DE69300160D1 - Gas-Laser-Vorrichtung. - Google Patents

Gas-Laser-Vorrichtung.

Info

Publication number
DE69300160D1
DE69300160D1 DE69300160T DE69300160T DE69300160D1 DE 69300160 D1 DE69300160 D1 DE 69300160D1 DE 69300160 T DE69300160 T DE 69300160T DE 69300160 T DE69300160 T DE 69300160T DE 69300160 D1 DE69300160 D1 DE 69300160D1
Authority
DE
Germany
Prior art keywords
laser device
gas laser
gas
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69300160T
Other languages
English (en)
Other versions
DE69300160T2 (de
Inventor
Kiyohisa Terai
Takaaki Murata
Tohru Tamagawa
Hideyuki Shinonaga
Hirokatsu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE69300160D1 publication Critical patent/DE69300160D1/de
Publication of DE69300160T2 publication Critical patent/DE69300160T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
DE69300160T 1992-03-31 1993-03-29 Gas-Laser-Vorrichtung. Expired - Fee Related DE69300160T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7744292 1992-03-31
JP32768392 1992-12-08

Publications (2)

Publication Number Publication Date
DE69300160D1 true DE69300160D1 (de) 1995-06-29
DE69300160T2 DE69300160T2 (de) 1995-10-19

Family

ID=26418517

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69300160T Expired - Fee Related DE69300160T2 (de) 1992-03-31 1993-03-29 Gas-Laser-Vorrichtung.

Country Status (5)

Country Link
US (1) US5408490A (de)
EP (1) EP0564205B1 (de)
KR (1) KR960009300B1 (de)
DE (1) DE69300160T2 (de)
TW (1) TW228618B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5754580A (en) * 1996-10-10 1998-05-19 Daihen Corporation Carbon dioxide gas laser oscillation apparatus
JP2003060270A (ja) * 2001-08-10 2003-02-28 Gigaphoton Inc パルス発振ガスレーザ装置
JP6048968B2 (ja) * 2013-08-30 2016-12-21 三菱電機株式会社 レーザ装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4719640A (en) * 1985-08-01 1988-01-12 The United States Of America As Represented By The Secretary Of The Army Multiple parallel RF excited CO2 lasers
EP0495535B1 (de) * 1987-03-19 1995-07-26 Matsushita Electric Industrial Co., Ltd. Laser-Apparat
DE3732135A1 (de) * 1987-09-24 1989-04-13 Deutsche Forsch Luft Raumfahrt Entladungskanal fuer hochleistungslaser
US4959840A (en) * 1988-01-15 1990-09-25 Cymer Laser Technologies Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
US5018162A (en) * 1988-01-15 1991-05-21 Cymer Laser Technologies Compact excimer laser
US5027366A (en) * 1988-01-15 1991-06-25 Cymer Laser Technologies Compact excimer laser
US5023884A (en) * 1988-01-15 1991-06-11 Cymer Laser Technologies Compact excimer laser
US5029177A (en) * 1988-01-15 1991-07-02 Cymer Laser Technologies Compact excimer laser
US5033055A (en) * 1988-01-15 1991-07-16 Cymer Laser Technologies Compact excimer laser
US5018161A (en) * 1988-01-15 1991-05-21 Cymer Laser Technologies Compact excimer laser

Also Published As

Publication number Publication date
EP0564205A1 (de) 1993-10-06
KR960009300B1 (en) 1996-07-18
DE69300160T2 (de) 1995-10-19
TW228618B (de) 1994-08-21
KR930020781A (ko) 1993-10-20
US5408490A (en) 1995-04-18
EP0564205B1 (de) 1995-05-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee