ES2074347T3 - Dispositivo de transferencia de placas, particularmente de placas de silicio. - Google Patents

Dispositivo de transferencia de placas, particularmente de placas de silicio.

Info

Publication number
ES2074347T3
ES2074347T3 ES92402314T ES92402314T ES2074347T3 ES 2074347 T3 ES2074347 T3 ES 2074347T3 ES 92402314 T ES92402314 T ES 92402314T ES 92402314 T ES92402314 T ES 92402314T ES 2074347 T3 ES2074347 T3 ES 2074347T3
Authority
ES
Spain
Prior art keywords
support
plates
destination
original support
original
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92402314T
Other languages
English (en)
Inventor
Franck Dalban-Moreynas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Photowatt International SA
Original Assignee
Photowatt International SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Photowatt International SA filed Critical Photowatt International SA
Application granted granted Critical
Publication of ES2074347T3 publication Critical patent/ES2074347T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Specific Conveyance Elements (AREA)
  • Chain Conveyers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Laminated Bodies (AREA)
  • Silicon Polymers (AREA)
  • Silicon Compounds (AREA)
  • Pile Receivers (AREA)

Abstract

LA INVENCION SE REFIERE A UN DISPOSITIVO DE TRANSFERENCIA DE PLACAS DE UN SOPORTE DE ORIGEN HACIA UN SOPORTE DE DESTINO, COMPRENDIENDO EL SOPORTE DE ORIGEN MEDIOS DE POSICIONADO QUE PERMITEN DISPONER LAS PLACAS AISLADAMENTE UNAS RESPECTO DE OTRAS SEGUN UNA SEPARACION DETERMINADA Y TRANSVERSALMENTE ENTRE DOS CARAS ABIERTAS DEL SOPORTE DE ORIGEN, COMPRENDIENDO EL SOPORTE DE DESTINO MEDIOS DE POSICIONADO QUE PERMITEN DISPONER LAS PLACAS AISLADAMENTE UNAS RESPECTO DE OTRAS A PARTIR DE UNA CARA ABIERTA SEGUN UNA SEPARACION IDENTICA O DIFERENTE DE LA DEL SOPORTE DE ORIGEN, COMPRENDIENDO EL DISPOSITIVO MEDIOS GUIA DE LAS PLACAS DISPUESTOS ENTRE UNA DE LAS DOS CARAS ABIERTAS DEL SOPORTE DE ORIGEN Y LA CARA ABIERTA DEL SOPORTE DE DESTINO, CARACTERIZADO EN QUE COMPRENDE ADEMAS UN PULSADOR MOVIL (16) QUE PERMITE EMPUJAR LA PLACAS (32) FUERA DE SU SOPORTE DE ORIGEN (1) HACIA SU SOPORTE DE DESTINO (5), ATRAVESANDO EL PULSADOR EN SU RECORRIDO DICHOS MEDIOS GUIA COMPUESTOS POR GUIAS DE DESLIZAMIENTO (14)DISPUESTAS POR AMBAS PARTES DEL ESPACIO DE CIRCULACION DEL PULSADOR (16) Y QUE ASEGURA LA CONTINUIDAD DE LA TRANSFERENCIA DE LAS PLACAS.
ES92402314T 1991-08-20 1992-08-20 Dispositivo de transferencia de placas, particularmente de placas de silicio. Expired - Lifetime ES2074347T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9110447A FR2680503B1 (fr) 1991-08-20 1991-08-20 Dispositif de transfert de plaques, notamment de plaques de silicium.

Publications (1)

Publication Number Publication Date
ES2074347T3 true ES2074347T3 (es) 1995-09-01

Family

ID=9416278

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92402314T Expired - Lifetime ES2074347T3 (es) 1991-08-20 1992-08-20 Dispositivo de transferencia de placas, particularmente de placas de silicio.

Country Status (5)

Country Link
EP (1) EP0528736B1 (es)
AT (1) ATE125065T1 (es)
DE (1) DE69203411T2 (es)
ES (1) ES2074347T3 (es)
FR (1) FR2680503B1 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3075771A1 (fr) * 2017-12-21 2019-06-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Systeme de transfert de plusieurs plaques entre deux paniers
TWI680526B (zh) * 2018-06-06 2019-12-21 環球晶圓股份有限公司 晶圓轉換裝置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58178535A (ja) * 1982-04-13 1983-10-19 Nec Kyushu Ltd 半導体基板の移し替え装置

Also Published As

Publication number Publication date
DE69203411D1 (de) 1995-08-17
EP0528736A1 (fr) 1993-02-24
FR2680503B1 (fr) 1997-07-11
DE69203411T2 (de) 1995-12-21
ATE125065T1 (de) 1995-07-15
EP0528736B1 (fr) 1995-07-12
FR2680503A1 (fr) 1993-02-26

Similar Documents

Publication Publication Date Title
DE69230983D1 (de) Informationsverarbeitungsvorrichtung
ATE311557T1 (de) Nockenvorrichtung
NO970207L (no) Anordning ved holderelement
ITRM910660A1 (it) Dispositivo di illuminazione per un microscopio operatorio.
DE69319631D1 (de) Bildübertragungsvorrichtung für Bilderzeugungsgerät
DE320985T1 (de) Senkrechte druckeinrichtung fuer elektrofotographisches geraet.
ES2074347T3 (es) Dispositivo de transferencia de placas, particularmente de placas de silicio.
DE69018257D1 (de) Fixiervorrichtung für thermotransferdrucker.
DK0498181T3 (da) Indretning til omstilling af optagelsesvoluminet af en emnebærer
DE69232679T2 (de) Halbleiterbauelement für hohe Durchbruchsspannungen
ATE205164T1 (de) System zum übergeben von flachen gegenständen
KR880700314A (ko) 시트 파일의 순환식 재정렬 장치
FR2679415B1 (fr) Dispositif pour empecher les volatiles de se poser.
ATE149699T1 (de) Vorlagenbühne und musterübertragungssystem hierfür
FR2677806B1 (fr) Dispositif interrupteur auxiliaire pour appareil interrupteur principal.
DE3872386T2 (de) Apparat fuer bewegte dokumente.
DE3878936D1 (de) Mittelspannungsschaltvorrichtung fuer hohe gleichstroeme.
KR950021451U (ko) 웨이퍼 이송장치의 리프트 시스템
DE69204864D1 (de) Ein-, Aus- und Umschaltvorrichtung für hohe Spannungen.
KR960042696A (ko) 자동 트레이 체인저의 트레이 클램프 이송장치
JPS6462267A (en) Printed circuit board holding device in carrierless soldering device
ATE24699T1 (de) Uebergabeeinrichtung fuer gegenstaende.
FR2625015B3 (fr) Dispositif pour exposer des affiches
SE8804703D0 (sv) Elkopplare
ES1011069Y (es) Dispositivo de fijacion para placas de vidrio.

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 528736

Country of ref document: ES