IT1232119B - Sistema ottico per la misura di spostamenti lineari o angolari - Google Patents

Sistema ottico per la misura di spostamenti lineari o angolari

Info

Publication number
IT1232119B
IT1232119B IT8967516A IT6751689A IT1232119B IT 1232119 B IT1232119 B IT 1232119B IT 8967516 A IT8967516 A IT 8967516A IT 6751689 A IT6751689 A IT 6751689A IT 1232119 B IT1232119 B IT 1232119B
Authority
IT
Italy
Prior art keywords
linear
measurement
optical system
angular shifts
shifts
Prior art date
Application number
IT8967516A
Other languages
English (en)
Other versions
IT8967516A0 (it
Inventor
Grego Giorgio
Original Assignee
Cselt Centro Studi Lab Telecom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cselt Centro Studi Lab Telecom filed Critical Cselt Centro Studi Lab Telecom
Priority to IT8967516A priority Critical patent/IT1232119B/it
Publication of IT8967516A0 publication Critical patent/IT8967516A0/it
Priority to US07/537,476 priority patent/US5089698A/en
Priority to DE9090112155T priority patent/DE69000564T2/de
Priority to DE199090112155T priority patent/DE405462T1/de
Priority to EP90112155A priority patent/EP0405462B1/en
Priority to CA002019950A priority patent/CA2019950C/en
Application granted granted Critical
Publication of IT1232119B publication Critical patent/IT1232119B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
IT8967516A 1989-06-27 1989-06-27 Sistema ottico per la misura di spostamenti lineari o angolari IT1232119B (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT8967516A IT1232119B (it) 1989-06-27 1989-06-27 Sistema ottico per la misura di spostamenti lineari o angolari
US07/537,476 US5089698A (en) 1989-06-27 1990-06-13 Interferometric optical system for measuring linear or angular displacements by beat signals
DE9090112155T DE69000564T2 (de) 1989-06-27 1990-06-26 Optisches system zum messen von linear- oder winkelaenderungen.
DE199090112155T DE405462T1 (de) 1989-06-27 1990-06-26 Optisches system zum messen von linear- oder winkelaenderungen.
EP90112155A EP0405462B1 (en) 1989-06-27 1990-06-26 Optical system for measuring linear or angular displacements
CA002019950A CA2019950C (en) 1989-06-27 1990-06-27 Optical system for measuring linear or angular displacements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8967516A IT1232119B (it) 1989-06-27 1989-06-27 Sistema ottico per la misura di spostamenti lineari o angolari

Publications (2)

Publication Number Publication Date
IT8967516A0 IT8967516A0 (it) 1989-06-27
IT1232119B true IT1232119B (it) 1992-01-23

Family

ID=11303082

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8967516A IT1232119B (it) 1989-06-27 1989-06-27 Sistema ottico per la misura di spostamenti lineari o angolari

Country Status (5)

Country Link
US (1) US5089698A (it)
EP (1) EP0405462B1 (it)
CA (1) CA2019950C (it)
DE (2) DE405462T1 (it)
IT (1) IT1232119B (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1247764B (it) * 1990-10-22 1994-12-30 Cselt Centro Studi Lab Telecom Sistema per la misura del profilo dell'indice di rifrazione di componenti ottici
GB2254693B (en) * 1991-04-12 1995-10-25 British Tech Group Methods of and apparatus for measuring using acousto-optic devices
US5583643A (en) * 1991-04-12 1996-12-10 British Technology Group Ltd. Methods of and apparatus for measurement using acousto-optic devices
GB2266366B (en) * 1992-04-16 1996-04-24 Rank Taylor Hobson Ltd Angle detection
US5457395A (en) * 1994-07-18 1995-10-10 Ford Motor Company System and apparatus for measuring gaps between non-parallel surfaces
US5477324A (en) * 1994-08-26 1995-12-19 Georgia Tech Research Corporation Method and apparatus for detecting surface wave vector dynamics using three beams of coherent light
KR101027912B1 (ko) 2009-03-27 2011-04-12 (주) 디바이스이엔지 엔코더장치
US8848277B2 (en) * 2012-05-31 2014-09-30 Asml Netherlands B.V. System and method for protecting a seed laser in an EUV light source with a Bragg AOM

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU144188A1 (ru) * 1960-12-13 1961-11-30 А.И. Боровиков Способ автоматического регулировани индукционного высокочастотного нагрева стальных изделий
US4410268A (en) * 1980-04-28 1983-10-18 Tokyo Kogaku Kikai Kabushiki Kaisha Apparatus for automatically measuring the characteristics of an optical system
US4395123A (en) * 1980-10-08 1983-07-26 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Interferometric angle monitor
US4848908A (en) * 1983-10-24 1989-07-18 Lockheed Missiles & Space Company, Inc. Optical heterodyne roughness measurement system
US4710026A (en) * 1985-03-22 1987-12-01 Nippon Kogaku K. K. Position detection apparatus

Also Published As

Publication number Publication date
DE405462T1 (de) 1991-04-11
DE69000564T2 (de) 1993-04-29
IT8967516A0 (it) 1989-06-27
CA2019950C (en) 1993-04-06
EP0405462B1 (en) 1992-12-09
DE69000564D1 (de) 1993-01-21
CA2019950A1 (en) 1990-12-27
US5089698A (en) 1992-02-18
EP0405462A1 (en) 1991-01-02

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19950616