DE69102781T2 - Diazodisulfone. - Google Patents

Diazodisulfone.

Info

Publication number
DE69102781T2
DE69102781T2 DE69102781T DE69102781T DE69102781T2 DE 69102781 T2 DE69102781 T2 DE 69102781T2 DE 69102781 T DE69102781 T DE 69102781T DE 69102781 T DE69102781 T DE 69102781T DE 69102781 T2 DE69102781 T2 DE 69102781T2
Authority
DE
Germany
Prior art keywords
diazodisulfones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69102781T
Other languages
English (en)
Other versions
DE69102781D1 (de
Inventor
Fumiyoshi Urano
Masaaki Nakahata
Hirotoshi Fujie
Keiji Oono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Wako Pure Chemical Corp
Original Assignee
Wako Pure Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wako Pure Chemical Industries Ltd filed Critical Wako Pure Chemical Industries Ltd
Application granted granted Critical
Publication of DE69102781D1 publication Critical patent/DE69102781D1/de
Publication of DE69102781T2 publication Critical patent/DE69102781T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/36—Single-purpose machines or devices
    • B24B5/37—Single-purpose machines or devices for grinding rolls, e.g. barrel-shaped rolls

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Materials For Photolithography (AREA)
DE69102781T 1990-01-30 1991-01-24 Diazodisulfone. Expired - Lifetime DE69102781T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019614A JPH03223863A (ja) 1990-01-30 1990-01-30 レジスト材料

Publications (2)

Publication Number Publication Date
DE69102781D1 DE69102781D1 (de) 1994-08-18
DE69102781T2 true DE69102781T2 (de) 1995-03-16

Family

ID=12004063

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69102781T Expired - Lifetime DE69102781T2 (de) 1990-01-30 1991-01-24 Diazodisulfone.

Country Status (4)

Country Link
EP (1) EP0440375B1 (de)
JP (1) JPH03223863A (de)
KR (1) KR0166365B1 (de)
DE (1) DE69102781T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216135A (en) 1990-01-30 1993-06-01 Wako Pure Chemical Industries, Ltd. Diazodisulfones
JP2500533B2 (ja) * 1990-01-30 1996-05-29 和光純薬工業株式会社 新規なジアゾジスルホン化合物
EP0919867B1 (de) * 1997-11-28 2003-05-21 Infineon Technologies AG Chemisch verstärkter Resist für die Elektronenstrahllithographie
JP3955384B2 (ja) 1998-04-08 2007-08-08 Ａｚエレクトロニックマテリアルズ株式会社 化学増幅型レジスト組成物
AU2001238706A1 (en) 2000-02-27 2001-09-03 Shipley Company, L.L.C. Photoacid generators and photoresists comprising same
KR20010095756A (ko) * 2000-04-11 2001-11-07 우재영 신규한 비스(메틸-할로-페닐술포닐)다이아조메탄류 화합물및 그의 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3332936A (en) * 1962-09-28 1967-07-25 Du Pont Bis(phenylsulfonyl)diazomethanes and their preparation
GB1231789A (de) * 1967-09-05 1971-05-12

Also Published As

Publication number Publication date
EP0440375B1 (de) 1994-07-13
EP0440375A1 (de) 1991-08-07
KR910014345A (ko) 1991-08-31
KR0166365B1 (ko) 1999-03-20
JPH03223863A (ja) 1991-10-02
DE69102781D1 (de) 1994-08-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition