DE69227077D1 - Wellenleiterherstellung durch Bestrahlung von Siliziumoxyd mit Elektronen - Google Patents

Wellenleiterherstellung durch Bestrahlung von Siliziumoxyd mit Elektronen

Info

Publication number
DE69227077D1
DE69227077D1 DE69227077T DE69227077T DE69227077D1 DE 69227077 D1 DE69227077 D1 DE 69227077D1 DE 69227077 T DE69227077 T DE 69227077T DE 69227077 T DE69227077 T DE 69227077T DE 69227077 D1 DE69227077 D1 DE 69227077D1
Authority
DE
Germany
Prior art keywords
electrons
irradiation
silicon oxide
waveguide production
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69227077T
Other languages
English (en)
Other versions
DE69227077T2 (de
Inventor
Hisaharu Yanagawa
Ken Ueki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Publication of DE69227077D1 publication Critical patent/DE69227077D1/de
Application granted granted Critical
Publication of DE69227077T2 publication Critical patent/DE69227077T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
DE69227077T 1991-07-24 1992-07-22 Wellenleiterherstellung durch Bestrahlung von Siliziumoxyd mit Elektronen Expired - Fee Related DE69227077T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3184658A JPH0527132A (ja) 1991-07-24 1991-07-24 導波路型光部品の製造方法

Publications (2)

Publication Number Publication Date
DE69227077D1 true DE69227077D1 (de) 1998-10-29
DE69227077T2 DE69227077T2 (de) 1999-05-27

Family

ID=16157089

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69227077T Expired - Fee Related DE69227077T2 (de) 1991-07-24 1992-07-22 Wellenleiterherstellung durch Bestrahlung von Siliziumoxyd mit Elektronen

Country Status (5)

Country Link
US (1) US5291575A (de)
EP (1) EP0525606B1 (de)
JP (1) JPH0527132A (de)
CA (1) CA2074536C (de)
DE (1) DE69227077T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5365538A (en) * 1992-10-29 1994-11-15 The Charles Stark Draper Laboratory Inc. Slab waveguide pumped channel waveguide laser
DE69434548T2 (de) * 1993-03-18 2006-08-03 Nippon Telegraph And Telephone Corp. Herstellungsverfahren eines polyimiden optischen wellenleiters
DE19642964A1 (de) * 1996-10-18 1998-04-23 Happich Gmbh Gebr Airbagvorrichtung
FR2798222B1 (fr) * 1999-09-07 2002-03-01 Centre Nat Rech Scient Equipement et procede de fabrication de composants optiques
US7026634B2 (en) * 2001-06-28 2006-04-11 E-Beam & Light, Inc. Method and apparatus for forming optical materials and devices
US6778319B2 (en) * 2001-09-10 2004-08-17 Np Photonics, Inc. Side-pumped multi-port optical amplifier and method of manufacture using fiber drawing technologies
US6618537B2 (en) * 2002-01-14 2003-09-09 Applied Wdm, Inc. Optical waveguide structures and methods of fabrication
WO2006025064A2 (en) * 2004-09-02 2006-03-09 Ramot At Tel-Aviv University Ltd. Embedded channels, embedded waveguides and methods of manufacturing and using the same
US9994489B2 (en) 2014-12-30 2018-06-12 The Boeing Company Bonding dissimilar ceramic components
US20230393340A1 (en) * 2022-06-06 2023-12-07 Globalfoundries U.S. Inc. Cladding structure in the back end of line of photonics chips

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602906A (ja) * 1983-06-20 1985-01-09 Nippon Telegr & Teleph Corp <Ntt> フイルタ付光導波路の製造方法
US4831628A (en) * 1983-07-27 1989-05-16 American Telephone And Telegraph Company, At&T Bell Laboratories Denices fabricated using method of selective area epitaxial growth using ion beams
JPS6145202A (ja) * 1984-08-10 1986-03-05 Hitachi Ltd 光導波路
JPS61204603A (ja) * 1985-03-08 1986-09-10 Hitachi Ltd 高分子光導波路及びその製造方法
US4789642A (en) * 1987-03-26 1988-12-06 The United States Of America As Represented By The Secretary Of The Air Force Method for fabricating low loss crystalline silicon waveguides by dielectric implantation
US5178658A (en) * 1991-09-17 1993-01-12 The Charles Stark Draper Laboratory, Inc. Method for forming an optical waveguide by selective volatization

Also Published As

Publication number Publication date
CA2074536A1 (en) 1993-01-25
CA2074536C (en) 2002-04-23
DE69227077T2 (de) 1999-05-27
EP0525606A1 (de) 1993-02-03
US5291575A (en) 1994-03-01
EP0525606B1 (de) 1998-09-23
JPH0527132A (ja) 1993-02-05

Similar Documents

Publication Publication Date Title
DE68927542T2 (de) Herstellung von Siliciumstrukturen durch einseitigen Mehrschritt-Ätzprozess
AU2312877A (en) Reducing the switching time of semiconductor devices by nuclear irradiation
DE3576504D1 (de) Herstellung von ethylenoxid.
KR900009445A (ko) 산화아연위스커 및 그 제조방법
DE69025805D1 (de) Herstellen von Halbleitervorrichtungen
DE69232257D1 (de) Durch Verarmung kontrollierte Isolationsstufe
DE69227077D1 (de) Wellenleiterherstellung durch Bestrahlung von Siliziumoxyd mit Elektronen
KR880700888A (ko) 전자석에 의한 전기적 제어 세팅이 되는 자물쇠
DE69314077T2 (de) Herstellung von Oxid-Supraleitern mit grosser magnetischer Schwebekraft
DE3854358D1 (de) Supraleitendes Oxid.
DE69100720T2 (de) Magnetkerne durch verwendung von metallglasbändern und interlaminare isolierung mit mikapapier.
DE69133388D1 (de) Herstellungsmethode von Halbleiterstrukturen mit Qantumquellenleitungen
ATA158683A (de) Markraum-zementsperre
DE68914992D1 (de) Herstellung von durch nitratoalkyl substituierten cyclischen äthern.
DE59209378D1 (de) Herstellung von Metalloxidsolen durch Elektrolyse
KR900010845A (ko) 산화물 음극
AT382201B (de) Hebetor
IT7948896A0 (it) Ferrite dolce di litio-titanio-zinco e deflettore magnetico utilizzante una tale ferrite
ATE21293T1 (de) Mit hilfe von glas verkitteter magnetkopf und verfahren zu dessen herstellung.
DE3583208D1 (de) Halbleiteranordnung mit hoher durchbruchspannung.
DE68910873D1 (de) Herstellungsverfahren von Halbleitervorrichtungen.
PT80951A (de) Spule mit magnetisierbarem stiftkern
IT8520843A0 (it) Difosfoniti cicliche loro preparazione e applicazioni.
DE69324908T2 (de) Verbesserte herstellung von aluminiumoxid
BE829366A (fr) Dispositifs de controle d&#39;energie et leur fabrication

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee