DE69123575D1 - Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm - Google Patents

Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm

Info

Publication number
DE69123575D1
DE69123575D1 DE69123575T DE69123575T DE69123575D1 DE 69123575 D1 DE69123575 D1 DE 69123575D1 DE 69123575 T DE69123575 T DE 69123575T DE 69123575 T DE69123575 T DE 69123575T DE 69123575 D1 DE69123575 D1 DE 69123575D1
Authority
DE
Germany
Prior art keywords
semiconductor film
infrared detector
thermal infrared
type thermal
bolometer type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69123575T
Other languages
English (en)
Other versions
DE69123575T2 (de
Inventor
Kevin Liddiard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth of Australia
Original Assignee
Commonwealth of Australia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=3774617&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69123575(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Commonwealth of Australia filed Critical Commonwealth of Australia
Application granted granted Critical
Publication of DE69123575D1 publication Critical patent/DE69123575D1/de
Publication of DE69123575T2 publication Critical patent/DE69123575T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI
DE69123575T 1990-04-26 1991-04-24 Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm Expired - Fee Related DE69123575T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPJ981390 1990-04-26
PCT/AU1991/000162 WO1991016607A1 (en) 1990-04-26 1991-04-24 Semiconductor film bolometer thermal infrared detector

Publications (2)

Publication Number Publication Date
DE69123575D1 true DE69123575D1 (de) 1997-01-23
DE69123575T2 DE69123575T2 (de) 1999-09-02

Family

ID=3774617

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123575T Expired - Fee Related DE69123575T2 (de) 1990-04-26 1991-04-24 Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm

Country Status (7)

Country Link
US (1) US5369280A (de)
EP (1) EP0526551B1 (de)
JP (1) JP3112680B2 (de)
CA (1) CA2081306C (de)
DE (1) DE69123575T2 (de)
HK (1) HK1007597A1 (de)
WO (1) WO1991016607A1 (de)

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US5626773A (en) * 1995-01-03 1997-05-06 Texas Instruments Incorporated Structure and method including dry etching techniques for forming an array of thermal sensitive elements
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US7176111B2 (en) * 1997-03-28 2007-02-13 Interuniversitair Microelektronica Centrum (Imec) Method for depositing polycrystalline SiGe suitable for micromachining and devices obtained thereof
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US6551857B2 (en) 1997-04-04 2003-04-22 Elm Technology Corporation Three dimensional structure integrated circuits
DE19758939B4 (de) * 1997-08-14 2014-07-03 Excelitas Technologies Singapore Pte Ltd Verfahren zur Herstellung eines Substrats, Sensorsystem
DE19735379B4 (de) 1997-08-14 2008-06-05 Perkinelmer Optoelectronics Gmbh Sensorsystem und Herstellungsverfahren
FI105598B (fi) * 1997-12-10 2000-09-15 Vaisala Oyj Optisesti musta pinta ja menetelmä sen valmistamiseksi
FR2773215B1 (fr) * 1997-12-31 2000-01-28 Commissariat Energie Atomique Detecteur thermique bolometrique
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US6160257A (en) * 1998-07-06 2000-12-12 The United States Of America As Represented By The Secretary Of The Army Hybridized biological microbolometer
US6259096B1 (en) * 1998-09-18 2001-07-10 The United States Of America As Represented By The Secretary Of The Army Guanine Cytosine (GC)-rich DNA/PNA microbolometer
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US6300632B1 (en) 1999-10-14 2001-10-09 The Regents Of The University Of Michigan Uncooled infrared focal plane imager and microelectromechanical infrared detector for use therein
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JP3497797B2 (ja) * 2000-03-30 2004-02-16 株式会社東芝 赤外線センサの製造方法
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AUPQ897600A0 (en) * 2000-07-25 2000-08-17 Liddiard, Kevin Active or self-biasing micro-bolometer infrared detector
EP1178294A1 (de) * 2000-08-04 2002-02-06 Ecole Polytechnique Federale De Lausanne Pyroelektrischer Sensor mit verminderter parasitärer thermischer Kopplung zwischen seinen Pixeln
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Also Published As

Publication number Publication date
CA2081306C (en) 2000-07-18
EP0526551B1 (de) 1996-12-11
EP0526551A1 (de) 1993-02-10
US5369280A (en) 1994-11-29
JP3112680B2 (ja) 2000-11-27
HK1007597A1 (en) 1999-04-16
DE69123575T2 (de) 1999-09-02
WO1991016607A1 (en) 1991-10-31
CA2081306A1 (en) 1991-10-27
JPH05507144A (ja) 1993-10-14
EP0526551A4 (en) 1993-06-30

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Legal Events

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8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee