DE69218665T2 - Verfahren zum Herstellen eines Substrats für supraleitende Mikrowellen-Komponenten - Google Patents

Verfahren zum Herstellen eines Substrats für supraleitende Mikrowellen-Komponenten

Info

Publication number
DE69218665T2
DE69218665T2 DE69218665T DE69218665T DE69218665T2 DE 69218665 T2 DE69218665 T2 DE 69218665T2 DE 69218665 T DE69218665 T DE 69218665T DE 69218665 T DE69218665 T DE 69218665T DE 69218665 T2 DE69218665 T2 DE 69218665T2
Authority
DE
Germany
Prior art keywords
producing
substrate
microwave components
superconducting microwave
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69218665T
Other languages
English (en)
Other versions
DE69218665D1 (de
Inventor
Takashi Matsuura
Kenjiro Higaki
Hideo Itozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69218665D1 publication Critical patent/DE69218665D1/de
Application granted granted Critical
Publication of DE69218665T2 publication Critical patent/DE69218665T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
DE69218665T 1991-05-20 1992-05-20 Verfahren zum Herstellen eines Substrats für supraleitende Mikrowellen-Komponenten Expired - Fee Related DE69218665T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3144023A JPH04342487A (ja) 1991-05-20 1991-05-20 超電導マイクロ波部品用基板の作製方法

Publications (2)

Publication Number Publication Date
DE69218665D1 DE69218665D1 (de) 1997-05-07
DE69218665T2 true DE69218665T2 (de) 1997-11-27

Family

ID=15352532

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218665T Expired - Fee Related DE69218665T2 (de) 1991-05-20 1992-05-20 Verfahren zum Herstellen eines Substrats für supraleitende Mikrowellen-Komponenten

Country Status (3)

Country Link
EP (1) EP0517560B1 (de)
JP (1) JPH04342487A (de)
DE (1) DE69218665T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090115060A1 (en) 2007-11-01 2009-05-07 Infineon Technologies Ag Integrated circuit device and method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2033137C (en) * 1989-12-22 1995-07-18 Kenjiro Higaki Microwave component and method for fabricating substrate for use in microwave component

Also Published As

Publication number Publication date
EP0517560A2 (de) 1992-12-09
JPH04342487A (ja) 1992-11-27
EP0517560B1 (de) 1997-04-02
DE69218665D1 (de) 1997-05-07
EP0517560A3 (en) 1993-03-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee