DE69329763T2 - Elektrooptische Messeinrichtung - Google Patents

Elektrooptische Messeinrichtung

Info

Publication number
DE69329763T2
DE69329763T2 DE69329763T DE69329763T DE69329763T2 DE 69329763 T2 DE69329763 T2 DE 69329763T2 DE 69329763 T DE69329763 T DE 69329763T DE 69329763 T DE69329763 T DE 69329763T DE 69329763 T2 DE69329763 T2 DE 69329763T2
Authority
DE
Germany
Prior art keywords
electro
measuring device
optical measuring
optical
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69329763T
Other languages
English (en)
Other versions
DE69329763D1 (de
Inventor
Hironori Takahashi
Shinichiro Aoshima
Isuke Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE69329763D1 publication Critical patent/DE69329763D1/de
Application granted granted Critical
Publication of DE69329763T2 publication Critical patent/DE69329763T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G01R1/071—Non contact-making probes containing electro-optic elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69329763T 1992-09-10 1993-09-08 Elektrooptische Messeinrichtung Expired - Fee Related DE69329763T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24213492A JP3220252B2 (ja) 1992-09-10 1992-09-10 Ｅｏプローブ

Publications (2)

Publication Number Publication Date
DE69329763D1 DE69329763D1 (de) 2001-01-25
DE69329763T2 true DE69329763T2 (de) 2001-05-23

Family

ID=17084818

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69329763T Expired - Fee Related DE69329763T2 (de) 1992-09-10 1993-09-08 Elektrooptische Messeinrichtung

Country Status (4)

Country Link
US (1) US5500587A (de)
EP (1) EP0587418B1 (de)
JP (1) JP3220252B2 (de)
DE (1) DE69329763T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265574A (ja) * 1993-03-15 1994-09-22 Hamamatsu Photonics Kk Ｅ−ｏプローブ
US5770946A (en) * 1994-05-11 1998-06-23 Patterson; Joseph M. Photon assisted sub-tunneling electrical probe, probe tip, and probing method
WO2017065104A1 (ja) * 2015-10-16 2017-04-20 Ｊｘ金属株式会社 光変調素子および電界センサ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4618819A (en) * 1984-03-27 1986-10-21 The University Of Rochester Measurement of electrical signals with subpicosecond resolution
EP0293841B1 (de) * 1987-05-31 1993-01-20 Hamamatsu Photonics K.K. Spannungsdetektor
JPH0695111B2 (ja) * 1987-06-05 1994-11-24 浜松ホトニクス株式会社 電圧検出装置
JPH0830720B2 (ja) * 1987-06-30 1996-03-27 浜松ホトニクス株式会社 電圧検出装置
JPH0695114B2 (ja) * 1987-07-13 1994-11-24 浜松ホトニクス株式会社 電圧検出装置
JPS6446659A (en) * 1987-08-17 1989-02-21 Hamamatsu Photonics Kk Voltage detector
US4873485A (en) * 1988-07-13 1989-10-10 The University Of Rochester Electro-optic signal measurement
JP2631138B2 (ja) * 1988-10-05 1997-07-16 浜松ホトニクス株式会社 電圧測定装置
DE69232905T2 (de) * 1991-08-05 2003-08-21 Koninkl Philips Electronics Nv Elektrooptische Messanordnung zum Messen eines elektrischen Signals in einem elektronischen Bauteil

Also Published As

Publication number Publication date
DE69329763D1 (de) 2001-01-25
US5500587A (en) 1996-03-19
EP0587418B1 (de) 2000-12-20
EP0587418A2 (de) 1994-03-16
JP3220252B2 (ja) 2001-10-22
EP0587418A3 (de) 1995-02-01
JPH0694760A (ja) 1994-04-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee