DE69128702D1 - Mikroelektronische Feldemissionsvorrichtung - Google Patents

Mikroelektronische Feldemissionsvorrichtung

Info

Publication number
DE69128702D1
DE69128702D1 DE69128702T DE69128702T DE69128702D1 DE 69128702 D1 DE69128702 D1 DE 69128702D1 DE 69128702 T DE69128702 T DE 69128702T DE 69128702 T DE69128702 T DE 69128702T DE 69128702 D1 DE69128702 D1 DE 69128702D1
Authority
DE
Germany
Prior art keywords
field emission
emission device
microelectronic field
microelectronic
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69128702T
Other languages
English (en)
Other versions
DE69128702T2 (de
Inventor
Akira Kaneko
Toru Kanno
Keiko Morishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP33241290A external-priority patent/JPH04206127A/ja
Priority claimed from JP6157491A external-priority patent/JP3156265B2/ja
Priority claimed from JP31049191A external-priority patent/JP2601085B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69128702D1 publication Critical patent/DE69128702D1/de
Publication of DE69128702T2 publication Critical patent/DE69128702T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J21/00—Vacuum tubes
    • H01J21/02—Tubes with a single discharge path
    • H01J21/06—Tubes with a single discharge path having electrostatic control means only
    • H01J21/10—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode
    • H01J21/105—Tubes with a single discharge path having electrostatic control means only with one or more immovable internal control electrodes, e.g. triode, pentode, octode with microengineered cathode and control electrodes, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
DE1991628702 1990-11-28 1991-11-28 Mikroelektronische Feldemissionsvorrichtung Expired - Fee Related DE69128702T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP33241290A JPH04206127A (ja) 1990-11-28 1990-11-28 機能性電子放出素子
JP33241190 1990-11-28
JP6157491A JP3156265B2 (ja) 1991-03-26 1991-03-26 機能性電子放出素子の製造方法
JP31049191A JP2601085B2 (ja) 1990-11-28 1991-11-26 機能性電子放出素子およびその製造方法

Publications (2)

Publication Number Publication Date
DE69128702D1 true DE69128702D1 (de) 1998-02-19
DE69128702T2 DE69128702T2 (de) 1998-04-23

Family

ID=27464057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991628702 Expired - Fee Related DE69128702T2 (de) 1990-11-28 1991-11-28 Mikroelektronische Feldemissionsvorrichtung

Country Status (2)

Country Link
EP (1) EP0490536B1 (de)
DE (1) DE69128702T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19609234A1 (de) * 1996-03-09 1997-09-11 Deutsche Telekom Ag Röhrensysteme und Herstellungsverfahren hierzu

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices

Also Published As

Publication number Publication date
EP0490536B1 (de) 1998-01-14
DE69128702T2 (de) 1998-04-23
EP0490536A1 (de) 1992-06-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee