DE69233645D1 - Durchflussregelungssytem für Prozesskammer - Google Patents
Durchflussregelungssytem für ProzesskammerInfo
- Publication number
- DE69233645D1 DE69233645D1 DE69233645T DE69233645T DE69233645D1 DE 69233645 D1 DE69233645 D1 DE 69233645D1 DE 69233645 T DE69233645 T DE 69233645T DE 69233645 T DE69233645 T DE 69233645T DE 69233645 D1 DE69233645 D1 DE 69233645D1
- Authority
- DE
- Germany
- Prior art keywords
- environment
- air
- piston
- regulator
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
- F24F11/75—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity for maintaining constant air flow rate or air velocity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Control Of Fluid Pressure (AREA)
- Ventilation (AREA)
- Flow Control (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid-Driven Valves (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Sanitary Device For Flush Toilet (AREA)
- Bipolar Transistors (AREA)
- Measuring Volume Flow (AREA)
- Sliding Valves (AREA)
- Exhaust Silencers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66974691A | 1991-03-15 | 1991-03-15 | |
US669746 | 2000-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69233645D1 true DE69233645D1 (de) | 2006-09-21 |
DE69233645T2 DE69233645T2 (de) | 2007-08-09 |
Family
ID=24687558
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232399T Expired - Fee Related DE69232399T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregelungssystem für Prozesskammer |
DE69226265T Expired - Fee Related DE69226265T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregelungsystem für prozesskammer |
DE69233645T Expired - Fee Related DE69233645T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregelungssytem für Prozesskammer |
DE69226264T Expired - Fee Related DE69226264T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregler zum anpassbaren einsatz mit prozesskammer-abfluss |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69232399T Expired - Fee Related DE69232399T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregelungssystem für Prozesskammer |
DE69226265T Expired - Fee Related DE69226265T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregelungsystem für prozesskammer |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69226264T Expired - Fee Related DE69226264T2 (de) | 1991-03-15 | 1992-03-13 | Durchflussregler zum anpassbaren einsatz mit prozesskammer-abfluss |
Country Status (8)
Country | Link |
---|---|
EP (4) | EP1174783B1 (de) |
JP (2) | JP3256228B2 (de) |
KR (2) | KR100202431B1 (de) |
AT (4) | ATE168480T1 (de) |
CA (2) | CA2106187C (de) |
DE (4) | DE69232399T2 (de) |
DK (1) | DK1174783T3 (de) |
WO (4) | WO1992016884A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5655562A (en) * | 1988-04-07 | 1997-08-12 | Palmer; David W. | System for controlling flow through a process region |
US5450873A (en) * | 1988-04-07 | 1995-09-19 | Palmer; David W. | System for controlling flow through a process region |
US5320124A (en) * | 1988-04-07 | 1994-06-14 | Palmer David W | Regulator adaptable for maintaining a constant partial vacuum in a remote region |
DE19537063C2 (de) * | 1995-10-05 | 2001-01-25 | Klaus Beck | Volumenstromregler |
SE521968C2 (sv) * | 2000-05-22 | 2003-12-23 | Scania Cv Ab | Förfarande och anordning för avgasrecirkulering i en förbränningsmotor jämte dylik motor |
FR2824645B1 (fr) * | 2001-05-11 | 2004-02-13 | Claude Jean Marie Frangin | Regulateur de fluide |
CN113110627B (zh) * | 2021-04-28 | 2022-05-17 | 北京航空航天大学 | 一种高精度高可靠性快速响应的可调文氏管 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US500221A (en) * | 1893-06-27 | Scrubbing and mopping machine | ||
US2899973A (en) * | 1959-08-18 | Pressure reducing valve | ||
US2803261A (en) * | 1953-02-02 | 1957-08-20 | Westinghouse Electric Corp | Velocity responsive controls |
US3053272A (en) * | 1960-11-16 | 1962-09-11 | Babson Bros Co | Vacuum regulator |
US3312241A (en) * | 1964-04-16 | 1967-04-04 | Westinghouse Electric Corp | Fluid control apparatus |
US3853143A (en) * | 1971-01-29 | 1974-12-10 | Danfoss As | Flexible diaphragm air damper |
US3703913A (en) * | 1971-08-02 | 1972-11-28 | Cvc Co | Automatic rate of flow control valve |
US3742972A (en) * | 1972-01-03 | 1973-07-03 | Textron Inc | Twin regulator arrangement |
CH551043A (de) * | 1972-01-28 | 1974-06-28 | Danfoss As | Auf druckunterschiede ansprechende vorrichtung zur beeinflussung der stroemung von gasfoermigen medien in kanaelen. |
DK136125B (da) * | 1973-02-06 | 1977-08-15 | Danfoss As | Luftmængderegulator. |
US3820556A (en) * | 1973-05-11 | 1974-06-28 | Parker Hannifin Corp | Fluid flow control system |
US3862644A (en) * | 1973-07-12 | 1975-01-28 | United Aircraft Corp | Flow control |
US3900045A (en) * | 1973-09-27 | 1975-08-19 | Robertshaw Controls Co | Fulcrum pressure regulator |
DE2421873C2 (de) * | 1974-05-06 | 1983-11-03 | Danfoss A/S, 6430 Nordborg | Vorrichtung zur Regelung der Brennluftzufuhr zu einer Feuerung mit Öl- oder Gasbrenner für Heizungsanlagen |
SE396250B (sv) * | 1975-04-29 | 1977-09-12 | Stifab Ab | Regulatoranordning avsedd att inga i en fluidstrombana, t ex luftstromningsbana |
FR2389933B1 (de) * | 1977-05-06 | 1980-04-11 | Lezier Pierre | |
JPS5471432A (en) * | 1977-11-17 | 1979-06-08 | Sotokazu Rikuta | Flow rate constant value automatic control valve |
US4428529A (en) * | 1982-07-26 | 1984-01-31 | Honeywell Inc. | Flow synchronization |
US4873873A (en) * | 1988-02-01 | 1989-10-17 | James L. Day Co., Inc. | Air flow metering terminal and control system |
US5000221A (en) * | 1989-09-11 | 1991-03-19 | Palmer David W | Flow control system |
-
1992
- 1992-03-13 CA CA002106187A patent/CA2106187C/en not_active Expired - Fee Related
- 1992-03-13 DE DE69232399T patent/DE69232399T2/de not_active Expired - Fee Related
- 1992-03-13 WO PCT/US1992/002013 patent/WO1992016884A1/en active IP Right Grant
- 1992-03-13 DE DE69226265T patent/DE69226265T2/de not_active Expired - Fee Related
- 1992-03-13 EP EP01116749A patent/EP1174783B1/de not_active Expired - Lifetime
- 1992-03-13 WO PCT/US1992/002019 patent/WO1992016885A1/en active Application Filing
- 1992-03-13 JP JP50788192A patent/JP3256228B2/ja not_active Expired - Fee Related
- 1992-03-13 KR KR1019930702741A patent/KR100202431B1/ko not_active IP Right Cessation
- 1992-03-13 AT AT92908979T patent/ATE168480T1/de not_active IP Right Cessation
- 1992-03-13 KR KR1019930702740A patent/KR100202432B1/ko not_active IP Right Cessation
- 1992-03-13 JP JP4508795A patent/JP3014143B2/ja not_active Expired - Lifetime
- 1992-03-13 AT AT92908728T patent/ATE168479T1/de not_active IP Right Cessation
- 1992-03-13 WO PCT/US1992/002012 patent/WO1992016883A1/en active IP Right Grant
- 1992-03-13 AT AT98100282T patent/ATE212735T1/de not_active IP Right Cessation
- 1992-03-13 EP EP98100282A patent/EP0853266B1/de not_active Expired - Lifetime
- 1992-03-13 CA CA002106186A patent/CA2106186C/en not_active Expired - Fee Related
- 1992-03-13 DK DK01116749T patent/DK1174783T3/da active
- 1992-03-13 DE DE69233645T patent/DE69233645T2/de not_active Expired - Fee Related
- 1992-03-13 WO PCT/US1992/002011 patent/WO1992016882A1/en active Application Filing
- 1992-03-13 DE DE69226264T patent/DE69226264T2/de not_active Expired - Fee Related
- 1992-03-13 EP EP92908979A patent/EP0575533B1/de not_active Expired - Lifetime
- 1992-03-13 EP EP92908728A patent/EP0575523B1/de not_active Expired - Lifetime
- 1992-03-13 AT AT01116749T patent/ATE336033T1/de not_active IP Right Cessation
Also Published As
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |