DE69119678D1 - Automatisches optisches Belichtungsgerät - Google Patents

Automatisches optisches Belichtungsgerät

Info

Publication number
DE69119678D1
DE69119678D1 DE69119678T DE69119678T DE69119678D1 DE 69119678 D1 DE69119678 D1 DE 69119678D1 DE 69119678 T DE69119678 T DE 69119678T DE 69119678 T DE69119678 T DE 69119678T DE 69119678 D1 DE69119678 D1 DE 69119678D1
Authority
DE
Germany
Prior art keywords
exposure device
automatic optical
optical exposure
automatic
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69119678T
Other languages
English (en)
Other versions
DE69119678T2 (de
Inventor
Yoshio Yazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69119678D1 publication Critical patent/DE69119678D1/de
Publication of DE69119678T2 publication Critical patent/DE69119678T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE1991619678 1990-08-27 1991-08-19 Automatisches optisches Belichtungsgerät Expired - Fee Related DE69119678T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2224659A JP2552197B2 (ja) 1990-08-27 1990-08-27 自動露光装置および投入ステージ

Publications (2)

Publication Number Publication Date
DE69119678D1 true DE69119678D1 (de) 1996-06-27
DE69119678T2 DE69119678T2 (de) 1996-10-02

Family

ID=16817195

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991619678 Expired - Fee Related DE69119678T2 (de) 1990-08-27 1991-08-19 Automatisches optisches Belichtungsgerät

Country Status (3)

Country Link
EP (1) EP0476837B1 (de)
JP (1) JP2552197B2 (de)
DE (1) DE69119678T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113027A1 (de) * 1991-04-20 1992-10-22 Leitz Messtechnik Verfahren und vorrichtung zur fotolithographischen herstellung von langen gittermassstaeben
JP2009174638A (ja) 2008-01-24 2009-08-06 Jtekt Corp 樹脂製プーリ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261249A (ja) * 1987-04-18 1988-10-27 Dainippon Screen Mfg Co Ltd シ−ト状物の真空吸着装置
JPH0766192B2 (ja) * 1988-05-30 1995-07-19 株式会社オーク製作所 自動露光装置におけるワーク位置決め方法

Also Published As

Publication number Publication date
JPH04106551A (ja) 1992-04-08
DE69119678T2 (de) 1996-10-02
EP0476837A1 (de) 1992-03-25
JP2552197B2 (ja) 1996-11-06
EP0476837B1 (de) 1996-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee