ATE168480T1 - Durchflussregelungsystem für prozesskammer - Google Patents

Durchflussregelungsystem für prozesskammer

Info

Publication number
ATE168480T1
ATE168480T1 AT92908979T AT92908979T ATE168480T1 AT E168480 T1 ATE168480 T1 AT E168480T1 AT 92908979 T AT92908979 T AT 92908979T AT 92908979 T AT92908979 T AT 92908979T AT E168480 T1 ATE168480 T1 AT E168480T1
Authority
AT
Austria
Prior art keywords
environment
air
piston
regulator
flow
Prior art date
Application number
AT92908979T
Other languages
English (en)
Inventor
David W Palmer
Original Assignee
David W Palmer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by David W Palmer filed Critical David W Palmer
Application granted granted Critical
Publication of ATE168480T1 publication Critical patent/ATE168480T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/70—Control systems characterised by their outputs; Constructional details thereof
    • F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
    • F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
    • F24F11/75—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity for maintaining constant air flow rate or air velocity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Fluid Pressure (AREA)
  • Flow Control (AREA)
  • Ventilation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid-Driven Valves (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Sanitary Device For Flush Toilet (AREA)
  • Bipolar Transistors (AREA)
  • Measuring Volume Flow (AREA)
  • Sliding Valves (AREA)
  • Exhaust Silencers (AREA)
AT92908979T 1991-03-15 1992-03-13 Durchflussregelungsystem für prozesskammer ATE168480T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66974691A 1991-03-15 1991-03-15

Publications (1)

Publication Number Publication Date
ATE168480T1 true ATE168480T1 (de) 1998-08-15

Family

ID=24687558

Family Applications (4)

Application Number Title Priority Date Filing Date
AT92908979T ATE168480T1 (de) 1991-03-15 1992-03-13 Durchflussregelungsystem für prozesskammer
AT98100282T ATE212735T1 (de) 1991-03-15 1992-03-13 Durchflussregelungssystem für prozesskammer
AT92908728T ATE168479T1 (de) 1991-03-15 1992-03-13 Durchflussregler zum anpassbaren einsatz mit prozesskammer-abfluss
AT01116749T ATE336033T1 (de) 1991-03-15 1992-03-13 Durchflussregelungssytem für prozesskammer

Family Applications After (3)

Application Number Title Priority Date Filing Date
AT98100282T ATE212735T1 (de) 1991-03-15 1992-03-13 Durchflussregelungssystem für prozesskammer
AT92908728T ATE168479T1 (de) 1991-03-15 1992-03-13 Durchflussregler zum anpassbaren einsatz mit prozesskammer-abfluss
AT01116749T ATE336033T1 (de) 1991-03-15 1992-03-13 Durchflussregelungssytem für prozesskammer

Country Status (8)

Country Link
EP (4) EP1174783B1 (de)
JP (2) JP3256228B2 (de)
KR (2) KR100202431B1 (de)
AT (4) ATE168480T1 (de)
CA (2) CA2106186C (de)
DE (4) DE69232399T2 (de)
DK (1) DK1174783T3 (de)
WO (4) WO1992016883A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5320124A (en) * 1988-04-07 1994-06-14 Palmer David W Regulator adaptable for maintaining a constant partial vacuum in a remote region
US5655562A (en) * 1988-04-07 1997-08-12 Palmer; David W. System for controlling flow through a process region
US5450873A (en) * 1988-04-07 1995-09-19 Palmer; David W. System for controlling flow through a process region
DE19537063C2 (de) * 1995-10-05 2001-01-25 Klaus Beck Volumenstromregler
SE521968C2 (sv) * 2000-05-22 2003-12-23 Scania Cv Ab Förfarande och anordning för avgasrecirkulering i en förbränningsmotor jämte dylik motor
FR2824645B1 (fr) * 2001-05-11 2004-02-13 Claude Jean Marie Frangin Regulateur de fluide
CN113110627B (zh) * 2021-04-28 2022-05-17 北京航空航天大学 一种高精度高可靠性快速响应的可调文氏管
FR3162502A1 (fr) * 2024-05-24 2025-11-28 Atlantic Climatisation Et Traitement D Air Industrie Kit aéraulique comprenant un raccord et un caisson aérauliques et un agencement de capteurs de pression absolue

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US500221A (en) * 1893-06-27 Scrubbing and mopping machine
US2899973A (en) * 1959-08-18 Pressure reducing valve
US2803261A (en) * 1953-02-02 1957-08-20 Westinghouse Electric Corp Velocity responsive controls
US3053272A (en) * 1960-11-16 1962-09-11 Babson Bros Co Vacuum regulator
US3312241A (en) * 1964-04-16 1967-04-04 Westinghouse Electric Corp Fluid control apparatus
US3853143A (en) * 1971-01-29 1974-12-10 Danfoss As Flexible diaphragm air damper
US3703913A (en) * 1971-08-02 1972-11-28 Cvc Co Automatic rate of flow control valve
US3742972A (en) * 1972-01-03 1973-07-03 Textron Inc Twin regulator arrangement
CH551043A (de) * 1972-01-28 1974-06-28 Danfoss As Auf druckunterschiede ansprechende vorrichtung zur beeinflussung der stroemung von gasfoermigen medien in kanaelen.
DK136125B (da) * 1973-02-06 1977-08-15 Danfoss As Luftmængderegulator.
US3820556A (en) * 1973-05-11 1974-06-28 Parker Hannifin Corp Fluid flow control system
US3862644A (en) * 1973-07-12 1975-01-28 United Aircraft Corp Flow control
US3900045A (en) * 1973-09-27 1975-08-19 Robertshaw Controls Co Fulcrum pressure regulator
DE2421873C2 (de) * 1974-05-06 1983-11-03 Danfoss A/S, 6430 Nordborg Vorrichtung zur Regelung der Brennluftzufuhr zu einer Feuerung mit Öl- oder Gasbrenner für Heizungsanlagen
SE396250B (sv) * 1975-04-29 1977-09-12 Stifab Ab Regulatoranordning avsedd att inga i en fluidstrombana, t ex luftstromningsbana
FR2389933B1 (de) * 1977-05-06 1980-04-11 Lezier Pierre
JPS5471432A (en) * 1977-11-17 1979-06-08 Sotokazu Rikuta Flow rate constant value automatic control valve
US4428529A (en) * 1982-07-26 1984-01-31 Honeywell Inc. Flow synchronization
US4873873A (en) * 1988-02-01 1989-10-17 James L. Day Co., Inc. Air flow metering terminal and control system
US5000221A (en) * 1989-09-11 1991-03-19 Palmer David W Flow control system
JP5473200B2 (ja) 2006-11-21 2014-04-16 村原 正隆 光学部品の接着方法および素子製作装置

Also Published As

Publication number Publication date
EP0575523A1 (de) 1993-12-29
WO1992016882A1 (en) 1992-10-01
EP1174783A1 (de) 2002-01-23
DE69226264D1 (de) 1998-08-20
EP1174783B1 (de) 2006-08-09
ATE336033T1 (de) 2006-09-15
CA2106186A1 (en) 1992-09-16
DE69226265D1 (de) 1998-08-20
EP0575533A1 (de) 1993-12-29
ATE168479T1 (de) 1998-08-15
WO1992016885A1 (en) 1992-10-01
KR100202431B1 (ko) 1999-06-15
JPH06506553A (ja) 1994-07-21
EP0575533B1 (de) 1998-07-15
EP0575523A4 (de) 1995-04-19
CA2106187C (en) 2002-12-10
JP3014143B2 (ja) 2000-02-28
KR100202432B1 (ko) 1999-06-15
CA2106186C (en) 2002-12-24
EP0853266A2 (de) 1998-07-15
WO1992016883A1 (en) 1992-10-01
EP0575533A4 (de) 1995-04-19
DK1174783T3 (da) 2006-12-04
EP0575523B1 (de) 1998-07-15
EP0853266A3 (de) 1998-12-23
CA2106187A1 (en) 1992-09-16
DE69233645D1 (de) 2006-09-21
DE69226264T2 (de) 1998-12-17
DE69232399D1 (de) 2002-03-14
DE69226265T2 (de) 1998-12-17
JP3256228B2 (ja) 2002-02-12
ATE212735T1 (de) 2002-02-15
JPH06506291A (ja) 1994-07-14
DE69232399T2 (de) 2002-09-26
WO1992016884A1 (en) 1992-10-01
DE69233645T2 (de) 2007-08-09
EP0853266B1 (de) 2002-01-30

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee