DE69203411D1 - Vorrichtung zum Transfer von Scheiben, insbesondere Silicon-Scheiben. - Google Patents

Vorrichtung zum Transfer von Scheiben, insbesondere Silicon-Scheiben.

Info

Publication number
DE69203411D1
DE69203411D1 DE69203411T DE69203411T DE69203411D1 DE 69203411 D1 DE69203411 D1 DE 69203411D1 DE 69203411 T DE69203411 T DE 69203411T DE 69203411 T DE69203411 T DE 69203411T DE 69203411 D1 DE69203411 D1 DE 69203411D1
Authority
DE
Germany
Prior art keywords
support
panes
plates
destination
original support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69203411T
Other languages
English (en)
Other versions
DE69203411T2 (de
Inventor
Franck Dalban-Moreynas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Photowatt International SA
Original Assignee
Photowatt International SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Photowatt International SA filed Critical Photowatt International SA
Publication of DE69203411D1 publication Critical patent/DE69203411D1/de
Application granted granted Critical
Publication of DE69203411T2 publication Critical patent/DE69203411T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chain Conveyers (AREA)
  • Specific Conveyance Elements (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Silicon Polymers (AREA)
  • Silicon Compounds (AREA)
  • Laminated Bodies (AREA)
  • Registering Or Overturning Sheets (AREA)
DE69203411T 1991-08-20 1992-08-20 Vorrichtung zum Transfer von Scheiben, insbesondere Silicon-Scheiben. Expired - Lifetime DE69203411T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9110447A FR2680503B1 (fr) 1991-08-20 1991-08-20 Dispositif de transfert de plaques, notamment de plaques de silicium.

Publications (2)

Publication Number Publication Date
DE69203411D1 true DE69203411D1 (de) 1995-08-17
DE69203411T2 DE69203411T2 (de) 1995-12-21

Family

ID=9416278

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69203411T Expired - Lifetime DE69203411T2 (de) 1991-08-20 1992-08-20 Vorrichtung zum Transfer von Scheiben, insbesondere Silicon-Scheiben.

Country Status (5)

Country Link
EP (1) EP0528736B1 (de)
AT (1) ATE125065T1 (de)
DE (1) DE69203411T2 (de)
ES (1) ES2074347T3 (de)
FR (1) FR2680503B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3075771A1 (fr) * 2017-12-21 2019-06-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Systeme de transfert de plusieurs plaques entre deux paniers
TWI680526B (zh) * 2018-06-06 2019-12-21 環球晶圓股份有限公司 晶圓轉換裝置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58178535A (ja) * 1982-04-13 1983-10-19 Nec Kyushu Ltd 半導体基板の移し替え装置

Also Published As

Publication number Publication date
ES2074347T3 (es) 1995-09-01
EP0528736A1 (de) 1993-02-24
FR2680503B1 (fr) 1997-07-11
DE69203411T2 (de) 1995-12-21
ATE125065T1 (de) 1995-07-15
EP0528736B1 (de) 1995-07-12
FR2680503A1 (fr) 1993-02-26

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Legal Events

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8364 No opposition during term of opposition
R071 Expiry of right

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