DE69111038D1 - Beschleunigungsmesser. - Google Patents

Beschleunigungsmesser.

Info

Publication number
DE69111038D1
DE69111038D1 DE69111038T DE69111038T DE69111038D1 DE 69111038 D1 DE69111038 D1 DE 69111038D1 DE 69111038 T DE69111038 T DE 69111038T DE 69111038 T DE69111038 T DE 69111038T DE 69111038 D1 DE69111038 D1 DE 69111038D1
Authority
DE
Germany
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69111038T
Other languages
English (en)
Other versions
DE69111038T2 (de
Inventor
Steven Beringhause
Iii Donald W Rolph
Raymond E Mandeville
Siegbert Hartauer
Vaclav F Vilimek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69111038D1 publication Critical patent/DE69111038D1/de
Application granted granted Critical
Publication of DE69111038T2 publication Critical patent/DE69111038T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69111038T 1990-12-21 1991-12-19 Beschleunigungsmesser. Expired - Fee Related DE69111038T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/631,563 US5412986A (en) 1990-12-21 1990-12-21 Accelerometer with improved strain gauge sensing means

Publications (2)

Publication Number Publication Date
DE69111038D1 true DE69111038D1 (de) 1995-08-10
DE69111038T2 DE69111038T2 (de) 1995-12-21

Family

ID=24531748

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111038T Expired - Fee Related DE69111038T2 (de) 1990-12-21 1991-12-19 Beschleunigungsmesser.

Country Status (4)

Country Link
US (1) US5412986A (de)
EP (1) EP0492986B1 (de)
JP (1) JPH04301770A (de)
DE (1) DE69111038T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05215769A (ja) * 1992-02-06 1993-08-24 Nec Corp 半導体加速度センサ
GB2266151B (en) * 1992-03-25 1996-09-11 Fuji Electric Co Ltd Semiconductor acceleration sensor
US5665915A (en) * 1992-03-25 1997-09-09 Fuji Electric Co., Ltd. Semiconductor capacitive acceleration sensor
JP2831195B2 (ja) * 1992-03-25 1998-12-02 富士電機株式会社 半導体加速度センサ
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
JPH07325104A (ja) * 1994-06-01 1995-12-12 Zexel Corp 加速度センサ
JPH0821841A (ja) * 1994-07-06 1996-01-23 Canon Inc 微小変位素子及びこれを用いた情報処理装置
JP3429073B2 (ja) * 1994-07-15 2003-07-22 本田技研工業株式会社 半導体加速度センサ
JPH08122359A (ja) * 1994-10-21 1996-05-17 Fuji Electric Co Ltd 半導体加速度センサとその製造方法および試験方法
US6247364B1 (en) * 1997-10-27 2001-06-19 Thomas P. Kicher & Co. Acceleration transducer and method
CA2254538C (en) 1998-11-26 2006-02-07 Canpolar East Inc. Collision deformation sensor for use in the crush zone of a vehicle
CA2254535C (en) 1998-11-26 2003-10-28 Canpolar East Inc. Sensor for detection of acceleration and attitude within a vehicle
US6115261A (en) * 1999-06-14 2000-09-05 Honeywell Inc. Wedge mount for integrated circuit sensors
US6725165B1 (en) 2000-08-10 2004-04-20 Autoliv Asp, Inc. Weight measurement system, method and weight sensor
CA2366030A1 (en) * 2001-12-20 2003-06-20 Global E Bang Inc. Profiling system
US20070121423A1 (en) * 2001-12-20 2007-05-31 Daniel Rioux Head-mounted display apparatus for profiling system
US6909985B2 (en) * 2002-11-27 2005-06-21 Lockheed Martin Corporation Method and apparatus for recording changes associated with acceleration of a structure
GB2424076B (en) * 2003-12-05 2007-03-28 Commw Of Australia Strain gauge
US7331230B2 (en) * 2003-12-24 2008-02-19 Hitachi Metals, Ltd. Semiconductor-type three-axis acceleration sensor
TWI277735B (en) * 2004-09-30 2007-04-01 Hitachi Metals Ltd Semiconductor acceleration sensor
JP2006275896A (ja) * 2005-03-30 2006-10-12 Yokohama Rubber Co Ltd:The 半導体加速度センサ
US7318349B2 (en) * 2005-06-04 2008-01-15 Vladimir Vaganov Three-axis integrated MEMS accelerometer
JP2007322188A (ja) * 2006-05-31 2007-12-13 Oki Electric Ind Co Ltd Ｍｅｍｓデバイス
US7594440B2 (en) * 2006-10-05 2009-09-29 Endevco Corporation Highly sensitive piezoresistive element
TW200827286A (en) * 2006-12-28 2008-07-01 Sunonwealth Electr Mach Ind Co Component layout design for micro scratch drive actuator
US7849745B2 (en) * 2007-09-26 2010-12-14 Intel Corporation Ultra-low noise MEMS piezoelectric accelerometers
JP2014504364A (ja) * 2010-12-08 2014-02-20 マイクロファイン・マテリアルズ・テクノロジーズ・ピーティーイー・リミテッド 高性能湾曲加速度計
CN102298073A (zh) * 2011-04-01 2011-12-28 北京大学 一种mems微加速度传感器及其应用
WO2014175521A1 (ko) * 2013-04-24 2014-10-30 부산대학교 산학협력단 압저항체를 이용한 가속도계
RU2682090C1 (ru) * 2017-12-11 2019-03-14 Публичное акционерное общество Арзамасское научно-производственное предприятие "ТЕМП-АВИА" Электронный преобразователь акселерометра

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3327270A (en) * 1965-01-06 1967-06-20 Pneumo Dynamics Corp Semi-conductor sensing assembly
GB1300118A (en) * 1970-03-11 1972-12-20 Ferranti Ltd Improvements relating to semiconductor strain transducers
US3805377A (en) * 1973-04-18 1974-04-23 Itt Method of making a transducer
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
US4488445A (en) * 1983-10-28 1984-12-18 Honeywell Inc. Integrated silicon accelerometer with cross-axis compensation
US4691568A (en) * 1985-12-09 1987-09-08 Motorola, Inc. Semi-conductor accelerometer
EP0312605A4 (en) * 1987-04-24 1992-06-17 Kabushiki Kaisha Nexy Kenkyusho Detector for force, acceleration and magnetism using resistor element
DE3740688A1 (de) * 1987-12-01 1989-06-15 Messerschmitt Boelkow Blohm Mikromechanischer beschleunigungssensor mit hoher achsenselektivitaet
DE68910641T2 (de) * 1988-09-23 1994-04-28 Automotive Systems Lab Selbsteichender Beschleunigungsmesser.

Also Published As

Publication number Publication date
EP0492986A2 (de) 1992-07-01
JPH04301770A (ja) 1992-10-26
EP0492986A3 (en) 1992-12-09
US5412986A (en) 1995-05-09
DE69111038T2 (de) 1995-12-21
EP0492986B1 (de) 1995-07-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee