DE69218667T2 - Verfahren zur Herstellung von Micromaschinen - Google Patents

Verfahren zur Herstellung von Micromaschinen

Info

Publication number
DE69218667T2
DE69218667T2 DE69218667T DE69218667T DE69218667T2 DE 69218667 T2 DE69218667 T2 DE 69218667T2 DE 69218667 T DE69218667 T DE 69218667T DE 69218667 T DE69218667 T DE 69218667T DE 69218667 T2 DE69218667 T2 DE 69218667T2
Authority
DE
Germany
Prior art keywords
micromachines
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69218667T
Other languages
English (en)
Other versions
DE69218667D1 (de
Inventor
Minoru Ueda
Michitomo Iiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14946391A external-priority patent/JPH04348822A/ja
Priority claimed from JP14946191A external-priority patent/JPH04348820A/ja
Priority claimed from JP14946291A external-priority patent/JPH04348821A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69218667D1 publication Critical patent/DE69218667D1/de
Publication of DE69218667T2 publication Critical patent/DE69218667T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00198—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/408—Oxides of copper or solid solutions thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/034—Electrical rotating micromachines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/035—Microgears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/037—Microtransmissions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/056—Rotation in a plane parallel to the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/775—High tc, above 30 k, superconducting material
    • Y10S505/785—Composition containing superconducting material and diverse nonsuperconducting material
DE69218667T 1991-05-24 1992-05-25 Verfahren zur Herstellung von Micromaschinen Expired - Lifetime DE69218667T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP14946391A JPH04348822A (ja) 1991-05-24 1991-05-24 微小機械の作製方法
JP14946191A JPH04348820A (ja) 1991-05-24 1991-05-24 微小機械の作製方法
JP14946291A JPH04348821A (ja) 1991-05-24 1991-05-24 微小機械の作製方法

Publications (2)

Publication Number Publication Date
DE69218667D1 DE69218667D1 (de) 1997-05-07
DE69218667T2 true DE69218667T2 (de) 1997-09-25

Family

ID=27319756

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218667T Expired - Lifetime DE69218667T2 (de) 1991-05-24 1992-05-25 Verfahren zur Herstellung von Micromaschinen

Country Status (4)

Country Link
US (1) US5366587A (de)
EP (1) EP0518112B1 (de)
CA (1) CA2069227C (de)
DE (1) DE69218667T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5351412A (en) * 1991-06-11 1994-10-04 International Business Machines Corporation Micro positioning device
US5789045A (en) * 1994-04-15 1998-08-04 The United States Of America As Represented By The Secretary Of The Air Force Microtubes devices based on surface tension and wettability
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US6059001A (en) * 1994-04-15 2000-05-09 The United States Of America As Represented By The Secretary Of The Air Force Apparatus for manufacturing microtubes with axially variable geometries
JP3503386B2 (ja) * 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
US6363712B1 (en) 1996-06-27 2002-04-02 The United States Of America As Represented By The United States Department Of Energy Gas-driven microturbine
US5868680A (en) * 1997-09-23 1999-02-09 The Regents Of The University Of California Quantitative characterization of fibrillatory spatiotemporal organization
US6802646B1 (en) * 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6171972B1 (en) 1998-03-17 2001-01-09 Rosemount Aerospace Inc. Fracture-resistant micromachined devices
US6036872A (en) * 1998-03-31 2000-03-14 Honeywell Inc. Method for making a wafer-pair having sealed chambers
US6215221B1 (en) * 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces
AU2002224007A1 (en) * 2000-11-22 2002-06-03 Flixel Ltd. Microelectromechanical display devices
ITRM20010243A1 (it) * 2001-05-09 2002-11-11 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
US6621184B1 (en) * 2001-09-07 2003-09-16 Cypress Semiconductor Corporation Substrate based pendulum motor
US6770997B2 (en) * 2002-08-29 2004-08-03 Harris Corporation Micro-electromechanical energy storage device
JP2009291293A (ja) * 2008-06-03 2009-12-17 Olympus Corp 積層構造体、光調節装置、及び積層構造体の製造方法
EP2309342A1 (de) * 2009-10-07 2011-04-13 Nivarox-FAR S.A. Freilauf-Triebfeder aus mikro-bearbeitbarem Material und ihr Herstellungsverfahren
EP3653567B1 (de) * 2018-11-19 2024-01-10 Sciosense B.V. Verfahren zur herstellung einer integrierten mems-wandlervorrichtung und integrierte mems-wandlervorrichtung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4943750A (en) * 1987-05-20 1990-07-24 Massachusetts Institute Of Technology Electrostatic micromotor
US4997521A (en) * 1987-05-20 1991-03-05 Massachusetts Institute Of Technology Electrostatic micromotor
US4851080A (en) * 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer
US5252881A (en) * 1988-12-14 1993-10-12 The Regents Of The University Of California Micro motors and method for their fabrication
US5180940A (en) * 1990-02-09 1993-01-19 Asulab S.A. Radial field electrostatic micromotor produced using a photolithographic micromanufacturing technique and a process for producing said micromotor
US5043043A (en) * 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor

Also Published As

Publication number Publication date
US5366587A (en) 1994-11-22
CA2069227C (en) 1996-10-22
EP0518112A1 (de) 1992-12-16
EP0518112B1 (de) 1997-04-02
CA2069227A1 (en) 1992-11-25
DE69218667D1 (de) 1997-05-07

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