DE69115353D1 - Laserbearbeitungsgerät und dessen Verfahren - Google Patents

Laserbearbeitungsgerät und dessen Verfahren

Info

Publication number
DE69115353D1
DE69115353D1 DE69115353T DE69115353T DE69115353D1 DE 69115353 D1 DE69115353 D1 DE 69115353D1 DE 69115353 T DE69115353 T DE 69115353T DE 69115353 T DE69115353 T DE 69115353T DE 69115353 D1 DE69115353 D1 DE 69115353D1
Authority
DE
Germany
Prior art keywords
processing device
laser processing
laser
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69115353T
Other languages
English (en)
Other versions
DE69115353T2 (de
Inventor
Tateoki Miyauchi
Shigenobu Maruyama
Katsurou Mizukoshi
Mikio Hongo
Koyo Morita
Kaoru Katayama
Minoru Suzuki
Kazuo Mera
Haruhisa Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2138195A external-priority patent/JP2880252B2/ja
Priority claimed from JP3065962A external-priority patent/JP2817430B2/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69115353D1 publication Critical patent/DE69115353D1/de
Application granted granted Critical
Publication of DE69115353T2 publication Critical patent/DE69115353T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
DE69115353T 1990-05-30 1991-05-28 Laserbearbeitungsgerät und dessen Verfahren Expired - Fee Related DE69115353T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2138195A JP2880252B2 (ja) 1990-05-30 1990-05-30 レーザ加工装置及びその方法
JP3065962A JP2817430B2 (ja) 1991-03-29 1991-03-29 レーザ応用装置

Publications (2)

Publication Number Publication Date
DE69115353D1 true DE69115353D1 (de) 1996-01-25
DE69115353T2 DE69115353T2 (de) 1996-05-09

Family

ID=26407126

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69115353T Expired - Fee Related DE69115353T2 (de) 1990-05-30 1991-05-28 Laserbearbeitungsgerät und dessen Verfahren

Country Status (3)

Country Link
US (1) US5229569A (de)
EP (1) EP0459394B1 (de)
DE (1) DE69115353T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2689254B1 (fr) * 1992-03-31 1994-12-23 Commissariat Energie Atomique Dispositif de focalisation d'un faisceau lumineux.
US5645740A (en) * 1993-11-01 1997-07-08 Naiman; Charles S. System and assemblage for producing microtexturized substrates and implants
ES2122873B1 (es) * 1995-06-02 1999-08-01 Tecnologico Robotiker Centro Dispositivo perfeccionado para facilitar las operaciones de programacion de robots.
JP4011643B2 (ja) * 1996-01-05 2007-11-21 キヤノン株式会社 半導体製造装置
KR100446052B1 (ko) * 1997-05-15 2004-10-14 스미도모쥬기가이고교 가부시키가이샤 다수의갈바노스캐너를사용한레이저빔가공장치
US5986805A (en) * 1998-02-12 1999-11-16 Trw Inc. Polarizer/modulator assembly for lasers
JP4514861B2 (ja) * 1999-11-29 2010-07-28 株式会社半導体エネルギー研究所 レーザ照射装置およびレーザ照射方法および半導体装置の作製方法
US6848295B2 (en) * 2002-04-17 2005-02-01 Wayne State University Acoustic wave sensor apparatus, method and system using wide bandgap materials
US7043129B2 (en) * 2000-06-16 2006-05-09 Wayne State University Wide bandgap semiconductor waveguide structures
US6642477B1 (en) 2001-10-23 2003-11-04 Imra America, Inc. Method for laser drilling a counter-tapered through-hole in a material
US6853075B2 (en) * 2003-01-28 2005-02-08 Wayne State University Self-assembled nanobump array stuctures and a method to fabricate such structures
US20040144927A1 (en) * 2003-01-28 2004-07-29 Auner Gregory W. Microsystems arrays for digital radiation imaging and signal processing and method for making microsystem arrays
AU2003223648A1 (en) * 2002-04-17 2003-11-03 Wayne State University Wide bandgap digital radiation imaging array
US6930274B2 (en) * 2003-03-26 2005-08-16 Siemens Vdo Automotive Corporation Apparatus and method of maintaining a generally constant focusing spot size at different average laser power densities
JP4762653B2 (ja) * 2005-09-16 2011-08-31 浜松ホトニクス株式会社 レーザ加工方法及びレーザ加工装置
US20070073354A1 (en) 2005-09-26 2007-03-29 Knudson Mark B Neural blocking therapy
DE102006023321B4 (de) * 2006-05-18 2011-08-18 Coherent Lambda Physik GmbH, 37079 System zur Fokusüberwachung bei der Bearbeitung eines reflektierenden Substrates mittels eines Laserstrahls
US8255057B2 (en) 2009-01-29 2012-08-28 Nevro Corporation Systems and methods for producing asynchronous neural responses to treat pain and/or other patient conditions
US9862057B2 (en) 2012-12-12 2018-01-09 United Technologies Corporation Vacuum degassing laser-blocking material system and process
US20160236296A1 (en) * 2015-02-13 2016-08-18 Gold Nanotech Inc Nanoparticle Manufacturing System

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3571748A (en) * 1968-04-04 1971-03-23 Charles J Koester Method and apparatus for directing output of optical masers
US4097715A (en) * 1977-05-16 1978-06-27 General Refractories Company Laser jet bell kiln
JPS58135788A (ja) * 1982-02-09 1983-08-12 Hitachi Ltd レ−ザ加工装置
JPH0766910B2 (ja) * 1984-07-26 1995-07-19 新技術事業団 半導体単結晶成長装置
DE3610401A1 (de) * 1985-03-28 1987-02-12 Sumitomo Electric Industries Halbleiterelement und verfahren zu dessen herstellung und gegenstand, in dem dieses element verwendet wird
JPS62212091A (ja) * 1986-03-12 1987-09-18 Toshiba Corp レ−ザ加工装置
US4749840A (en) * 1986-05-16 1988-06-07 Image Micro Systems, Inc. Intense laser irradiation using reflective optics

Also Published As

Publication number Publication date
EP0459394B1 (de) 1995-12-13
US5229569A (en) 1993-07-20
EP0459394A3 (en) 1993-01-20
EP0459394A2 (de) 1991-12-04
DE69115353T2 (de) 1996-05-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee