DE69315686D1 - Winkel-detektion - Google Patents

Winkel-detektion

Info

Publication number
DE69315686D1
DE69315686D1 DE69315686T DE69315686T DE69315686D1 DE 69315686 D1 DE69315686 D1 DE 69315686D1 DE 69315686 T DE69315686 T DE 69315686T DE 69315686 T DE69315686 T DE 69315686T DE 69315686 D1 DE69315686 D1 DE 69315686D1
Authority
DE
Germany
Prior art keywords
angle detection
detection
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69315686T
Other languages
English (en)
Other versions
DE69315686T2 (de
Inventor
Chung See
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taylor Hobson Ltd
Original Assignee
Taylor Hobson Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taylor Hobson Ltd filed Critical Taylor Hobson Ltd
Publication of DE69315686D1 publication Critical patent/DE69315686D1/de
Application granted granted Critical
Publication of DE69315686T2 publication Critical patent/DE69315686T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69315686T 1992-04-16 1993-04-15 Winkel-detektion Expired - Fee Related DE69315686T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9208412A GB2266366B (en) 1992-04-16 1992-04-16 Angle detection
PCT/GB1993/000790 WO1993021496A1 (en) 1992-04-16 1993-04-15 Angle detection

Publications (2)

Publication Number Publication Date
DE69315686D1 true DE69315686D1 (de) 1998-01-22
DE69315686T2 DE69315686T2 (de) 1998-07-02

Family

ID=10714161

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315686T Expired - Fee Related DE69315686T2 (de) 1992-04-16 1993-04-15 Winkel-detektion

Country Status (5)

Country Link
US (1) US5579108A (de)
EP (1) EP0636240B1 (de)
DE (1) DE69315686T2 (de)
GB (1) GB2266366B (de)
WO (1) WO1993021496A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19517855A1 (de) * 1994-05-20 1995-11-23 Zeiss Carl Fa Verfahren und Anordnung zum Erfassen von Bewegungen eines Teiles
GB0025879D0 (en) * 2000-10-23 2000-12-06 Renishaw Plc Interferometer
JP2004212205A (ja) * 2002-12-27 2004-07-29 Olympus Corp 角度検出装置、光信号スイッチシステムおよび情報記録再生システム
US7436503B1 (en) * 2004-08-03 2008-10-14 Kla-Tencor Technologies Corp. Dark field inspection apparatus and methods
KR101633612B1 (ko) * 2007-10-26 2016-06-27 코닌클리케 필립스 엔.브이. 광각 선택 광 검출기 장치
JP4229208B1 (ja) * 2007-10-31 2009-02-25 トヨタ自動車株式会社 取り付け角度測定装置および取り付け角度測定方法
US9316485B2 (en) * 2010-11-29 2016-04-19 Nokia Technologies Oy Apparatus comprising a plurality of interferometers and method of configuring such apparatus
JP6429795B2 (ja) * 2013-01-07 2018-11-28 アセンティア イメージング， インコーポレイテッド 光学誘導システム
US10921448B2 (en) * 2015-09-18 2021-02-16 Hamamatsu Photonics K.K. Optical distance measuring system
JP2017203822A (ja) * 2016-05-09 2017-11-16 オリンパス株式会社 照明設定方法、シート照明顕微鏡装置、及びプログラム
WO2019040817A2 (en) * 2017-08-24 2019-02-28 The Charles Stark Draper Laboratory, Inc. COLD ATOM INTERFEROMETRY

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3435246A (en) * 1966-02-09 1969-03-25 Webb James E Light radiation direction indicator with a baffle of two parallel grids
GB1307431A (en) * 1970-06-19 1973-02-21 Secr Defence Optical masking devices and apparatus using such devices
US4593187A (en) * 1982-10-29 1986-06-03 The Perkin-Elmer Corporation Non-imaging illumination incidence angle detection system
US4662750A (en) * 1984-03-14 1987-05-05 Barger Richard L Angle sensitive interferometer and control method and apparatus
US4586821A (en) * 1984-09-19 1986-05-06 The United States Of America As Represented By The Secretary Of The Army Optical angular/linear motion detector
GB8525650D0 (en) * 1985-10-17 1985-11-20 Pilkington Brothers Plc Interferometer
SE458153B (sv) * 1987-07-16 1989-02-27 Polymetric Ab Optiskt vinkelmaetdon
US4887905A (en) * 1988-06-29 1989-12-19 Eastman Kodak Company Assembly and method for monitoring the alignment of a workpiece
IT1232119B (it) * 1989-06-27 1992-01-23 Cselt Centro Studi Lab Telecom Sistema ottico per la misura di spostamenti lineari o angolari
IL91285A (en) * 1989-08-11 1992-12-01 Rotlex Optics Ltd Method and apparatus for measuring the three- dimensional orientation of a body in space
USH746H (en) * 1989-08-11 1990-02-06 The United States Of America As Represented By The Secretary Of The Army Solar reference flight roll position sensor
DE4204857C2 (de) * 1991-02-18 1998-01-22 Asahi Optical Co Ltd Verfahren zur Untersuchung einer Oberflächenform mit einem Interferometer

Also Published As

Publication number Publication date
GB9208412D0 (en) 1992-06-03
GB2266366A (en) 1993-10-27
EP0636240A1 (de) 1995-02-01
EP0636240B1 (de) 1997-12-10
US5579108A (en) 1996-11-26
DE69315686T2 (de) 1998-07-02
WO1993021496A1 (en) 1993-10-28
GB2266366B (en) 1996-04-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee