DE69325073T2 - Borazinderivate von Hydridopolysilazanpolymeren - Google Patents

Borazinderivate von Hydridopolysilazanpolymeren

Info

Publication number
DE69325073T2
DE69325073T2 DE69325073T DE69325073T DE69325073T2 DE 69325073 T2 DE69325073 T2 DE 69325073T2 DE 69325073 T DE69325073 T DE 69325073T DE 69325073 T DE69325073 T DE 69325073T DE 69325073 T2 DE69325073 T2 DE 69325073T2
Authority
DE
Germany
Prior art keywords
borazine derivatives
hydridopolysilazane
polymers
hydridopolysilazane polymers
borazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69325073T
Other languages
English (en)
Other versions
DE69325073D1 (de
Inventor
Larry George Sneddon
Kai Su
Gregg Alan Zank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Pennsylvania Penn
Dow Silicones Corp
Original Assignee
Dow Corning Corp
University of Pennsylvania Penn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp, University of Pennsylvania Penn filed Critical Dow Corning Corp
Publication of DE69325073D1 publication Critical patent/DE69325073D1/de
Application granted granted Critical
Publication of DE69325073T2 publication Critical patent/DE69325073T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/62—Nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
    • C08G79/08—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing boron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Silicon Polymers (AREA)
  • Ceramic Products (AREA)
DE69325073T 1992-11-02 1993-11-01 Borazinderivate von Hydridopolysilazanpolymeren Expired - Fee Related DE69325073T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/970,505 US5252684A (en) 1992-11-02 1992-11-02 Borazine derivatized hydridopolysilazane polymers

Publications (2)

Publication Number Publication Date
DE69325073D1 DE69325073D1 (de) 1999-07-01
DE69325073T2 true DE69325073T2 (de) 2000-01-27

Family

ID=25517050

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69325073T Expired - Fee Related DE69325073T2 (de) 1992-11-02 1993-11-01 Borazinderivate von Hydridopolysilazanpolymeren

Country Status (5)

Country Link
US (1) US5252684A (de)
EP (1) EP0596680B1 (de)
JP (1) JP3288832B2 (de)
CA (1) CA2102026A1 (de)
DE (1) DE69325073T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4883684A (en) * 1988-07-01 1989-11-28 The Procter & Gamble Company Functional hardstock fat composition
US6146559A (en) 1994-07-28 2000-11-14 Dow Corning Corporation Preparation of high density titanium diboride ceramics with preceramic polymer binders
US5449646A (en) 1994-07-29 1995-09-12 Dow Corning Corporation Preparation of high density zirconium diboride ceramics with preceramic polymer binders
CA2154216A1 (en) 1994-08-01 1996-02-02 Gregg Alan Zank Preparation of high density zirconium carbide ceramics with preceramic polymer binders
US5447893A (en) 1994-08-01 1995-09-05 Dow Corning Corporation Preparation of high density titanium carbide ceramics with preceramic polymer binders
US6329487B1 (en) * 1999-11-12 2001-12-11 Kion Corporation Silazane and/or polysilazane compounds and methods of making
US7198747B2 (en) * 2000-09-18 2007-04-03 President And Fellows Of Harvard College Fabrication of ceramic microstructures
US6924545B2 (en) * 2001-03-27 2005-08-02 National Institute Of Advanced Industrial Science Low-dielectric-constant interlayer insulating film composed of borazine-silicon-based polymer and semiconductor device
JP3778045B2 (ja) * 2001-10-09 2006-05-24 三菱電機株式会社 低誘電率材料の製造方法および低誘電率材料、並びにこの低誘電率材料を用いた絶縁膜および半導体装置
JP2012012607A (ja) * 2011-07-14 2012-01-19 Mitsubishi Electric Corp 低誘電率材料形成用原料
KR102015404B1 (ko) 2016-12-08 2019-08-28 삼성에스디아이 주식회사 실리카 막 형성용 조성물, 실리카 막의 제조방법 및 실리카 막을 포함하는 전자소자
WO2019079223A1 (en) * 2017-10-16 2019-04-25 The Johns Hopkins University ORGANOBORANE POLYMERS FOR ADJUSTABLE HYDROPHILICITY AND WETABILITY

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4540803A (en) * 1983-11-28 1985-09-10 Dow Corning Corporation Hydrosilazane polymers from [R3 Si]2 NH and HSiCl3
JPS60139820A (ja) * 1983-12-27 1985-07-24 Shin Etsu Chem Co Ltd けい素、炭素、ほう素および窒素含有無機繊維の製造方法
FR2637602B1 (fr) * 1988-10-06 1990-12-14 Rhone Poulenc Chimie Procede de synthese de polymeres a base de bore et d'azote precurseurs de nitrure de bore et produits susceptibles d'etre ainsi obtenus
US5030744A (en) * 1989-03-23 1991-07-09 Tonen Corporation Polyborosilazane and process for producing same
US4910173A (en) * 1989-04-14 1990-03-20 Ethyl Corporation Preceramic compositions and ceramic products
FR2650832B1 (fr) * 1989-08-10 1991-11-22 Rhone Poulenc Chimie Precurseur ceramique organometallique a base de bore, d'azote et de silicium

Also Published As

Publication number Publication date
EP0596680A3 (de) 1995-05-03
JP3288832B2 (ja) 2002-06-04
DE69325073D1 (de) 1999-07-01
EP0596680B1 (de) 1999-05-26
JPH06322133A (ja) 1994-11-22
EP0596680A2 (de) 1994-05-11
CA2102026A1 (en) 1994-05-03
US5252684A (en) 1993-10-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee