DE69215546D1 - Tetrahydropyranyloxystyrol Homopolymer und Verfahren zu seiner Herstellung - Google Patents

Tetrahydropyranyloxystyrol Homopolymer und Verfahren zu seiner Herstellung

Info

Publication number
DE69215546D1
DE69215546D1 DE69215546T DE69215546T DE69215546D1 DE 69215546 D1 DE69215546 D1 DE 69215546D1 DE 69215546 T DE69215546 T DE 69215546T DE 69215546 T DE69215546 T DE 69215546T DE 69215546 D1 DE69215546 D1 DE 69215546D1
Authority
DE
Germany
Prior art keywords
tetrahydropyranyloxystyrene
homopolymer
preparation
tetrahydropyranyloxystyrene homopolymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69215546T
Other languages
English (en)
Other versions
DE69215546T2 (de
Inventor
Osamu Watanabe
Motoyuki Yamada
Fujio Yagihashi
Minoru Takamizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE69215546D1 publication Critical patent/DE69215546D1/de
Application granted granted Critical
Publication of DE69215546T2 publication Critical patent/DE69215546T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F112/00—Homopolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F112/02—Monomers containing only one unsaturated aliphatic radical
    • C08F112/32—Monomers containing only one unsaturated aliphatic radical containing two or more rings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE1992615546 1991-01-11 1992-01-10 Tetrahydropyranyloxystyrol Homopolymer und Verfahren zu seiner Herstellung Expired - Fee Related DE69215546T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1389891A JPH04306204A (ja) 1991-01-11 1991-01-11 ポリ（テトラヒドロピラニルオキシスチレン）及びその製造方法

Publications (2)

Publication Number Publication Date
DE69215546D1 true DE69215546D1 (de) 1997-01-16
DE69215546T2 DE69215546T2 (de) 1997-06-19

Family

ID=11845990

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992615546 Expired - Fee Related DE69215546T2 (de) 1991-01-11 1992-01-10 Tetrahydropyranyloxystyrol Homopolymer und Verfahren zu seiner Herstellung

Country Status (3)

Country Link
EP (1) EP0494792B1 (de)
JP (1) JPH04306204A (de)
DE (1) DE69215546T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0723201A1 (de) * 1995-01-20 1996-07-24 Ocg Microelectronic Materials, Inc. Phenolharze mit säurelabilen Schutzgruppen
KR100220951B1 (ko) * 1996-12-20 1999-09-15 김영환 비닐 4-테트라히드로피라닐옥시벤잘-비닐 4-히드록시벤잘-비닐 테트라히드로피라닐에테르-비닐 아세테이트 공중합체, 비닐 4-테트라히드로피라닐옥시벤잘-비닐 테트라히드로피라닐에테르-비닐 아세테이트 공중합체 및 그들의 제조방법
US9587136B2 (en) 2013-10-08 2017-03-07 Wisconsin Alumni Research Foundation Block copolymers with high Flory-Huggins interaction parameters for block copolymer lithography

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3817012A1 (de) * 1988-05-19 1989-11-30 Basf Ag Positiv und negativ arbeitende strahlungsempfindliche gemische sowie verfahren zur herstellung von reliefmustern
DE4005212A1 (de) * 1990-02-20 1991-08-22 Basf Ag Strahlungsempfindliches gemisch

Also Published As

Publication number Publication date
EP0494792B1 (de) 1996-12-04
JPH04306204A (ja) 1992-10-29
EP0494792A1 (de) 1992-07-15
DE69215546T2 (de) 1997-06-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee