DE69210444T2 - Verfahren zum Herstellen eines Gleichstrom-Squids - Google Patents

Verfahren zum Herstellen eines Gleichstrom-Squids

Info

Publication number
DE69210444T2
DE69210444T2 DE69210444T DE69210444T DE69210444T2 DE 69210444 T2 DE69210444 T2 DE 69210444T2 DE 69210444 T DE69210444 T DE 69210444T DE 69210444 T DE69210444 T DE 69210444T DE 69210444 T2 DE69210444 T2 DE 69210444T2
Authority
DE
Germany
Prior art keywords
squid
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69210444T
Other languages
English (en)
Other versions
DE69210444D1 (de
DE69210444T3 (de
DE69210444T4 (de
Inventor
Nobuhiro Shimizu
Kazuo Chinone
Norio Chiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12321271&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69210444(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of DE69210444T2 publication Critical patent/DE69210444T2/de
Application granted granted Critical
Publication of DE69210444T4 publication Critical patent/DE69210444T4/de
Publication of DE69210444T3 publication Critical patent/DE69210444T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/816—Sputtering, including coating, forming, or etching
    • Y10S505/817—Sputtering, including coating, forming, or etching forming josephson element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/831—Static information storage system or device
    • Y10S505/832—Josephson junction type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/842—Measuring and testing
    • Y10S505/843—Electrical
    • Y10S505/845—Magnetometer
    • Y10S505/846—Magnetometer using superconductive quantum interference device, i.e. squid

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Measuring Magnetic Variables (AREA)
DE69210444T 1991-02-26 1992-02-11 Verfahren zum Herstellen eines Gleichstrom-Squids Expired - Lifetime DE69210444T3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3031073A JP2764115B2 (ja) 1991-02-26 1991-02-26 高感度磁場検出器の製造方法

Publications (3)

Publication Number Publication Date
DE69210444T2 true DE69210444T2 (de) 1996-09-05
DE69210444T4 DE69210444T4 (de) 1997-11-06
DE69210444T3 DE69210444T3 (de) 2002-10-24

Family

ID=12321271

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69210444A Expired - Fee Related DE69210444D1 (de) 1991-02-26 1992-02-11 Verfahren zum Herstellen eines Gleichstrom-Squids
DE69210444T Expired - Lifetime DE69210444T3 (de) 1991-02-26 1992-02-11 Verfahren zum Herstellen eines Gleichstrom-Squids

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69210444A Expired - Fee Related DE69210444D1 (de) 1991-02-26 1992-02-11 Verfahren zum Herstellen eines Gleichstrom-Squids

Country Status (4)

Country Link
US (1) US5306521A (de)
EP (1) EP0501220B2 (de)
JP (1) JP2764115B2 (de)
DE (2) DE69210444D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2964112B2 (ja) * 1992-08-11 1999-10-18 セイコーインスツルメンツ株式会社 直流駆動型超伝導量子干渉素子
JP3373260B2 (ja) * 1993-09-17 2003-02-04 セイコーインスツルメンツ株式会社 高感度磁場検出器
US5476719A (en) * 1994-08-17 1995-12-19 Trw Inc. Superconducting multi-layer microstrip structure for multi-chip modules and microwave circuits
DE4445700A1 (de) * 1994-12-21 1996-06-27 Forschungszentrum Juelich Gmbh Gradiometer
JP2909807B2 (ja) * 1995-11-22 1999-06-23 セイコーインスツルメンツ株式会社 超伝導量子干渉素子磁束計および非破壊検査装置
US6455849B1 (en) 1999-10-05 2002-09-24 The United States Of America As Represented By The Secretary Of Commerce Normal metal boundary conditions for multi-layer TES detectors
JP4820481B2 (ja) * 2000-09-13 2011-11-24 エスアイアイ・ナノテクノロジー株式会社 超伝導量子干渉素子
US20040191697A1 (en) * 2003-03-24 2004-09-30 Communications Research Laboratory Method for processing a niobium type thin film and method for manufacturing a superconducting integrated circuit
CN102944855B (zh) * 2012-10-16 2016-01-20 中国科学院上海微系统与信息技术研究所 一种全集成sbc超导量子干涉器件
JP6735619B2 (ja) * 2016-07-20 2020-08-05 日本電子株式会社 磁気共鳴測定用検出コイルの製造方法
CN112038479B (zh) * 2020-09-04 2022-06-24 中国科学院上海微系统与信息技术研究所 电感可调的超导量子器件及其制备方法
CN112068047B (zh) * 2020-09-14 2021-11-16 中国科学院上海微系统与信息技术研究所 一种改善超导量子器件emc性能的器件结构与制备方法
CN112305293B (zh) * 2020-09-27 2023-08-08 中国计量科学研究院 二阶梯度交叉耦合型squid电流传感器以及制备方法
CN112881772B (zh) * 2020-12-31 2023-08-25 中国计量科学研究院 Squid电流传感器以及制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3852795A (en) † 1973-01-03 1974-12-03 Ibm Josephson tunneling circuits with superconducting contacts
US4588947A (en) * 1983-12-30 1986-05-13 International Business Machines Corporation Integrated miniature DC SQUID susceptometer for measuring properties of very small samples
DE3769201D1 (de) † 1986-05-21 1991-05-16 Siemens Ag Squid-magnetometer fuer eine vorrichtung zur messung schwacher magnetfelder.
JPH01217981A (ja) * 1988-02-26 1989-08-31 Mitsubishi Electric Corp 超電導量子干渉素子
JPH01318981A (ja) * 1988-06-17 1989-12-25 Shimadzu Corp 一体化ｓｑｕｉｄ
US5077266A (en) † 1988-09-14 1991-12-31 Hitachi, Ltd. Method of forming weak-link josephson junction, and superconducting device employing the junction
JP2893714B2 (ja) † 1989-05-25 1999-05-24 株式会社日立製作所 薄膜型ｓｑｕｉｄ磁束計およびこれを用いた生体磁気計測装置
US5053834A (en) * 1990-08-31 1991-10-01 Quantum Magnetics, Inc. High symmetry dc SQUID system
JPH0834319B2 (ja) * 1990-09-07 1996-03-29 ダイキン工業株式会社 Ｓｑｕｉｄおよびその製造方法
US5055158A (en) * 1990-09-25 1991-10-08 International Business Machines Corporation Planarization of Josephson integrated circuit
US5142229A (en) * 1990-12-26 1992-08-25 Biomagnetic Technologies, Inc. Thin-film three-axis magnetometer and squid detectors for use therein

Also Published As

Publication number Publication date
DE69210444D1 (de) 1996-06-13
EP0501220A3 (en) 1993-01-20
US5306521A (en) 1994-04-26
EP0501220B1 (de) 1996-05-08
EP0501220B2 (de) 2002-03-27
EP0501220A2 (de) 1992-09-02
JPH04269681A (ja) 1992-09-25
DE69210444T3 (de) 2002-10-24
JP2764115B2 (ja) 1998-06-11
DE69210444T4 (de) 1997-11-06

Similar Documents

Publication Publication Date Title
DE69215614D1 (de) Verfahren zum Herstellen eines mehrschichtig geformten Gegenstandes
DE69217179T2 (de) Verfahren zum Herstellen eines Verbundschaumstoffgegenstandes
DE59406372D1 (de) Verfahren zum herstellen eines dredidimensionalen objekts
DE69133549D1 (de) Verfahren zum Herstellen eines Metallkontaktes
DE69409587T2 (de) Verfahren zum Spülen eines Katheters und Katheter
DE69327063D1 (de) Zahnbürste und verfahren zum herstellen einer zahnbürste
DE69119130D1 (de) Verfahren und Matrize zum Herstellen eines Formkörpers
DE59400189D1 (de) Verfahren zum Herstellen eines Metall-Keramik-Substrates
ATA136187A (de) Verfahren zum kontinuierlichen herstellen eines mischgarnes
DE69210444D1 (de) Verfahren zum Herstellen eines Gleichstrom-Squids
DE69222559T2 (de) Verfahren zum Herstellen eines Magnetkopfes und Magnetkopfgruppe hergestellt nach diesem Verfahren
DE69318459D1 (de) Verfahren zum Herstellen eines synthetischen Seismogramms
DE69214476D1 (de) Magnetkopf sowie Verfahren zum Herstellen eines derartigen Magnetkopfes
DE59508937D1 (de) Verfahren zum Herstellen eines Behälters
DE69210646D1 (de) Verfahren zum Herstellen eines mehrschichtigen geformten Gegenstandes
DE69220835T2 (de) Verfahren zum Herstellen eines mehrschichtig geformten Gegenstandes
DE59409429D1 (de) Verfahren zum Herstellen eines Metall-Keramik-Substrates
DE69213492D1 (de) Verfahren zum Herstellen eines Magnetkopfes und nach diesem Verfahren hergestellter Magnetkopf
DE69212420T2 (de) Verfahren zum Herstellen eines reibungsverschweissten Ventils
DE59408902D1 (de) Verfahren zum Herstellen eines rotationssymmetrischen Körpers
DE69121604T2 (de) Verfahren zum Herstellen eines Dünnfilmmagnetkopfes sowie nach diesem Verfahren herstellbarer Dünnfilmmagnetkopf
DE69225478T2 (de) Verfahren zum herstellen supraleitfähigen legierungen
DE69225816T2 (de) Verfahren zum Herstellen eines Farbfilters
DE69115387D1 (de) Verfahren zum Herstellen eines Glasgegenstandes
DE69512710T2 (de) Verfahren zum Herstellen eines Niobium-Zinn-Supraleiters