DE69126684D1 - Vorrichtung zum Positionieren eines Maskenbandes in einer Maschine zum Metallisieren - Google Patents

Vorrichtung zum Positionieren eines Maskenbandes in einer Maschine zum Metallisieren

Info

Publication number
DE69126684D1
DE69126684D1 DE69126684T DE69126684T DE69126684D1 DE 69126684 D1 DE69126684 D1 DE 69126684D1 DE 69126684 T DE69126684 T DE 69126684T DE 69126684 T DE69126684 T DE 69126684T DE 69126684 D1 DE69126684 D1 DE 69126684D1
Authority
DE
Germany
Prior art keywords
positioning
masking tape
metallizing
machine
metallizing machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69126684T
Other languages
English (en)
Other versions
DE69126684T2 (de
Inventor
Andre Mounoussamy
Jean-Paul Bouchard
Thierry Feral
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THOMSON CSF PASSIVE COMPONENTS
Original Assignee
THOMSON CSF PASSIVE COMPONENTS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THOMSON CSF PASSIVE COMPONENTS filed Critical THOMSON CSF PASSIVE COMPONENTS
Publication of DE69126684D1 publication Critical patent/DE69126684D1/de
Application granted granted Critical
Publication of DE69126684T2 publication Critical patent/DE69126684T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)
DE69126684T 1990-05-11 1991-04-30 Vorrichtung zum Positionieren eines Maskenbandes in einer Maschine zum Metallisieren Expired - Fee Related DE69126684T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9005904A FR2662015B1 (fr) 1990-05-11 1990-05-11 Dispositif de positionnement de bandes-cache dans une machine de metallisation.

Publications (2)

Publication Number Publication Date
DE69126684D1 true DE69126684D1 (de) 1997-08-07
DE69126684T2 DE69126684T2 (de) 1997-10-23

Family

ID=9396521

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69126684T Expired - Fee Related DE69126684T2 (de) 1990-05-11 1991-04-30 Vorrichtung zum Positionieren eines Maskenbandes in einer Maschine zum Metallisieren

Country Status (7)

Country Link
US (1) US5211757A (de)
EP (1) EP0456556B1 (de)
JP (1) JPH04228558A (de)
CA (1) CA2041780A1 (de)
DE (1) DE69126684T2 (de)
ES (1) ES2106065T3 (de)
FR (1) FR2662015B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19527604A1 (de) * 1995-07-28 1997-01-30 Leybold Ag Verfahren und Vorrichtung zur Herstellung von metallfreien Streifen bei der Metallbedampfung
JPH09263932A (ja) * 1996-03-26 1997-10-07 Kureha Chem Ind Co Ltd 縞状パターンの形成方法およびこの方法に使用されるマスキング装置
US20070137568A1 (en) * 2005-12-16 2007-06-21 Schreiber Brian E Reciprocating aperture mask system and method
US7763114B2 (en) * 2005-12-28 2010-07-27 3M Innovative Properties Company Rotatable aperture mask assembly and deposition system
KR20090101738A (ko) * 2008-03-24 2009-09-29 삼성전기주식회사 진공증착장치 및 그 제어방법
FR3013739B1 (fr) * 2013-11-28 2016-01-01 Valeo Vision Procede et dispositif de revetement de piece automobile
CN112277347B (zh) * 2020-09-24 2022-05-27 铜陵市超越电子有限公司 抗氧化型金属化薄膜的制备装置及加工方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US407724A (en) * 1889-07-23 Grain-conveyer for harvesters
US2759594A (en) * 1955-01-17 1956-08-21 Petersen Oven Co Tensioning means for cable conveyor
US2957572A (en) * 1957-05-02 1960-10-25 Ferro Corp Multiple strand conveyor
GB1268376A (en) * 1968-06-06 1972-03-29 Stone Platt Crawley Ltd Former Improvements relating to conveyors
US3941646A (en) * 1972-09-25 1976-03-02 Byers Photo Equipment Company Apparatus for forming a tabbed film strip
US3866565A (en) * 1973-12-21 1975-02-18 David E U Ridout Vapor deposition apparatus with rotating drum mask
DE2744147A1 (de) * 1977-09-30 1979-04-12 Siemens Ag Verfahren zur herstellung von elektrischen schichtkondensatoren
JPS61261471A (ja) * 1985-05-13 1986-11-19 Sumitomo Electric Ind Ltd 部分被覆方法
IT1185177B (it) * 1985-07-03 1987-11-04 Metalvuoto Films Spa Dispositivo per realizzare film plastici metallizzati presentanti zone ben delimitate prive di metallizzazione
JPS6373654A (ja) * 1986-09-17 1988-04-04 Sumitomo Electric Ind Ltd リ−ドフレ−ムの製造方法

Also Published As

Publication number Publication date
DE69126684T2 (de) 1997-10-23
FR2662015B1 (fr) 1995-02-17
FR2662015A1 (fr) 1991-11-15
CA2041780A1 (fr) 1991-11-12
EP0456556B1 (de) 1997-07-02
JPH04228558A (ja) 1992-08-18
EP0456556A1 (de) 1991-11-13
ES2106065T3 (es) 1997-11-01
US5211757A (en) 1993-05-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee