DE69110734D1 - Verfahren zur Herstellung von hexamethylcyclotrisilazan. - Google Patents

Verfahren zur Herstellung von hexamethylcyclotrisilazan.

Info

Publication number
DE69110734D1
DE69110734D1 DE69110734T DE69110734T DE69110734D1 DE 69110734 D1 DE69110734 D1 DE 69110734D1 DE 69110734 T DE69110734 T DE 69110734T DE 69110734 T DE69110734 T DE 69110734T DE 69110734 D1 DE69110734 D1 DE 69110734D1
Authority
DE
Germany
Prior art keywords
hexamethylcyclotrisilazane
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69110734T
Other languages
English (en)
Other versions
DE69110734T2 (de
Inventor
Hiromi Ohsaki
Yoshihumi Shin-Etsu Che Takeda
Toshinobu Ishihara
Akira Hayashida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE69110734D1 publication Critical patent/DE69110734D1/de
Application granted granted Critical
Publication of DE69110734T2 publication Critical patent/DE69110734T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/21—Cyclic compounds having at least one ring containing silicon, but no carbon in the ring

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
DE69110734T 1990-04-20 1991-04-19 Verfahren zur Herstellung von hexamethylcyclotrisilazan. Expired - Fee Related DE69110734T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2104888A JP2793008B2 (ja) 1990-04-20 1990-04-20 ヘキサメチルシクロトリシラザンの製造方法

Publications (2)

Publication Number Publication Date
DE69110734D1 true DE69110734D1 (de) 1995-08-03
DE69110734T2 DE69110734T2 (de) 1995-11-23

Family

ID=14392715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69110734T Expired - Fee Related DE69110734T2 (de) 1990-04-20 1991-04-19 Verfahren zur Herstellung von hexamethylcyclotrisilazan.

Country Status (4)

Country Link
US (1) US5075474A (de)
EP (1) EP0452960B1 (de)
JP (1) JP2793008B2 (de)
DE (1) DE69110734T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2626336B2 (ja) * 1991-08-22 1997-07-02 信越化学工業株式会社 ヘキサメチルシクロトリシラザンの製造方法
JP3446291B2 (ja) * 1993-10-29 2003-09-16 信越化学工業株式会社 ヘキサメチルシクロトリシラザンの製造方法
CN112552334A (zh) * 2020-12-08 2021-03-26 江西贝特利新材料有限公司 一种六甲基环三硅氮烷的制备方法
CN114634525A (zh) * 2020-12-16 2022-06-17 江西贝特利新材料有限公司 一种四甲基环四硅氧烷的制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE682526A (de) * 1965-06-15 1966-12-14
GB1324846A (en) * 1969-10-31 1973-07-25 Dow Corning Ltd Organosilicon compounds
DE2101207A1 (de) * 1970-01-13 1971-07-22 Midland Silicones Ltd., Reading, Berkshire (Großbritannien) Cyclische Stickstoff enthaltende Organosihciumverbindungen
GB1330134A (en) * 1970-01-13 1973-09-12 Dow Corning Ltd Preparation of nitrogen-containing organosilicon compounds
SU368267A1 (ru) * 1971-04-12 1973-01-26 Способ получения гексаметилциклотрисилазана
US4412080A (en) * 1982-08-16 1983-10-25 General Electric Company Methods for preparing cyclopolysiloxanes
US4577039A (en) * 1985-07-15 1986-03-18 Petrarch Systems Inc. Method of preparing hexamethylcyclotrisilazane
US4855469A (en) * 1988-11-09 1989-08-08 Dow Corning Corporation Preparation of cycloorganotrisilazanes

Also Published As

Publication number Publication date
US5075474A (en) 1991-12-24
EP0452960B1 (de) 1995-06-28
EP0452960A3 (en) 1992-02-12
EP0452960A2 (de) 1991-10-23
JPH045294A (ja) 1992-01-09
JP2793008B2 (ja) 1998-09-03
DE69110734T2 (de) 1995-11-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee