DE69302205D1 - Korrosionsschutz mit Cu-BTA - Google Patents
Korrosionsschutz mit Cu-BTAInfo
- Publication number
- DE69302205D1 DE69302205D1 DE69302205T DE69302205T DE69302205D1 DE 69302205 D1 DE69302205 D1 DE 69302205D1 DE 69302205 T DE69302205 T DE 69302205T DE 69302205 T DE69302205 T DE 69302205T DE 69302205 D1 DE69302205 D1 DE 69302205D1
- Authority
- DE
- Germany
- Prior art keywords
- bta
- corrosion protection
- corrosion
- protection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/14—Nitrogen-containing compounds
- C23F11/149—Heterocyclic compounds containing nitrogen as hetero atom
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Magnetic Record Carriers (AREA)
- Chemical Treatment Of Metals (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
- Magnetic Heads (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/849,856 US5316573A (en) | 1992-03-12 | 1992-03-12 | Corrosion inhibition with CU-BTA |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69302205D1 true DE69302205D1 (de) | 1996-05-23 |
DE69302205T2 DE69302205T2 (de) | 1996-10-10 |
Family
ID=25306687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69302205T Expired - Lifetime DE69302205T2 (de) | 1992-03-12 | 1993-02-15 | Korrosionsschutz mit Cu-BTA |
Country Status (4)
Country | Link |
---|---|
US (1) | US5316573A (de) |
EP (1) | EP0560083B1 (de) |
JP (1) | JPH07116626B2 (de) |
DE (1) | DE69302205T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6265667B1 (en) | 1998-01-14 | 2001-07-24 | Belden Wire & Cable Company | Coaxial cable |
US6123088A (en) * | 1999-12-20 | 2000-09-26 | Chartered Semiconducotor Manufacturing Ltd. | Method and cleaner composition for stripping copper containing residue layers |
US6207350B1 (en) | 2000-01-18 | 2001-03-27 | Headway Technologies, Inc. | Corrosion inhibitor for NiCu for high performance writers |
JP2002070867A (ja) * | 2000-09-01 | 2002-03-08 | Sankyo Seiki Mfg Co Ltd | 軸受部材及びその製造方法、並びに動圧軸受装置 |
CN101353205B (zh) * | 2008-09-16 | 2011-11-02 | 河北省首钢迁安钢铁有限责任公司 | 防止软化水腐蚀设备的方法 |
US8717710B2 (en) | 2012-05-08 | 2014-05-06 | HGST Netherlands, B.V. | Corrosion-resistant bit patterned media (BPM) and discrete track media (DTM) and methods of production thereof |
EP2711444A1 (de) * | 2012-09-20 | 2014-03-26 | Coventya SAS | Wässrige Alkalinlösung zum Verbessern der Korrosionsbeständigkeit einer Cr(III)-Umwandlungsbeschichtung und Verfahren zum Herstellen der Beschichtung und ihre Verwendung |
US9475945B2 (en) | 2013-10-03 | 2016-10-25 | Kennametal Inc. | Aqueous slurry for making a powder of hard material |
IN2013CH04500A (de) | 2013-10-04 | 2015-04-10 | Kennametal India Ltd | |
EP3139402B1 (de) | 2014-05-02 | 2018-08-15 | Mitsubishi Gas Chemical Company, Inc. | Halbleiterelementreinigungsflüssigkeit und reinigungsverfahren |
US9944828B2 (en) | 2014-10-21 | 2018-04-17 | Cabot Microelectronics Corporation | Slurry for chemical mechanical polishing of cobalt |
CN116288366A (zh) | 2014-10-21 | 2023-06-23 | Cmc材料股份有限公司 | 腐蚀抑制剂以及相关的组合物及方法 |
TWI580767B (zh) | 2014-10-21 | 2017-05-01 | 卡博特微電子公司 | 鈷拋光加速劑 |
CN107075310B (zh) | 2014-10-21 | 2019-04-02 | 嘉柏微电子材料股份公司 | 钴凹陷控制剂 |
US10629426B2 (en) | 2014-11-13 | 2020-04-21 | Mitsubishi Gas Chemical Company, Inc. | Semiconductor element cleaning solution that suppresses damage to cobalt, and method for cleaning semiconductor element using same |
US9528030B1 (en) | 2015-10-21 | 2016-12-27 | Cabot Microelectronics Corporation | Cobalt inhibitor combination for improved dishing |
CN106015837A (zh) * | 2016-05-31 | 2016-10-12 | 无锡锡能锅炉有限公司 | 一种煤粉锅炉回收水管路用复水剂 |
CN108962740B (zh) * | 2017-05-24 | 2021-09-07 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1065995A (en) * | 1963-12-06 | 1967-04-19 | Geigy Uk Ltd | Benzotriazoles and their production |
GB1209919A (en) * | 1967-07-21 | 1970-10-21 | Geigy Uk Ltd | Substituted benzotriazoles and the use thereof as metal deactivators |
US3653931A (en) * | 1970-12-30 | 1972-04-04 | Miles Lab | Anti-tarnish composition for metal surfaces and process for its use |
US3887481A (en) * | 1971-06-14 | 1975-06-03 | Sherwin Williams Co | Benzotriazole and tolyltriazole mixture with tetrachloroethylene |
US3794603A (en) * | 1972-01-17 | 1974-02-26 | Sherwin Williams Co | Zn++-benzotriazole-h2so4 corrosioninhibitor |
JPS5327694B2 (de) * | 1972-02-05 | 1978-08-10 | ||
JPS4914056A (de) * | 1972-05-16 | 1974-02-07 | ||
US3985503A (en) * | 1975-03-17 | 1976-10-12 | The Sherwin-Williams Company | Process for inhibiting metal corrosion |
US3998993A (en) * | 1975-06-09 | 1976-12-21 | Bell Telephone Laboratories, Incorporated | Electrical device having a metal surface bearing a corrosion inhibitor |
US4149969A (en) * | 1977-03-23 | 1979-04-17 | Amax Inc. | Process and composition for inhibiting corrosion of metal parts in water systems |
US4184991A (en) * | 1978-03-13 | 1980-01-22 | Zimmite Corporation | Corrosion inhibiting composition for ferrous metals and method of treating with same |
JPS557717A (en) * | 1978-06-30 | 1980-01-19 | Ricoh Co Ltd | Trigger device in motor drive unit of camera |
US4202796A (en) * | 1978-07-31 | 1980-05-13 | Chemed Corporation | Anti-corrosion composition |
JPS57116778A (en) * | 1981-01-13 | 1982-07-20 | Tamagawa Kikai Kinzoku Kk | Surface treatment of pad spring for cassette tape |
US4395294A (en) * | 1981-08-17 | 1983-07-26 | Bell Telephone Laboratories, Incorporated | Copper corrosion inhibitor |
JPS61287155A (ja) * | 1985-06-14 | 1986-12-17 | Hitachi Ltd | 半導体装置及び半導体装置の製造方法 |
US4806310A (en) * | 1985-06-14 | 1989-02-21 | Drew Chemical Corporation | Corrosion inhibitor |
US4657785A (en) * | 1985-12-11 | 1987-04-14 | Nalco Chemical Company | Use of benzo and tolyltriazole as copper corrosion inhibitors for boiler condensate systems |
JPS6442587A (en) * | 1987-08-07 | 1989-02-14 | Yazaki Corp | Rustproofing method |
EP0428383A1 (de) * | 1989-11-13 | 1991-05-22 | Shikoku Chemicals Corporation | Verfahren zur Oberflächenbehandlung von Kupfer und Kupferlegierungen |
-
1992
- 1992-03-12 US US07/849,856 patent/US5316573A/en not_active Expired - Fee Related
-
1993
- 1993-01-19 JP JP5006952A patent/JPH07116626B2/ja not_active Expired - Lifetime
- 1993-02-15 EP EP93102334A patent/EP0560083B1/de not_active Expired - Lifetime
- 1993-02-15 DE DE69302205T patent/DE69302205T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69302205T2 (de) | 1996-10-10 |
JPH0681177A (ja) | 1994-03-22 |
US5316573A (en) | 1994-05-31 |
EP0560083B1 (de) | 1996-04-17 |
JPH07116626B2 (ja) | 1995-12-13 |
EP0560083A1 (de) | 1993-09-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8330 | Complete disclaimer |