DE69216628D1 - Dampfbeschichtung - Google Patents

Dampfbeschichtung

Info

Publication number
DE69216628D1
DE69216628D1 DE69216628T DE69216628T DE69216628D1 DE 69216628 D1 DE69216628 D1 DE 69216628D1 DE 69216628 T DE69216628 T DE 69216628T DE 69216628 T DE69216628 T DE 69216628T DE 69216628 D1 DE69216628 D1 DE 69216628D1
Authority
DE
Germany
Prior art keywords
steam coating
steam
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69216628T
Other languages
English (en)
Other versions
DE69216628T2 (de
Inventor
Johan Nordlander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inreco AB
Original Assignee
Inreco AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inreco AB filed Critical Inreco AB
Application granted granted Critical
Publication of DE69216628D1 publication Critical patent/DE69216628D1/de
Publication of DE69216628T2 publication Critical patent/DE69216628T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69216628T 1991-02-06 1992-02-06 Dampfbeschichtung Expired - Lifetime DE69216628T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9100372A SE502384C2 (sv) 1991-02-06 1991-02-06 Förfarande för styckvis metallbeläggning av CD-skivor
PCT/SE1992/000070 WO1992013980A1 (en) 1991-02-06 1992-02-06 Vapour deposition

Publications (2)

Publication Number Publication Date
DE69216628D1 true DE69216628D1 (de) 1997-02-20
DE69216628T2 DE69216628T2 (de) 1997-07-31

Family

ID=20381834

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69216628T Expired - Lifetime DE69216628T2 (de) 1991-02-06 1992-02-06 Dampfbeschichtung

Country Status (6)

Country Link
EP (1) EP0604424B1 (de)
JP (1) JPH06505307A (de)
AU (1) AU1255092A (de)
DE (1) DE69216628T2 (de)
SE (1) SE502384C2 (de)
WO (1) WO1992013980A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103849837B (zh) * 2014-03-24 2016-02-10 四川虹视显示技术有限公司 一种蒸发源装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2821131C2 (de) * 1978-05-13 1986-02-06 Leybold-Heraeus GmbH, 5000 Köln Vakuumbeschichtungsanlage mit einer Kondensat-Auffangeinrichtung
US4406252A (en) * 1980-12-29 1983-09-27 Rockwell International Corporation Inductive heating arrangement for evaporating thin film alloy onto a substrate
GB8425917D0 (en) * 1984-10-13 1984-11-21 Metal Box Plc Evaporating metal
US4812101A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment

Also Published As

Publication number Publication date
EP0604424A1 (de) 1994-07-06
JPH06505307A (ja) 1994-06-16
EP0604424B1 (de) 1997-01-08
DE69216628T2 (de) 1997-07-31
WO1992013980A1 (en) 1992-08-20
SE9100372D0 (sv) 1991-02-06
AU1255092A (en) 1992-09-07
SE9100372L (sv) 1992-08-07
SE502384C2 (sv) 1995-10-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition