DE69033932D1 - Verfahren zum selektiven Ätzen - Google Patents
Verfahren zum selektiven ÄtzenInfo
- Publication number
- DE69033932D1 DE69033932D1 DE69033932T DE69033932T DE69033932D1 DE 69033932 D1 DE69033932 D1 DE 69033932D1 DE 69033932 T DE69033932 T DE 69033932T DE 69033932 T DE69033932 T DE 69033932T DE 69033932 D1 DE69033932 D1 DE 69033932D1
- Authority
- DE
- Germany
- Prior art keywords
- etching method
- selective etching
- selective
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/398,116 US4923564A (en) | 1989-08-24 | 1989-08-24 | Selective etching process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE69033932D1 true DE69033932D1 (de) | 2002-04-18 |
Family
ID=23574047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69033932T Expired - Lifetime DE69033932D1 (de) | 1989-08-24 | 1990-08-17 | Verfahren zum selektiven Ätzen |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4923564A (de) |
| EP (1) | EP0414457B1 (de) |
| JP (1) | JPH0666309B2 (de) |
| CA (1) | CA2023712C (de) |
| DE (1) | DE69033932D1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5406194A (en) * | 1992-09-21 | 1995-04-11 | At&T Corp. | Alx Ga1-x as probe for use in electro-optic sampling |
| US6187515B1 (en) * | 1998-05-07 | 2001-02-13 | Trw Inc. | Optical integrated circuit microbench system |
| TWI629720B (zh) | 2015-09-30 | 2018-07-11 | 東京威力科創股份有限公司 | 用於濕蝕刻製程之溫度的動態控制之方法及設備 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7505134A (nl) * | 1975-05-01 | 1976-11-03 | Philips Nv | Werkwijze voor het vervaardigen van een half- geleiderinrichting. |
-
1989
- 1989-08-24 US US07/398,116 patent/US4923564A/en not_active Expired - Lifetime
-
1990
- 1990-08-17 DE DE69033932T patent/DE69033932D1/de not_active Expired - Lifetime
- 1990-08-17 EP EP90309073A patent/EP0414457B1/de not_active Expired - Lifetime
- 1990-08-21 CA CA002023712A patent/CA2023712C/en not_active Expired - Fee Related
- 1990-08-24 JP JP2221446A patent/JPH0666309B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0666309B2 (ja) | 1994-08-24 |
| EP0414457B1 (de) | 2002-03-13 |
| JPH0391242A (ja) | 1991-04-16 |
| US4923564A (en) | 1990-05-08 |
| EP0414457A1 (de) | 1991-02-27 |
| CA2023712A1 (en) | 1991-02-25 |
| CA2023712C (en) | 1993-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8332 | No legal effect for de |