DE69331215D1 - Vorrichtung zur Überwachung von Verunreinigungen in einem Gasstrom - Google Patents
Vorrichtung zur Überwachung von Verunreinigungen in einem GasstromInfo
- Publication number
- DE69331215D1 DE69331215D1 DE69331215T DE69331215T DE69331215D1 DE 69331215 D1 DE69331215 D1 DE 69331215D1 DE 69331215 T DE69331215 T DE 69331215T DE 69331215 T DE69331215 T DE 69331215T DE 69331215 D1 DE69331215 D1 DE 69331215D1
- Authority
- DE
- Germany
- Prior art keywords
- gas stream
- monitoring impurities
- impurities
- monitoring
- stream
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012535 impurity Substances 0.000 title 1
- 238000012544 monitoring process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02845—Humidity, wetness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/958,384 US5339675A (en) | 1992-10-08 | 1992-10-08 | Apparatus for monitoring impurities in a gas stream |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69331215D1 true DE69331215D1 (de) | 2002-01-10 |
DE69331215T2 DE69331215T2 (de) | 2002-10-17 |
Family
ID=25500906
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69331215T Expired - Fee Related DE69331215T2 (de) | 1992-10-08 | 1993-09-30 | Vorrichtung zur Überwachung von Verunreinigungen in einem Gasstrom |
Country Status (6)
Country | Link |
---|---|
US (2) | US5339675A (de) |
EP (1) | EP0591847B1 (de) |
JP (1) | JP3291516B2 (de) |
KR (1) | KR100263724B1 (de) |
DE (1) | DE69331215T2 (de) |
TW (1) | TW297509U (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE35544E (en) * | 1992-10-08 | 1997-07-01 | Millipore Corporation | Apparatus for monitoring moisture in a gas stream |
US5339675A (en) * | 1992-10-08 | 1994-08-23 | Millipore Corporation | Apparatus for monitoring impurities in a gas stream |
US5445008A (en) * | 1994-03-24 | 1995-08-29 | Martin Marietta Energy Systems, Inc. | Microbar sensor |
US6118124A (en) * | 1996-01-18 | 2000-09-12 | Lockheed Martin Energy Research Corporation | Electromagnetic and nuclear radiation detector using micromechanical sensors |
US5817921A (en) * | 1996-07-12 | 1998-10-06 | Advanced Technology Materials, Inc. | Piezoelectric enviromental fluid monitoring assembly and method |
US5977687A (en) * | 1996-07-12 | 1999-11-02 | Advanced Technology Materials, Inc. | Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same |
US5739416A (en) * | 1996-09-18 | 1998-04-14 | California Instiute Of Technology | Fast, high sensitivity dewpoint hygrometer |
KR100414303B1 (ko) * | 1996-12-03 | 2004-03-30 | 주식회사 하이닉스반도체 | 반도체웨이퍼제조장비의가스오염불량방지장치 |
US5827947A (en) * | 1997-01-17 | 1998-10-27 | Advanced Technology Materials, Inc. | Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same |
SG63825A1 (en) * | 1997-03-11 | 1999-03-30 | Applied Materials Inc | In situ monitoring of contaminants in semiconductor processing chambers |
US5883457A (en) * | 1997-04-24 | 1999-03-16 | Raychem Corporation | Organic matrix for acoustic reflector array |
CA2218983C (en) * | 1997-10-21 | 2001-05-08 | Mag R&D, Inc. | Cathodic protective coating on magnesium or its alloys and method of producing the same |
US6016686A (en) * | 1998-03-16 | 2000-01-25 | Lockheed Martin Energy Research Corporation | Micromechanical potentiometric sensors |
US6029500A (en) * | 1998-05-19 | 2000-02-29 | Advanced Technology Materials, Inc. | Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same |
US6079252A (en) * | 1998-05-20 | 2000-06-27 | Advanced Technology Materials, Inc. | Leak detection device, and fluid vessel assembly comprising same |
US6156578A (en) * | 1998-06-01 | 2000-12-05 | Advanced Technology Materials, Inc. | Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream |
US6167747B1 (en) | 1998-08-14 | 2001-01-02 | Tokheim Corporation | Apparatus for detecting hydrocarbon using crystal oscillators within fuel dispensers |
US6167748B1 (en) | 1998-08-31 | 2001-01-02 | Lockheed Martin Energy Research Corporation | Capacitively readout multi-element sensor array with common-mode cancellation |
US6295861B1 (en) | 1999-01-28 | 2001-10-02 | Advanced Technology Materials, Inc. | Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same |
US6289717B1 (en) | 1999-03-30 | 2001-09-18 | U. T. Battelle, Llc | Micromechanical antibody sensor |
EP1204842A4 (de) | 1999-08-19 | 2003-04-02 | Univ California | Apparat und verfahren zur visuellen identifikation von mikrokräften mittels einer palette von auslegerblöcken |
US20030154149A1 (en) * | 2002-02-13 | 2003-08-14 | Dilip Gajendragadkar | System and method of creating and executing a restricted stock sale plan |
US6931711B2 (en) * | 2002-09-03 | 2005-08-23 | Honeywell International Inc. | Methods and apparatus for removing gases from enclosures |
US6862917B2 (en) * | 2002-09-30 | 2005-03-08 | Bae Systems Information And Electronic Systems Integration Inc. | Apparatus for detecting chemical agents including olfactory interferometric lens and method of use |
US7232545B2 (en) * | 2003-09-16 | 2007-06-19 | Steris Inc. | Sensor for determining concentration of fluid sterilant |
US7541002B2 (en) * | 2004-05-12 | 2009-06-02 | Steris Corporation | Apparatus for determining the efficiency of a vaporizer in a decontamination system |
US20050276721A1 (en) * | 2004-05-25 | 2005-12-15 | Steris Inc. | Method and apparatus for controlling the concentration of a sterilant chemical in a fluid |
US20050262943A1 (en) * | 2004-05-27 | 2005-12-01 | Glenn Claydon | Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element |
US7431886B2 (en) * | 2004-09-24 | 2008-10-07 | Steris Corporation | Method of monitoring operational status of sensing devices for determining the concentration of chemical components in a fluid |
US20060105466A1 (en) * | 2004-11-12 | 2006-05-18 | Steris Inc. | Sensor for determining concentration of ozone |
KR101280416B1 (ko) * | 2005-09-22 | 2013-07-01 | 어플라이드 나노테크 홀딩스, 인크. | 수소 센서 |
US8762075B2 (en) * | 2009-09-29 | 2014-06-24 | Lawrence Livermore National Security, Llc | Microcantilever-based gas sensor employing two simultaneous physical sensing modes |
US11215586B2 (en) | 2017-01-30 | 2022-01-04 | Aromatix, Inc. | Ultrasound gas sensor system using machine learning |
US10900062B2 (en) | 2017-07-14 | 2021-01-26 | American Sterilizer Company | Process for determining viability of test microorganisms of biological indicator and sterilization detection device for determining same |
US10889848B2 (en) | 2017-07-14 | 2021-01-12 | American Sterilizer Company | Process for determining viability of test microorganisms of biological indicator and sterilization detection device for determining same |
US10876144B2 (en) | 2017-07-14 | 2020-12-29 | American Sterilizer Company | Process for determining viability of test microorganisms of biological indicator and sterilization detection device for determining same |
TWI653753B (zh) * | 2017-09-12 | 2019-03-11 | 元太科技工業股份有限公司 | 感測元件 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL278407A (de) * | 1961-05-15 | |||
US3385100A (en) * | 1965-04-30 | 1968-05-28 | Phillips Petroleum Co | Piezoelectric detector system for fluid components |
US3478573A (en) * | 1965-07-29 | 1969-11-18 | Exxon Research Engineering Co | Integral heater piezoelectric devices |
US3534585A (en) * | 1967-12-07 | 1970-10-20 | Webb James E | Microbalance including crystal oscillators for measuring contaminates in a gas system |
US3744296A (en) * | 1971-05-07 | 1973-07-10 | Exxon Research Engineering Co | Coated piezoelectric analyzers |
US4111036A (en) * | 1974-07-29 | 1978-09-05 | The Board Of Regents For Education Of The State Of Rhode Island | Piezoelectric probe for detection and measurement of gaseous pollutants |
US4312228A (en) * | 1979-07-30 | 1982-01-26 | Henry Wohltjen | Methods of detection with surface acoustic wave and apparati therefor |
US4681855A (en) * | 1985-08-05 | 1987-07-21 | The United States Of America As Represented By The Secretary Of Commerce | Humidity sensing and measurement employing halogenated organic polymer membranes |
NL8502705A (nl) * | 1985-10-03 | 1987-05-04 | Organisatie Voor Toegepast Nat | Samengestelde drager, bestemd voor een toestel voor kwantitatieve bepaling van een in een gas of vloeistof aanwezig bestanddeel. |
US5212988A (en) * | 1988-02-29 | 1993-05-25 | The Reagents Of The University Of California | Plate-mode ultrasonic structure including a gel |
JPH03503681A (ja) * | 1988-04-06 | 1991-08-15 | イー・アイ・デユポン・デ・ニモアス・アンド・カンパニー | 質量増幅した因子を使用する圧電特異的結合アツセイ |
JP2773292B2 (ja) * | 1989-09-14 | 1998-07-09 | エヌオーケー株式会社 | 水晶振動子湿度センサ |
FR2656925B1 (fr) * | 1990-01-08 | 1992-05-15 | Eg G | Capteur d'humidite et installation de mesure comportant une pluralite de tels capteurs. |
US5120505A (en) * | 1990-04-13 | 1992-06-09 | Bend Research, Inc. | Chemical sensors |
US5042288A (en) * | 1990-05-25 | 1991-08-27 | The United States Of America As Represented By The Secretary Of The Army | Method of sensing contamination in the atmosphere |
US5065140A (en) * | 1991-03-08 | 1991-11-12 | Bell Communications Research, Inc. | Early warning reactive gas detection system |
US5339675A (en) * | 1992-10-08 | 1994-08-23 | Millipore Corporation | Apparatus for monitoring impurities in a gas stream |
US5364797A (en) * | 1993-05-20 | 1994-11-15 | Mobil Oil Corp. | Sensor device containing mesoporous crystalline material |
-
1992
- 1992-10-08 US US07/958,384 patent/US5339675A/en not_active Expired - Fee Related
-
1993
- 1993-09-23 TW TW084216914U patent/TW297509U/zh unknown
- 1993-09-30 EP EP93115812A patent/EP0591847B1/de not_active Expired - Lifetime
- 1993-09-30 DE DE69331215T patent/DE69331215T2/de not_active Expired - Fee Related
- 1993-10-07 KR KR1019930020709A patent/KR100263724B1/ko not_active IP Right Cessation
- 1993-10-08 JP JP27603493A patent/JP3291516B2/ja not_active Expired - Fee Related
-
1994
- 1994-07-27 US US08/281,286 patent/US5477716A/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
EP0591847A2 (de) | 1994-04-13 |
US5339675A (en) | 1994-08-23 |
JP3291516B2 (ja) | 2002-06-10 |
EP0591847A3 (en) | 1997-08-27 |
US5477716A (en) | 1995-12-26 |
TW297509U (en) | 1997-02-01 |
DE69331215T2 (de) | 2002-10-17 |
EP0591847B1 (de) | 2001-11-28 |
KR940009672A (ko) | 1994-05-20 |
KR100263724B1 (ko) | 2000-08-01 |
JPH06201558A (ja) | 1994-07-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: MYKROLIS CORP., BEDFORD, MASS., US |
|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |