DE69126616D1 - Verfahren zur herstellung von siliciumnitrid-gegenstände - Google Patents

Verfahren zur herstellung von siliciumnitrid-gegenstände

Info

Publication number
DE69126616D1
DE69126616D1 DE69126616T DE69126616T DE69126616D1 DE 69126616 D1 DE69126616 D1 DE 69126616D1 DE 69126616 T DE69126616 T DE 69126616T DE 69126616 T DE69126616 T DE 69126616T DE 69126616 D1 DE69126616 D1 DE 69126616D1
Authority
DE
Germany
Prior art keywords
items
silicon nitride
producing silicon
producing
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69126616T
Other languages
English (en)
Other versions
DE69126616T2 (de
Inventor
James Edler
Bohdan Lisowsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eaton Corp
Original Assignee
Eaton Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eaton Corp filed Critical Eaton Corp
Publication of DE69126616D1 publication Critical patent/DE69126616D1/de
Application granted granted Critical
Publication of DE69126616T2 publication Critical patent/DE69126616T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69126616T 1990-07-24 1991-07-23 Verfahren zur herstellung von siliciumnitrid-gegenstände Expired - Lifetime DE69126616T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/558,109 US5187129A (en) 1987-12-21 1990-07-24 Process for making silicon nitride and powders and articles made therefrom
PCT/US1991/005216 WO1992001653A1 (en) 1990-07-24 1991-07-23 Process for making silicon nitride articles

Publications (2)

Publication Number Publication Date
DE69126616D1 true DE69126616D1 (de) 1997-07-24
DE69126616T2 DE69126616T2 (de) 1998-01-15

Family

ID=24228248

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69126616T Expired - Lifetime DE69126616T2 (de) 1990-07-24 1991-07-23 Verfahren zur herstellung von siliciumnitrid-gegenstände

Country Status (6)

Country Link
US (1) US5187129A (de)
EP (1) EP0540683B1 (de)
JP (1) JP3345659B2 (de)
DE (1) DE69126616T2 (de)
ES (1) ES2104718T3 (de)
WO (1) WO1992001653A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0540689B1 (de) * 1990-07-24 1999-09-15 Eaton Corporation Verfahren zur nitridierung siliciumhaltiger materialien
WO1994017011A1 (en) * 1993-01-22 1994-08-04 Eaton Corporation Processes for preparing a base nitridable silicon-containing material and silicon nitride materials
JP2649220B2 (ja) * 1994-11-29 1997-09-03 本田技研工業株式会社 窒化珪素／炭化珪素複合粉末及び複合成形体並びにそれらの製造方法及び窒化珪素／炭化珪素複合焼結体の製造方法
EP0782542A1 (de) * 1994-07-05 1997-07-09 Eaton Corporation Verfahren zur nitridierung von silizium
WO1996020144A1 (fr) * 1994-12-28 1996-07-04 Sumitomo Electric Industries, Ltd. Nitrure de silicium fritte et son procede de production
US6793875B1 (en) 1997-09-24 2004-09-21 The University Of Connecticut Nanostructured carbide cermet powders by high energy ball milling
US6800364B2 (en) * 2002-06-28 2004-10-05 Ucar Carbon Company Inc. Isotropic pitch-based materials for thermal insulation
US20040041291A1 (en) * 2002-08-27 2004-03-04 Ucar Carbon Company Inc. Process of making carbon electrodes
US7763205B2 (en) * 2004-10-22 2010-07-27 Ceradyne, Inc. Continuous process for fabricating reaction bonded silicon nitride articles
CN113493191B (zh) * 2020-04-08 2022-11-22 新疆晶硕新材料有限公司 制备高纯度α-氮化硅粉的方法及高纯度α-氮化硅粉

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US779474A (en) * 1902-11-21 1905-01-10 John H Gruner Machine for cutting the shells of nuts.
US2268589A (en) * 1934-07-07 1942-01-06 Heany Ind Ceramic Corp Method of producing vitreous silica articles
US2869215A (en) * 1955-06-20 1959-01-20 Robert S Smith Molding method
NL121804C (de) * 1959-02-27
US3205080A (en) * 1964-10-19 1965-09-07 Nat Beryllia Corp Beryllia-silicon carbide ceramic bodies
GB1138284A (en) * 1966-02-09 1968-12-27 Nat Res Dev Spray deposition of silicon powder structures
US3819786A (en) * 1969-09-29 1974-06-25 Nat Res Dev Production of silicon nitride material components
US3991166A (en) * 1972-01-11 1976-11-09 Joseph Lucas (Industries) Limited Ceramic materials
JPS523647B2 (de) * 1972-10-24 1977-01-29
US3992497A (en) * 1973-05-18 1976-11-16 Westinghouse Electric Corporation Pressureless sintering silicon nitride powders
US4033400A (en) * 1973-07-05 1977-07-05 Eaton Corporation Method of forming a composite by infiltrating a porous preform
US3887412A (en) * 1973-12-20 1975-06-03 Ford Motor Co Method of making a triple density silicon nitride article
US4036653A (en) * 1975-05-28 1977-07-19 E. I. Du Pont De Nemours And Company Amorphous silicon nitride composition containing carbon, and vapor phase process
US4067943A (en) * 1975-07-18 1978-01-10 Ford Motor Company Method of manufacturing a slip cast article
JPS5830264B2 (ja) * 1975-10-18 1983-06-28 トウホクダイガク キンゾクザイリヨウケンキユウシヨチヨウ キンゾクチツカブツシヨウケツセイケイタイノセイゾウホウホウ
GB1556378A (en) * 1976-10-27 1979-11-21 Skf Uk Ltd Bearing cages
US4062102A (en) * 1975-12-31 1977-12-13 Silicon Material, Inc. Process for manufacturing a solar cell from a reject semiconductor wafer
US4119689A (en) * 1977-01-03 1978-10-10 General Electric Company Sintering of silicon nitride using Be additive
GB2010913B (en) * 1977-12-23 1982-06-23 Fiat Spa Process for sintering silicon nitride compacts
US4285895A (en) * 1979-03-23 1981-08-25 Ford Motor Company Method of densifying a reaction bonded silicon nitride article
US4235857A (en) * 1979-07-02 1980-11-25 Ford Motor Company Method of nitriding silicon
US4356136A (en) * 1980-08-29 1982-10-26 Ford Motor Company Method of densifying an article formed of reaction bonded silicon nitride
US4376742A (en) * 1981-02-23 1983-03-15 Systems Research Laboratories, Inc. Fugitive liquid phase densification of silicon nitride
JPS5881250A (ja) * 1981-11-07 1983-05-16 Honda Motor Co Ltd Ｖ型多気筒内燃機関におけるバランシング構造
FR2517665B1 (fr) * 1981-12-08 1986-01-31 Ceraver Procede de fabrication d'un materiau fritte a base de nitrure de silicium, et materiau obtenu par ce procede
US4377542A (en) * 1981-12-21 1983-03-22 Ford Motor Company Method of forming a densified silicon nitride article
US4388080A (en) * 1982-02-12 1983-06-14 Atlantic Richfield Company Process for recovery of high purity silicon
US4471060A (en) * 1983-07-08 1984-09-11 Ford Motor Company Method of forming a relatively stable slip of silicon metal particles and yttrium containing particles
US4443394A (en) * 1983-07-19 1984-04-17 Ford Motor Company Method of making a silicon nitride body from the Y2 O3 /SiO2 3 N4 /Al2 O3
US4519967A (en) * 1983-10-24 1985-05-28 Ford Motor Company Method of making a silicon metal containing article
JPS61236604A (ja) * 1985-04-11 1986-10-21 Toshiba Ceramics Co Ltd β−Ｓｉ↓３Ｎ↓４の合成方法
US4891342A (en) * 1985-11-20 1990-01-02 Kyocera Corporation Process for preparing a silicon nitride sintered body
JPS62153169A (ja) * 1985-12-25 1987-07-08 株式会社東芝 窒化ケイ素セラミツクス焼結体
JPS63123868A (ja) * 1986-11-10 1988-05-27 日産自動車株式会社 窒化珪素質焼結体の製造方法
US4781874A (en) * 1987-10-23 1988-11-01 Eaton Corporation Process for making silicon nitride articles
US4873210A (en) * 1987-12-02 1989-10-10 Gte Products Corporation Sialon containing high content of alpha prime phase
US4943401A (en) * 1987-12-21 1990-07-24 Eaton Corporation Process for making silicon nitride articles

Also Published As

Publication number Publication date
US5187129A (en) 1993-02-16
JPH05509074A (ja) 1993-12-16
EP0540683A1 (de) 1993-05-12
EP0540683A4 (en) 1993-11-18
ES2104718T3 (es) 1997-10-16
EP0540683B1 (de) 1997-06-18
JP3345659B2 (ja) 2002-11-18
DE69126616T2 (de) 1998-01-15
WO1992001653A1 (en) 1992-02-06

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