DE69304917D1 - Luftkissenfördersystem zum fördern von gegenständen - Google Patents

Luftkissenfördersystem zum fördern von gegenständen

Info

Publication number
DE69304917D1
DE69304917D1 DE69304917T DE69304917T DE69304917D1 DE 69304917 D1 DE69304917 D1 DE 69304917D1 DE 69304917 T DE69304917 T DE 69304917T DE 69304917 T DE69304917 T DE 69304917T DE 69304917 D1 DE69304917 D1 DE 69304917D1
Authority
DE
Germany
Prior art keywords
air cushion
conveyor system
conveying objects
cushion conveyor
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69304917T
Other languages
English (en)
Other versions
DE69304917T2 (de
Inventor
Lynn Skow
William Dunbar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlassBridge Enterprises Inc
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of DE69304917D1 publication Critical patent/DE69304917D1/de
Publication of DE69304917T2 publication Critical patent/DE69304917T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B15/00—Driving, starting or stopping record carriers of filamentary or web form; Driving both such record carriers and heads; Guiding such record carriers or containers therefor; Control thereof; Control of operating function
    • G11B15/60—Guiding record carrier
    • G11B15/605—Guiding record carrier without displacing the guiding means
    • G11B15/607—Pneumatic guiding
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Advancing Webs (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Discharge Of Articles From Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE69304917T 1992-07-15 1993-06-29 Luftkissenfördersystem zum fördern von gegenständen Expired - Fee Related DE69304917T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US91477592A 1992-07-15 1992-07-15
US7838193A 1993-06-22 1993-06-22
PCT/US1993/006147 WO1994002395A1 (en) 1992-07-15 1993-06-29 Fluid transport system for transporting articles

Publications (2)

Publication Number Publication Date
DE69304917D1 true DE69304917D1 (de) 1996-10-24
DE69304917T2 DE69304917T2 (de) 1997-02-06

Family

ID=26760472

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304917T Expired - Fee Related DE69304917T2 (de) 1992-07-15 1993-06-29 Luftkissenfördersystem zum fördern von gegenständen

Country Status (9)

Country Link
EP (1) EP0650455B1 (de)
JP (1) JPH07508961A (de)
CN (1) CN1088178A (de)
AU (1) AU4654193A (de)
CA (1) CA2137920A1 (de)
DE (1) DE69304917T2 (de)
IL (1) IL106251A (de)
MX (1) MX9304233A (de)
WO (1) WO1994002395A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5824186A (en) * 1993-12-17 1998-10-20 The Regents Of The University Of California Method and apparatus for fabricating self-assembling microstructures
US6864570B2 (en) 1993-12-17 2005-03-08 The Regents Of The University Of California Method and apparatus for fabricating self-assembling microstructures
JP4510241B2 (ja) * 2000-06-30 2010-07-21 不二越機械工業株式会社 ウェーハの収納装置
US7297462B2 (en) 2003-11-17 2007-11-20 Agfa Graphics Nv Heat-sensitive lithographic printing plate precursor
ES2396037T3 (es) 2008-06-19 2013-02-18 Rena Gmbh Procedimiento y dispositivo para transportar objetos
DE102009029945A1 (de) 2009-06-19 2010-12-23 Rena Gmbh Prozessmodul zur Inline-Behandlung von Substraten
US8814477B2 (en) 2010-02-26 2014-08-26 Corning Incorporated Conveyor tray apparatus with air bearing and air curtain and methods of use
CN101920844A (zh) * 2010-08-11 2010-12-22 秦拓微电子技术(上海)有限公司 气吹式直线送料轨道及相关技术
JP5440875B2 (ja) * 2010-12-06 2014-03-12 株式会社ダイフク 板状体搬送装置
CN103171898A (zh) * 2013-04-26 2013-06-26 吉林大学 气悬浮式非接触自动输送装置
JP6079529B2 (ja) * 2013-09-18 2017-02-15 三星ダイヤモンド工業株式会社 支持機構および搬送装置
CN103771133A (zh) * 2014-01-23 2014-05-07 南通剑桥输送设备有限公司 一种可调节高度的气动传输装置
EP2947686A1 (de) 2014-05-19 2015-11-25 Meyer Burger AG Verfahren zur Behandlung eines Plättchens
EP3032334B1 (de) 2014-12-08 2017-10-18 Agfa Graphics Nv System zur Reduzierung von Ablationsrückständen
CN108177199A (zh) * 2018-02-11 2018-06-19 重庆双驰门窗有限公司 电脑裁板锯操作台
CN111232650B (zh) * 2020-01-13 2020-09-01 江苏科技大学 一种可重构模块化的气浮输运装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1251220B (de) * 1967-09-28
US3706475A (en) * 1971-03-29 1972-12-19 Ibm Air slides
DE2802610C2 (de) * 1978-01-21 1983-05-05 Vits-Maschinenbau Gmbh, 4018 Langenfeld Blaskasten zum schwebenden Führen und/oder Fördern von Bahnen oder Bogen

Also Published As

Publication number Publication date
WO1994002395A1 (en) 1994-02-03
EP0650455A1 (de) 1995-05-03
MX9304233A (es) 1995-01-31
IL106251A0 (en) 1993-11-15
CA2137920A1 (en) 1994-03-02
AU4654193A (en) 1994-02-14
EP0650455B1 (de) 1996-09-18
CN1088178A (zh) 1994-06-22
DE69304917T2 (de) 1997-02-06
IL106251A (en) 1995-12-31
JPH07508961A (ja) 1995-10-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: IMATION CORP., OAKDALE, MINN. 55128, US

8339 Ceased/non-payment of the annual fee