DE69316536D1 - Verfahren zur Herstellung eines kapazitiven Druckwandlers - Google Patents

Verfahren zur Herstellung eines kapazitiven Druckwandlers

Info

Publication number
DE69316536D1
DE69316536D1 DE69316536T DE69316536T DE69316536D1 DE 69316536 D1 DE69316536 D1 DE 69316536D1 DE 69316536 T DE69316536 T DE 69316536T DE 69316536 T DE69316536 T DE 69316536T DE 69316536 D1 DE69316536 D1 DE 69316536D1
Authority
DE
Germany
Prior art keywords
manufacturing
pressure transducer
capacitive pressure
capacitive
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69316536T
Other languages
English (en)
Other versions
DE69316536T2 (de
Inventor
Vishwa N Shukla
Francois A Padovani
Stanley J Lukasiewicz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69316536D1 publication Critical patent/DE69316536D1/de
Application granted granted Critical
Publication of DE69316536T2 publication Critical patent/DE69316536T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69316536T 1992-11-06 1993-11-03 Verfahren zur Herstellung eines kapazitiven Druckwandlers Expired - Fee Related DE69316536T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97268092A 1992-11-06 1992-11-06

Publications (2)

Publication Number Publication Date
DE69316536D1 true DE69316536D1 (de) 1998-02-26
DE69316536T2 DE69316536T2 (de) 1998-06-04

Family

ID=25519994

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69316536T Expired - Fee Related DE69316536T2 (de) 1992-11-06 1993-11-03 Verfahren zur Herstellung eines kapazitiven Druckwandlers

Country Status (5)

Country Link
US (1) US5525280A (de)
EP (1) EP0596711B1 (de)
JP (1) JPH06201503A (de)
KR (1) KR940012737A (de)
DE (1) DE69316536T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19509250C1 (de) * 1995-03-15 1996-09-12 Bosch Gmbh Robert Verfahren zur Herstellung eines Drucksensors
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
US6058780A (en) * 1997-03-20 2000-05-09 Alliedsignal Inc. Capacitive pressure sensor housing having a ceramic base
US6324914B1 (en) 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US6387318B1 (en) 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US5959212A (en) * 1998-04-27 1999-09-28 Texas Instruments Incorporated Capacitive pressure transducer having reduced output error
JP3771425B2 (ja) 2000-07-04 2006-04-26 株式会社山武 容量式圧力センサおよびその製造方法
JP2002350263A (ja) * 2001-05-22 2002-12-04 Kyocera Corp 圧力検出装置用パッケージ
DE10153424A1 (de) * 2001-11-03 2003-05-15 Kmw Duennschichttechnik Und Mi Druckaufnehmer, insbesondere zur Zylinderdruckmessung bei Motoren und Verfahren zur Herstellung desselben
US7238319B2 (en) 2003-06-26 2007-07-03 Corning Incorporated Method for fabricating ceramic articles containing organic compounds
US6945118B2 (en) * 2004-01-13 2005-09-20 Honeywell International Inc. Ceramic on metal pressure transducer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102005008959B4 (de) * 2005-02-28 2012-08-30 Heinz Plöchinger Drucksensoren und Kombinations-Drucksensoren und deren Verwendung
US7210346B1 (en) 2005-12-21 2007-05-01 Honeywell International Inc. Modular sensing apparatus
WO2007079072A2 (en) * 2005-12-31 2007-07-12 Corning Incorporated Microreactor glass diaphragm sensors
US7266999B2 (en) * 2006-01-30 2007-09-11 Honeywell International Inc. Thick film technology based ultra high pressure sensor utilizing integral port and diaphragm construction
EP2111148B1 (de) * 2007-01-19 2015-08-12 Given Imaging (Los Angeles) LLC Physiologische magen-darm-mikro- und remote-messvorrichtung
CN101730841B (zh) * 2007-04-23 2012-12-26 基文影像（洛杉矶）有限公司 悬式膜压力传感阵列
JP2010197057A (ja) * 2009-02-23 2010-09-09 Kyocera Corp 圧力検出装置用基体および圧力検出装置
JP5361464B2 (ja) * 2009-03-11 2013-12-04 京セラ株式会社 圧力センサ用容器の製造方法
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
US10266444B2 (en) * 2012-12-14 2019-04-23 Ferro Corporation Method of making multilayer glass structure
EP2871456B1 (de) 2013-11-06 2018-10-10 Invensense, Inc. Drucksensor und Herstellungsmethode für einen Drucksensor
EP2871455B1 (de) 2013-11-06 2020-03-04 Invensense, Inc. Drucksensor
EP3614115A1 (de) 2015-04-02 2020-02-26 InvenSense, Inc. Drucksensor
EP3444609A1 (de) 2017-08-14 2019-02-20 Sensirion AG Messung der konzentrationen eines zielgases
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
EP3969868A1 (de) 2019-05-17 2022-03-23 InvenSense, Inc. Drucksensor mit verbesserter dichtigkeit

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
JPS5964198A (ja) * 1982-10-04 1984-04-12 Nanba Press Kogyo Kk 粒状構造物本体の内部に型抜きできない貫通中空部を形成する方法
US4481497A (en) * 1982-10-27 1984-11-06 Kulite Semiconductor Products, Inc. Transducer structures employing ceramic substrates and diaphragms
US4542436A (en) * 1984-04-10 1985-09-17 Johnson Service Company Linearized capacitive pressure transducer
US4788096A (en) * 1985-06-06 1988-11-29 Hoechst Celanese Corporation Devices for making piezoelectric ceramic or ceramic-base composite sensors
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4830799A (en) * 1987-01-07 1989-05-16 Lanxide Technology Company, Lp Method of making shaped ceramic articles by shape replication of an expendable pattern
US4882110A (en) * 1987-01-27 1989-11-21 Air Products And Chemicals, Inc. CO2 copolymer binder for forming ceramic bodies and a shaping process using the same
SE459887B (sv) * 1987-02-12 1989-08-14 Hydrolab Ab Tryckgivare
JPH0731091B2 (ja) * 1987-05-27 1995-04-10 日本碍子株式会社 歪検出器
US4806783A (en) * 1988-02-25 1989-02-21 Transducer Technologies Inc. Transducer circuit
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
US5255427A (en) * 1989-03-07 1993-10-26 Pfister Gmbh Ceramic hollow bodies and method of manufacturing such bodies
US5044202A (en) * 1989-09-18 1991-09-03 Texas Instruments Incorporated Pressure transducer apparatus
US4991283A (en) * 1989-11-27 1991-02-12 Johnson Gary W Sensor elements in multilayer ceramic tape structures
US5189916A (en) * 1990-08-24 1993-03-02 Ngk Spark Plug Co., Ltd. Pressure sensor
JP2724419B2 (ja) * 1990-08-28 1998-03-09 日本特殊陶業株式会社 圧力センサ
US5151660A (en) * 1990-09-05 1992-09-29 Powers Kelly R Ceramic capacitance high pressure fluid sensor
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ

Also Published As

Publication number Publication date
EP0596711B1 (de) 1998-01-21
EP0596711A2 (de) 1994-05-11
US5525280A (en) 1996-06-11
JPH06201503A (ja) 1994-07-19
KR940012737A (ko) 1994-06-24
EP0596711A3 (en) 1994-08-17
DE69316536T2 (de) 1998-06-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee