DE69108169T2 - Reinigungsapparat. - Google Patents

Reinigungsapparat.

Info

Publication number
DE69108169T2
DE69108169T2 DE69108169T DE69108169T DE69108169T2 DE 69108169 T2 DE69108169 T2 DE 69108169T2 DE 69108169 T DE69108169 T DE 69108169T DE 69108169 T DE69108169 T DE 69108169T DE 69108169 T2 DE69108169 T2 DE 69108169T2
Authority
DE
Germany
Prior art keywords
purifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69108169T
Other languages
English (en)
Other versions
DE69108169D1 (de
Inventor
Reiji C O Tokyo Spec Wir Ikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO SPECIAL WIRE NETTING CO
Original Assignee
TOKYO SPECIAL WIRE NETTING CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO SPECIAL WIRE NETTING CO filed Critical TOKYO SPECIAL WIRE NETTING CO
Publication of DE69108169D1 publication Critical patent/DE69108169D1/de
Application granted granted Critical
Publication of DE69108169T2 publication Critical patent/DE69108169T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)
DE69108169T 1990-10-23 1991-10-22 Reinigungsapparat. Expired - Fee Related DE69108169T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28565690 1990-10-23

Publications (2)

Publication Number Publication Date
DE69108169D1 DE69108169D1 (de) 1995-04-20
DE69108169T2 true DE69108169T2 (de) 1995-07-20

Family

ID=17694361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69108169T Expired - Fee Related DE69108169T2 (de) 1990-10-23 1991-10-22 Reinigungsapparat.

Country Status (3)

Country Link
US (1) US5241976A (de)
EP (1) EP0482890B1 (de)
DE (1) DE69108169T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2701872B1 (fr) * 1993-02-23 1995-04-07 Air Liquide Procédé de traitement d'objets à l'aide d'un liquide volatil inflammable.
JP3390245B2 (ja) * 1993-06-01 2003-03-24 富士通株式会社 洗浄液及び洗浄方法
US5520204A (en) * 1995-01-26 1996-05-28 Branson Ultrasonics Corporation Vapor degreasing apparatus
US6039059A (en) 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
US6049993A (en) * 1997-10-14 2000-04-18 Global Solutions, Inc. System for adapting a dry cleaner machine to the use of hydrocarbon-based cleaning fluids
DE102004025528B4 (de) * 2004-05-25 2010-03-04 Eisenmann Anlagenbau Gmbh & Co. Kg Verfahren und Vorrichtung zum Trocknen von beschichteten Gegenständen
TWI352628B (en) * 2006-07-21 2011-11-21 Akrion Technologies Inc Nozzle for use in the megasonic cleaning of substr
WO2014018564A1 (en) 2012-07-23 2014-01-30 Zieger Claus Dieter Multiple proportion delivery systems and methods
CN114534292B (zh) * 2022-03-08 2024-04-16 湖南汇虹试剂有限公司 一种超净无水乙醇制备用蒸发设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2028759A (en) * 1931-09-30 1936-01-28 James H Bell Treatment with solvents
US3144872A (en) * 1963-08-16 1964-08-18 Detrex Chem Ind Trough-type solvent washer
US3893893A (en) * 1971-10-01 1975-07-08 Silresim Chemical Corp Apparatus for the recovery of trichlorethylene from oil waste
FR2418034A1 (fr) * 1978-02-28 1979-09-21 Sagem Perfectionnements apportes aux appareils pour le traitement de surfaces impliquant l'utilisation d'au moins un solvant
SE440719B (sv) * 1983-06-17 1985-08-12 Holmstrands Plaatindustri Ab Sett och anordning vid rengoring av kretskort, som tidigare underkastats en lodningsoperation med flussmedel
FR2556083B1 (fr) * 1983-10-11 1986-04-25 Piezo Ceram Electronique Machine perfectionnee de chauffage d'un article ou produit par condensation de vapeur sur celui-ci
US4736758A (en) * 1985-04-15 1988-04-12 Wacom Co., Ltd. Vapor drying apparatus
CA2003859A1 (en) * 1989-02-01 1990-08-01 David Alan Dickinson Technique for cleaning an object with a combustible cleaning solvent
US5045120A (en) * 1989-03-06 1991-09-03 Electrovert Ltd. Method for cleaning electronic and other devices
US5113882A (en) * 1990-08-28 1992-05-19 Electrovert Ltd. Method of cleaning workpieces with a potentially flammable or explosive liquid and drying in the tunnel
US5143103A (en) * 1991-01-04 1992-09-01 International Business Machines Corporation Apparatus for cleaning and drying workpieces

Also Published As

Publication number Publication date
EP0482890B1 (de) 1995-03-15
EP0482890A1 (de) 1992-04-29
US5241976A (en) 1993-09-07
DE69108169D1 (de) 1995-04-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee