DE69206886T2 - Verfahren zur Reinigung von Wolframhexafluorid - Google Patents

Verfahren zur Reinigung von Wolframhexafluorid

Info

Publication number
DE69206886T2
DE69206886T2 DE69206886T DE69206886T DE69206886T2 DE 69206886 T2 DE69206886 T2 DE 69206886T2 DE 69206886 T DE69206886 T DE 69206886T DE 69206886 T DE69206886 T DE 69206886T DE 69206886 T2 DE69206886 T2 DE 69206886T2
Authority
DE
Germany
Prior art keywords
purification
tungsten hexafluoride
hexafluoride
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69206886T
Other languages
English (en)
Other versions
DE69206886D1 (de
Inventor
Takashi Suenaga
Mitsuya Ohashi
Takashi Yoneda
Yoshiyuki Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of DE69206886D1 publication Critical patent/DE69206886D1/de
Application granted granted Critical
Publication of DE69206886T2 publication Critical patent/DE69206886T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G41/00—Compounds of tungsten
    • C01G41/04—Halides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69206886T 1991-05-17 1992-04-08 Verfahren zur Reinigung von Wolframhexafluorid Expired - Fee Related DE69206886T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3113094A JP2848717B2 (ja) 1991-05-17 1991-05-17 ６フッ化タングステンの精製法

Publications (2)

Publication Number Publication Date
DE69206886D1 DE69206886D1 (de) 1996-02-01
DE69206886T2 true DE69206886T2 (de) 1996-05-23

Family

ID=14603333

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69206886T Expired - Fee Related DE69206886T2 (de) 1991-05-17 1992-04-08 Verfahren zur Reinigung von Wolframhexafluorid

Country Status (4)

Country Link
US (1) US5234679A (de)
EP (1) EP0516944B1 (de)
JP (1) JP2848717B2 (de)
DE (1) DE69206886T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001172020A (ja) 1999-12-16 2001-06-26 Stella Chemifa Corp 高純度六フッ化タングステンの精製方法
US7107530B2 (en) * 2002-08-26 2006-09-12 International Business Machines Corporation Method, system and program product for displaying a tooltip based on content within the tooltip
CN103922414B (zh) * 2014-04-30 2016-04-13 邯郸净化设备研究所 一种连续精馏纯化六氟化钨的方法及装置
US20220153606A1 (en) * 2019-03-25 2022-05-19 Central Glass Company, Limited Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride
CN114981481A (zh) * 2020-01-06 2022-08-30 中央硝子株式会社 金属材料、金属材料的制造方法、半导体处理装置的钝化方法、半导体器件的制造方法及已填充的容器的制造方法
CN114438472A (zh) * 2022-01-21 2022-05-06 亚芯半导体材料(江苏)有限公司 集成电路芯片用大尺寸超高纯钒溅射靶材及其制备工艺
CN114525485A (zh) * 2022-01-21 2022-05-24 亚芯半导体材料(江苏)有限公司 大尺寸高熵高纯度难熔金属合金溅射靶材及其制备工艺

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE327286B (de) * 1968-09-12 1970-08-17 Nordstjernan Rederi Ab
FR2091897B1 (de) * 1970-04-08 1973-08-10 Commissariat Energie Atomique
JPH02124723A (ja) * 1988-11-04 1990-05-14 Mitsui Toatsu Chem Inc 六弗化タングステンの精製方法

Also Published As

Publication number Publication date
EP0516944B1 (de) 1995-12-20
DE69206886D1 (de) 1996-02-01
US5234679A (en) 1993-08-10
EP0516944A1 (de) 1992-12-09
JPH04342423A (ja) 1992-11-27
JP2848717B2 (ja) 1999-01-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee