers not provided for in other groups in this subclass; Inhibiting build-up of material on machine parts using other means using fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/48—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids
    • B01F23/483—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids using water for diluting a liquid ingredient, obtaining a predetermined concentration or making an aqueous solution of a concentrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B01F25/312—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Accessories For Mixers (AREA)
  • Nozzles (AREA)
DE69411026T 1993-09-30 1994-07-15 Halbleiter herstellungsflüssigkeitsspritzsystem mit zusatzmischung Expired - Lifetime DE69411026T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/129,700 US5409310A (en) 1993-09-30 1993-09-30 Semiconductor processor liquid spray system with additive blending
PCT/US1994/007944 WO1995009042A1 (en) 1993-09-30 1994-07-15 Semiconductor processor liquid spray system with additive blending

Publications (2)

Publication Number Publication Date
DE69411026D1 true DE69411026D1 (de) 1998-07-16
DE69411026T2 DE69411026T2 (de) 1998-10-08

Family

ID=22441179

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69411026T Expired - Lifetime DE69411026T2 (de) 1993-09-30 1994-07-15 Halbleiter herstellungsflüssigkeitsspritzsystem mit zusatzmischung

Country Status (5)

Country Link
US (1) US5409310A (de)
EP (1) EP0721369B1 (de)
AU (1) AU7362694A (de)
DE (1) DE69411026T2 (de)
WO (1) WO1995009042A1 (de)

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JP3382138B2 (ja) * 1997-08-21 2003-03-04 富士通株式会社 薬液供給装置及び薬液供給方法
DE19840989A1 (de) * 1997-09-09 1999-03-18 Tokyo Electron Ltd Reinigungsverfahren und Reinigungsgerät
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US6432214B2 (en) 1998-07-10 2002-08-13 Semitool, Inc. Cleaning apparatus
US6904920B2 (en) * 1998-07-10 2005-06-14 Semitool, Inc. Method and apparatus for cleaning containers
US6247838B1 (en) * 1998-11-24 2001-06-19 The Boc Group, Inc. Method for producing a liquid mixture having a predetermined concentration of a specified component
WO2001002106A1 (en) 1999-07-06 2001-01-11 Semitool, Inc. Chemical solutions system for processing semiconductor materials
US6120175A (en) * 1999-07-14 2000-09-19 The Porter Company/Mechanical Contractors Apparatus and method for controlled chemical blending
US20050109627A1 (en) * 2003-10-10 2005-05-26 Applied Materials, Inc. Methods and chemistry for providing initial conformal electrochemical deposition of copper in sub-micron features
AU2001268532A1 (en) * 2000-06-16 2002-01-08 Chroma Injecta Color Systems, Inc. Process and dispensing system for preparing liquid concentrates for plastics
US6752930B2 (en) * 2001-05-18 2004-06-22 Peter L. Alexander Chlorination apparatus and method
US6551412B1 (en) 2001-07-16 2003-04-22 Taiwan Semiconductor Manufacturing Company Non-tubular type recycle system of wet bench tank
JP4456308B2 (ja) * 2001-12-05 2010-04-28 富士通マイクロエレクトロニクス株式会社 薬液供給装置
JP4027693B2 (ja) * 2002-03-20 2007-12-26 トリニティ工業株式会社 塗料送給装置及びバルブユニット
US7344298B2 (en) * 2002-07-19 2008-03-18 Celerity, Inc. Method and apparatus for blending process materials
US20040049301A1 (en) * 2002-09-10 2004-03-11 M Fsi Ltd. Apparatus and method for preparing and supplying slurry for CMP machine
US6752547B2 (en) * 2002-10-28 2004-06-22 Applied Materials Inc. Liquid delivery system and method
US20040154926A1 (en) * 2002-12-24 2004-08-12 Zhi-Wen Sun Multiple chemistry electrochemical plating method
US20040206373A1 (en) * 2003-04-18 2004-10-21 Applied Materials, Inc. Spin rinse dry cell
US7520939B2 (en) * 2003-04-18 2009-04-21 Applied Materials, Inc. Integrated bevel clean chamber
US20050020077A1 (en) * 2003-04-18 2005-01-27 Applied Materials, Inc. Formation of protection layer by dripping DI on wafer with high rotation to prevent stain formation from H2O2/H2SO4 chemical splash
US20070232072A1 (en) * 2003-04-18 2007-10-04 Bo Zheng Formation of protection layer on wafer to prevent stain formation
US20040222101A1 (en) * 2003-04-18 2004-11-11 Applied Materials, Inc. Contact ring spin during idle time and deplate for defect reduction
US20050173253A1 (en) * 2004-02-05 2005-08-11 Applied Materials, Inc. Method and apparatus for infilm defect reduction for electrochemical copper deposition
US20050236498A1 (en) * 2004-04-27 2005-10-27 Cunningham Greg A Systems and methods for dispensing liquids
DE102005047041B3 (de) * 2005-09-30 2006-12-14 Siemens Ag Mikrofluidiksystem
DE102006026254A1 (de) * 2006-06-02 2007-12-06 Schmidt & Heinzmann Gmbh & Co. Kg Vorrichtung zum Erzeugen einer Komponentenmischung aus mindestens zwei Komponenten und Verfahren hierzu
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
IL180875A0 (en) * 2007-01-22 2007-07-04 Ricor Ltd Gas purge method and apparatus
JP5043696B2 (ja) * 2008-01-21 2012-10-10 東京エレクトロン株式会社 処理液混合装置、基板処理装置および処理液混合方法並びに記憶媒体
MX2011004408A (es) * 2008-11-03 2011-09-29 Daniel A Doron Sistema de remolque mezclador horizontal.
CN101886023B (zh) * 2010-07-09 2013-01-09 天津南开大学蓖麻工程科技有限公司 蓖麻基润滑油生产用添加剂循环调和系统及调和方法
US8950366B2 (en) * 2013-05-07 2015-02-10 Ford Global Technologies, Llc Method for reducing valve recession in gaseous fuel engines
US20160101393A1 (en) * 2014-10-14 2016-04-14 Dustin Jensen Car wash chemical delivery devices, systems, and associated methods
US20160346801A1 (en) * 2014-12-18 2016-12-01 Graco Minnesota Inc. Two component proportioner
SG11201807521WA (en) * 2016-03-11 2018-09-27 Fujifilm Planar Solutions Llc Advanced fluid processing methods and systems
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
CN113227453B (zh) * 2018-12-28 2024-04-16 东京毅力科创株式会社 基板液处理装置和基板液处理方法
TWI693965B (zh) * 2019-03-12 2020-05-21 信紘科技股份有限公司 化學液體稀釋方法
TWI759679B (zh) * 2019-03-12 2022-04-01 信紘科技股份有限公司 化學液體稀釋系統
US11517862B2 (en) * 2020-09-29 2022-12-06 Trusval Technology Co., Ltd. Fluid mising assembly

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FR858413A (fr) * 1939-04-26 1940-11-25 Pour Tous App Mecaniques Sa Perfectionnements aux appareils mélangeurs de liquides
FR1169298A (fr) * 1957-03-09 1958-12-24 American Viscose Corp Procédés et moyens précis de mélange de fluides tels que de la viscose et des additifs
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US4482704A (en) * 1982-11-22 1984-11-13 Marathon Oil Company Method and apparatus for multiple recycle polymer dilution
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JPH0661662B2 (ja) * 1984-11-05 1994-08-17 三菱電機株式会社 ワイヤカツト放電加工装置
JPS61118127A (ja) * 1984-11-13 1986-06-05 Kurabo Ind Ltd 半導体用化学薬品の調合装置
EP0236883B1 (de) * 1986-03-06 1992-06-03 Odenwaldwerke Rittersbach GmbH Fahrzeugbau und Katastrophenschutzsysteme Vorrichtung zum Erzeugen einer Entgiftungsemulsion für Kampfstoffe
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DE3906577C1 (de) * 1989-03-02 1990-06-13 Mgv-Moest-Spritzgeraete Produktions- Und Vertriebs-Gmbh, 8910 Landsberg, De
US5085560A (en) * 1990-01-12 1992-02-04 Semitool, Inc. Low contamination blending and metering systems for semiconductor processing

Also Published As

Publication number Publication date
US5409310A (en) 1995-04-25
EP0721369A1 (de) 1996-07-17
WO1995009042A1 (en) 1995-04-06
EP0721369B1 (de) 1998-06-10
AU7362694A (en) 1995-04-18
DE69411026T2 (de) 1998-10-08

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