DE69304857T2 - Laser Oszillator - Google Patents

Laser Oszillator

Info

Publication number
DE69304857T2
DE69304857T2 DE69304857T DE69304857T DE69304857T2 DE 69304857 T2 DE69304857 T2 DE 69304857T2 DE 69304857 T DE69304857 T DE 69304857T DE 69304857 T DE69304857 T DE 69304857T DE 69304857 T2 DE69304857 T2 DE 69304857T2
Authority
DE
Germany
Prior art keywords
laser oscillator
oscillator
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69304857T
Other languages
English (en)
Other versions
DE69304857D1 (de
Inventor
Otani Akihiro
Nishida Satoshi
Asai Tatsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE69304857D1 publication Critical patent/DE69304857D1/de
Application granted granted Critical
Publication of DE69304857T2 publication Critical patent/DE69304857T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/034Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346Protection of windows or mirrors against deleterious effects
DE69304857T 1992-10-28 1993-10-28 Laser Oszillator Expired - Lifetime DE69304857T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4289965A JP2800593B2 (ja) 1992-10-28 1992-10-28 レーザ発振器

Publications (2)

Publication Number Publication Date
DE69304857D1 DE69304857D1 (de) 1996-10-24
DE69304857T2 true DE69304857T2 (de) 1997-02-27

Family

ID=17750025

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304857T Expired - Lifetime DE69304857T2 (de) 1992-10-28 1993-10-28 Laser Oszillator

Country Status (6)

Country Link
US (1) US5416791A (de)
EP (1) EP0595335B1 (de)
JP (1) JP2800593B2 (de)
DE (1) DE69304857T2 (de)
HK (1) HK1006341A1 (de)
TW (1) TW232101B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6768765B1 (en) * 2001-06-07 2004-07-27 Lambda Physik Ag High power excimer or molecular fluorine laser system
EP1465301B1 (de) * 2003-04-05 2007-12-12 TRUMPF LASERTECHNIK GmbH Gaslaserresonator
JP4965466B2 (ja) * 2008-01-10 2012-07-04 三菱電機株式会社 レーザ発振器
CN102082387B (zh) * 2010-12-30 2012-06-13 中国科学院长春光学精密机械与物理研究所 多层气流冷却激光器输出镜装置
WO2016181511A1 (ja) * 2015-05-12 2016-11-17 三菱電機株式会社 ガスレーザ発振器
FR3077686B1 (fr) * 2018-02-05 2020-09-25 Commissariat Energie Atomique Element d'un systeme optique, pour recevoir un fluide fonctionnel sous pression.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177981A (ja) * 1983-03-29 1984-10-08 Toshiba Corp 気体レ−ザの発振容器
JPS60254683A (ja) * 1984-05-31 1985-12-16 Mitsubishi Electric Corp レ−ザ−発振装置
JPS62141288A (ja) * 1985-12-17 1987-06-24 東洋熱工業株式会社 建屋の防雪,防雨装置
US4771436A (en) * 1986-07-29 1988-09-13 Amada Engineering & Service Co., Inc. Gas laser oscillator having a gas flow smoothing device to smooth gas flow in the electrical discharge region
JPS6364377A (ja) * 1986-09-04 1988-03-22 Mitsubishi Electric Corp レ−ザ発振器
JPS63108786A (ja) * 1986-10-25 1988-05-13 Hitachi Ltd ガスレ−ザ発生装置
US4823355A (en) * 1987-03-10 1989-04-18 Amada Engineering & Service Co., Inc. High speed axial flow gas laser generator
US5027366A (en) * 1988-01-15 1991-06-25 Cymer Laser Technologies Compact excimer laser
CA2043512A1 (en) * 1990-06-01 1991-12-02 Mitsugu Terada Gas laser apparatus
IL95906A0 (en) * 1990-10-05 1991-07-18 Laser Ind Ltd Gas laser

Also Published As

Publication number Publication date
DE69304857D1 (de) 1996-10-24
JP2800593B2 (ja) 1998-09-21
EP0595335A1 (de) 1994-05-04
EP0595335B1 (de) 1996-09-18
JPH06140692A (ja) 1994-05-20
US5416791A (en) 1995-05-16
TW232101B (de) 1994-10-11
HK1006341A1 (en) 1999-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)