DE69107813T2 - Ventil, Methode zur Herstellung dises Ventils und mit diesem Ventil versehene Mikropumpe. - Google Patents

Ventil, Methode zur Herstellung dises Ventils und mit diesem Ventil versehene Mikropumpe.

Info

Publication number
DE69107813T2
DE69107813T2 DE1991607813 DE69107813T DE69107813T2 DE 69107813 T2 DE69107813 T2 DE 69107813T2 DE 1991607813 DE1991607813 DE 1991607813 DE 69107813 T DE69107813 T DE 69107813T DE 69107813 T2 DE69107813 T2 DE 69107813T2
Authority
DE
Germany
Prior art keywords
valve
pct
membrane
sec
tension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1991607813
Other languages
English (en)
Other versions
DE69107813D1 (de
Inventor
Lintel Harald Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Debiotech SA
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH2302/90A external-priority patent/CH683634A5/fr
Priority claimed from CH3680/90A external-priority patent/CH684209A5/fr
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Publication of DE69107813D1 publication Critical patent/DE69107813D1/de
Application granted granted Critical
Publication of DE69107813T2 publication Critical patent/DE69107813T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • F04B53/109Valves; Arrangement of valves inlet and outlet valve forming one unit
    • F04B53/1092Valves; Arrangement of valves inlet and outlet valve forming one unit and one single element forming both the inlet and outlet closure member
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005Lift valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015Diaphragm or membrane valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0055Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0073Fabrication methods specifically adapted for microvalves
    • F16K2099/0074Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/0086Medical applications
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/0086Medical applications
    • F16K2099/0088Implanted devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K2099/0082Microvalves adapted for a particular use
    • F16K2099/0094Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7837Direct response valves [i.e., check valve type]
    • Y10T137/7879Resilient material valve
    • Y10T137/7888With valve member flexing about securement
    • Y10T137/7891Flap or reed

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Medicinal Preparation (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
DE1991607813 1990-07-10 1991-07-03 Ventil, Methode zur Herstellung dises Ventils und mit diesem Ventil versehene Mikropumpe. Expired - Fee Related DE69107813T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH2302/90A CH683634A5 (fr) 1990-07-10 1990-07-10 Clapet intégré et micropompe comprenant un tel clapet.
CH3680/90A CH684209A5 (fr) 1990-11-20 1990-11-20 Clapet intégré et micropompe comprenant un tel clapet.
PCT/EP1991/001240 WO1992001160A1 (en) 1990-07-10 1991-07-03 Valve and micropump incorporating said valve

Publications (2)

Publication Number Publication Date
DE69107813D1 DE69107813D1 (de) 1995-04-06
DE69107813T2 true DE69107813T2 (de) 1995-11-09

Family

ID=25690063

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991607813 Expired - Fee Related DE69107813T2 (de) 1990-07-10 1991-07-03 Ventil, Methode zur Herstellung dises Ventils und mit diesem Ventil versehene Mikropumpe.

Country Status (9)

Country Link
US (1) US5277556A (de)
EP (1) EP0491026B1 (de)
JP (1) JP2824975B2 (de)
AT (1) ATE119241T1 (de)
AU (1) AU642285B2 (de)
CA (1) CA2065735A1 (de)
DE (1) DE69107813T2 (de)
ES (1) ES2069896T3 (de)
WO (1) WO1992001160A1 (de)

Families Citing this family (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4006152A1 (de) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe
US5264375A (en) * 1992-04-15 1993-11-23 Massachusetts Institute Of Technology Superconducting detector and method of making same
US6049158A (en) * 1994-02-14 2000-04-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
FR2730551A1 (fr) * 1995-02-14 1996-08-14 Westonbridge Int Ltd Procede de raccordement etanche entre un organe mecanique et la paroi en verre d'un composant
US6227809B1 (en) * 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
US20050100946A1 (en) * 1995-06-29 2005-05-12 Affymetrix, Inc. Integrated nucleic acid diagnostic device and method for in-situ confocal microscopy
US6168948B1 (en) 1995-06-29 2001-01-02 Affymetrix, Inc. Miniaturized genetic analysis systems and methods
US5856174A (en) * 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
US20020022261A1 (en) * 1995-06-29 2002-02-21 Anderson Rolfe C. Miniaturized genetic analysis systems and methods
US5583281A (en) * 1995-07-07 1996-12-10 The Regents Of The University Of California Microminiature gas chromatograph
US6227824B1 (en) 1995-09-15 2001-05-08 HAN-SCHICKARD-GESELLSCHAFT FüR ANGEWANDTE FORSCHUNG E.V. Fluid pump without non-return valves
US20020068357A1 (en) * 1995-09-28 2002-06-06 Mathies Richard A. Miniaturized integrated nucleic acid processing and analysis device and method
US5876190A (en) * 1996-01-03 1999-03-02 Buchi Labortechnik Ag Vacuum membrane pump and a head portion for a vacuum membrane pump
CH691196A9 (fr) * 1996-03-15 2001-11-30 Consismetric Sa Procede de mesure de caracteristiques viscoelastiques de substances ou de melanges et appareillage de mesure pour la mise en oeuvre du procede.
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US20060000722A1 (en) * 1996-06-28 2006-01-05 Caliper Life Sciences, Inc. High throughput screening assay systems in microscale fluidic devices
CA2258489C (en) 1996-06-28 2004-01-27 Caliper Technologies Corporation High-throughput screening assay systems in microscale fluidic devices
US5699157A (en) * 1996-07-16 1997-12-16 Caliper Technologies Corp. Fourier detection of species migrating in a microchannel
WO1998026179A1 (de) * 1996-12-11 1998-06-18 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Mikroejektionspumpe
DE19802367C1 (de) * 1997-02-19 1999-09-23 Hahn Schickard Ges Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben
WO1998045481A1 (en) 1997-04-04 1998-10-15 Caliper Technologies Corporation Closed-loop biochemical analyzers
US5960825A (en) * 1997-06-26 1999-10-05 Copeland Corporation Laser hardened reed valve
DE69813569T2 (de) * 1997-08-20 2004-04-08 Westonbridge International Ltd., Wellington Quay Mikropumpe mit einem einlasssteuerorgan zum selbstansaugen
US7485263B2 (en) * 1997-08-26 2009-02-03 Eppendorf Ag Microproportioning system
US6074725A (en) * 1997-12-10 2000-06-13 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US7070577B1 (en) 1998-02-02 2006-07-04 Medtronic, Inc Drive circuit having improved energy efficiency for implantable beneficial agent infusion or delivery device
WO1999038551A1 (en) * 1998-02-02 1999-08-05 Medtronic, Inc. Implantable drug infusion device having a safety valve
US6247908B1 (en) 1998-03-05 2001-06-19 Seiko Instruments Inc. Micropump
US6132685A (en) 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
JP3620316B2 (ja) * 1998-11-16 2005-02-16 株式会社日立製作所 マイクロポンプとその製造方法
US6044862A (en) * 1999-02-16 2000-04-04 Copeland Corporation Compressor reed valve
US6303343B1 (en) 1999-04-06 2001-10-16 Caliper Technologies Corp. Inefficient fast PCR
US6164334A (en) * 1999-04-27 2000-12-26 Copeland Corporation Reed valve retention
EP1185871A4 (de) 1999-06-01 2003-01-15 Caliper Techn Corp Assays im kleinstformat und mikrofluidische vorrichtungen für aktivitäten von transportern, gradienten und bindungsassays
US20030168396A1 (en) * 1999-12-08 2003-09-11 Jacobson James D. Monolithic filter body and fabrication technique
US6982058B2 (en) * 1999-12-08 2006-01-03 Baxter International, Inc. Method for fabricating three dimensional structures
CA2361930A1 (en) 1999-12-08 2001-06-14 Baxter International Inc. Microporous filter membrane, method of making microporous filter membrane and separator employing microporous filter membranes
US6589229B1 (en) 2000-07-31 2003-07-08 Becton, Dickinson And Company Wearable, self-contained drug infusion device
US20090118139A1 (en) 2000-11-07 2009-05-07 Caliper Life Sciences, Inc. Microfluidic method and system for enzyme inhibition activity screening
FR2817974B1 (fr) * 2000-12-12 2003-09-12 Commissariat Energie Atomique Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique
EP1350029B1 (de) * 2001-01-08 2014-09-10 President and Fellows of Harvard College Ventile und pumpen für mikrofluidsysteme und verfahren zur herstellung von mikrofluidsystemen
US20050143789A1 (en) * 2001-01-30 2005-06-30 Whitehurst Todd K. Methods and systems for stimulating a peripheral nerve to treat chronic pain
US7723123B1 (en) 2001-06-05 2010-05-25 Caliper Life Sciences, Inc. Western blot by incorporating an affinity purification zone
US6852492B2 (en) * 2001-09-24 2005-02-08 Intel Corporation Nucleic acid sequencing by raman monitoring of uptake of precursors during molecular replication
GB0123054D0 (en) 2001-09-25 2001-11-14 Randox Lab Ltd Passive microvalve
US7247274B1 (en) 2001-11-13 2007-07-24 Caliper Technologies Corp. Prevention of precipitate blockage in microfluidic channels
US20040073175A1 (en) * 2002-01-07 2004-04-15 Jacobson James D. Infusion system
AU2003228277B2 (en) 2002-03-05 2006-06-29 Caliper Life Sciences, Inc. Mixed mode microfluidic systems
US7303727B1 (en) 2002-03-06 2007-12-04 Caliper Life Sciences, Inc Microfluidic sample delivery devices, systems, and methods
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
US6976590B2 (en) * 2002-06-24 2005-12-20 Cytonome, Inc. Method and apparatus for sorting particles
US9943847B2 (en) 2002-04-17 2018-04-17 Cytonome/St, Llc Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
US6808075B2 (en) 2002-04-17 2004-10-26 Cytonome, Inc. Method and apparatus for sorting particles
US8241883B2 (en) 2002-04-24 2012-08-14 Caliper Life Sciences, Inc. High throughput mobility shift
US6718817B1 (en) * 2002-11-22 2004-04-13 Chung-Shan Institute Of Science And Technology Sample injection device for gas chromatography
CA2510166A1 (en) 2002-12-20 2004-09-30 Caliper Life Sciences, Inc. Single molecule amplification and detection of dna
US20050042639A1 (en) * 2002-12-20 2005-02-24 Caliper Life Sciences, Inc. Single molecule amplification and detection of DNA length
US8275554B2 (en) * 2002-12-20 2012-09-25 Caliper Life Sciences, Inc. System for differentiating the lengths of nucleic acids of interest in a sample
US7040877B2 (en) * 2003-02-25 2006-05-09 Copeland Corporation Compressor valve plate
US6823891B2 (en) 2003-02-25 2004-11-30 Copeland Corporation Compressor suction reed valve
US6840271B2 (en) * 2003-02-25 2005-01-11 Copeland Corporation Compressor discharge valve retainer
US7249529B2 (en) * 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
US20050214197A1 (en) * 2003-09-17 2005-09-29 Molecular Nanosystems, Inc. Methods for producing and using catalytic substrates for carbon nanotube growth
US7235159B2 (en) * 2003-09-17 2007-06-26 Molecular Nanosystems, Inc. Methods for producing and using catalytic substrates for carbon nanotube growth
US20050147979A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Nucleic acid sequencing by Raman monitoring of uptake of nucleotides during molecular replication
DE102004016443B3 (de) * 2004-04-03 2005-08-18 Codman Neuro Sciences Sàrl Ventil
US9260693B2 (en) 2004-12-03 2016-02-16 Cytonome/St, Llc Actuation of parallel microfluidic arrays
US20060194724A1 (en) * 2005-02-25 2006-08-31 Whitehurst Todd K Methods and systems for nerve regeneration
US8141844B2 (en) * 2005-10-26 2012-03-27 Codman NeuroSciences Sàrl Flow rate accuracy of a fluidic delivery system
US8240635B2 (en) * 2005-10-26 2012-08-14 Codman Neuro Sciences Sárl Flow rate accuracy of a fluidic delivery system
US8007267B2 (en) * 2005-11-02 2011-08-30 Affymetrix, Inc. System and method for making lab card by embossing
US8075852B2 (en) * 2005-11-02 2011-12-13 Affymetrix, Inc. System and method for bubble removal
US20080038714A1 (en) * 2005-11-02 2008-02-14 Affymetrix, Inc. Instrument to Pneumatically Control Lab Cards and Method Thereof
US20070099288A1 (en) * 2005-11-02 2007-05-03 Affymetrix, Inc. Microfluidic Methods, Devices, and Systems for Fluid Handling
US20080311585A1 (en) * 2005-11-02 2008-12-18 Affymetrix, Inc. System and method for multiplex liquid handling
TWI302941B (en) * 2005-12-01 2008-11-11 Ind Tech Res Inst Microflow coverage ratio control device
US7909928B2 (en) * 2006-03-24 2011-03-22 The Regents Of The University Of Michigan Reactive coatings for regioselective surface modification
JP4793442B2 (ja) * 2006-03-29 2011-10-12 株式会社村田製作所 マイクロポンプ
EP2029781A4 (de) 2006-05-26 2010-06-30 Althea Technologies Inc Biochemische analyse partitionierter zellen
US7947148B2 (en) * 2006-06-01 2011-05-24 The Regents Of The University Of Michigan Dry adhesion bonding
US20090318307A1 (en) * 2006-07-27 2009-12-24 Koninklijke Philips Electronics N.V. Device for molecular diagnosis
US8202267B2 (en) * 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US20080161754A1 (en) * 2006-12-29 2008-07-03 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US8399047B2 (en) * 2007-03-22 2013-03-19 The Regents Of The Univeristy Of Michigan Multifunctional CVD coatings
DE102007045637A1 (de) * 2007-09-25 2009-04-02 Robert Bosch Gmbh Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums
US20090186344A1 (en) * 2008-01-23 2009-07-23 Caliper Life Sciences, Inc. Devices and methods for detecting and quantitating nucleic acids using size separation of amplicons
US8708961B2 (en) * 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
EP2286125B1 (de) 2008-05-16 2015-07-08 President and Fellows of Harvard College Ventile und andere durchflussregulierende vorrichtungen im fuidsystemen insbesonder microfluidsystemen
US20110065101A1 (en) * 2009-06-04 2011-03-17 Lockheed Martin Corporation Multiple-sample microfluidic chip for DNA analysis
DE102010032799B4 (de) * 2010-04-09 2013-11-21 Albert-Ludwigs-Universität Freiburg Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe
US8961764B2 (en) 2010-10-15 2015-02-24 Lockheed Martin Corporation Micro fluidic optic design
KR101197208B1 (ko) * 2011-06-29 2012-11-02 한국과학기술원 마이크로 펌프 및 그 구동 방법
US9322054B2 (en) 2012-02-22 2016-04-26 Lockheed Martin Corporation Microfluidic cartridge
EP3155264A4 (de) * 2014-06-13 2018-01-24 Formulatrix, Inc. Flüssigkeitsabgabesystem einer in-ovo-injektionsvorrichtung
WO2017112023A2 (en) 2015-10-19 2017-06-29 Massachusetts Institute Of Technology Solid state pump using elecro-rheological fluid
US20170118962A1 (en) * 2015-10-29 2017-05-04 Zoetis Services Llc Fluid agitation system of an in ovo injection apparatus, and associated method
CN107246376A (zh) * 2017-07-12 2017-10-13 浙江卡韦德新能源科技有限公司 柴油发动机尾气处理尿素泵的膜片总成
US11982377B1 (en) * 2021-11-08 2024-05-14 Meta Platforms Technologies, Llc Fluidic devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH224189A (de) * 1940-01-05 1942-11-15 Rueti Vorm Caspar Honegger A G Verfahren zum Weben von Stoffbahnen auf Webstühlen.
AU633104B2 (en) * 1989-06-14 1993-01-21 Debiotech S.A. Improved micro-pump

Also Published As

Publication number Publication date
AU642285B2 (en) 1993-10-14
JP2824975B2 (ja) 1998-11-18
ES2069896T3 (es) 1995-05-16
DE69107813D1 (de) 1995-04-06
US5277556A (en) 1994-01-11
WO1992001160A1 (en) 1992-01-23
JPH05502083A (ja) 1993-04-15
ATE119241T1 (de) 1995-03-15
AU8184191A (en) 1992-02-04
CA2065735A1 (en) 1992-01-11
EP0491026B1 (de) 1995-03-01
EP0491026A1 (de) 1992-06-24

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