DE69032248D1 - Läppmaschine und Läppscheibe hierfür mit einem veränderbaren Spiralrillenabstand - Google Patents

Läppmaschine und Läppscheibe hierfür mit einem veränderbaren Spiralrillenabstand

Info

Publication number
DE69032248D1
DE69032248D1 DE69032248T DE69032248T DE69032248D1 DE 69032248 D1 DE69032248 D1 DE 69032248D1 DE 69032248 T DE69032248 T DE 69032248T DE 69032248 T DE69032248 T DE 69032248T DE 69032248 D1 DE69032248 D1 DE 69032248D1
Authority
DE
Germany
Prior art keywords
lapping
spiral groove
disc
groove distance
variable spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69032248T
Other languages
English (en)
Other versions
DE69032248T2 (de
Inventor
Yves Gougouyan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Norton Desmarquest Fine Ceramics SA
Original Assignee
Norton Desmarquest Fine Ceramics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Desmarquest Fine Ceramics SA filed Critical Norton Desmarquest Fine Ceramics SA
Publication of DE69032248D1 publication Critical patent/DE69032248D1/de
Application granted granted Critical
Publication of DE69032248T2 publication Critical patent/DE69032248T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
DE69032248T 1990-02-23 1990-12-31 Läppmaschine und Läppscheibe hierfür mit einem veränderbaren Spiralrillenabstand Expired - Fee Related DE69032248T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9002290A FR2658747B1 (fr) 1990-02-23 1990-02-23 Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine.

Publications (2)

Publication Number Publication Date
DE69032248D1 true DE69032248D1 (de) 1998-05-20
DE69032248T2 DE69032248T2 (de) 1998-08-13

Family

ID=9394085

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69032248T Expired - Fee Related DE69032248T2 (de) 1990-02-23 1990-12-31 Läppmaschine und Läppscheibe hierfür mit einem veränderbaren Spiralrillenabstand

Country Status (7)

Country Link
US (1) US5131190A (de)
EP (1) EP0443285B1 (de)
JP (1) JPH0557604A (de)
DE (1) DE69032248T2 (de)
ES (1) ES2114859T3 (de)
FR (1) FR2658747B1 (de)
PT (1) PT96846B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37997E1 (en) 1990-01-22 2003-02-18 Micron Technology, Inc. Polishing pad with controlled abrasion rate
JP3009565B2 (ja) * 1993-08-18 2000-02-14 洋 橋本 研削具
US6561964B1 (en) 1994-07-22 2003-05-13 Ranpak Corp. Cushioning conversion machine and method
US5690540A (en) * 1996-02-23 1997-11-25 Micron Technology, Inc. Spiral grooved polishing pad for chemical-mechanical planarization of semiconductor wafers
US5645469A (en) * 1996-09-06 1997-07-08 Advanced Micro Devices, Inc. Polishing pad with radially extending tapered channels
US5921855A (en) * 1997-05-15 1999-07-13 Applied Materials, Inc. Polishing pad having a grooved pattern for use in a chemical mechanical polishing system
US6273806B1 (en) 1997-05-15 2001-08-14 Applied Materials, Inc. Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus
US6203407B1 (en) 1998-09-03 2001-03-20 Micron Technology, Inc. Method and apparatus for increasing-chemical-polishing selectivity
US6238271B1 (en) 1999-04-30 2001-05-29 Speed Fam-Ipec Corp. Methods and apparatus for improved polishing of workpieces
US6837779B2 (en) * 2001-05-07 2005-01-04 Applied Materials, Inc. Chemical mechanical polisher with grooved belt
US6783436B1 (en) * 2003-04-29 2004-08-31 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with optimized grooves and method of forming same
TWI449597B (zh) * 2008-07-09 2014-08-21 Iv Technologies Co Ltd 研磨墊及其製造方法
TWI532565B (zh) * 2011-03-21 2016-05-11 智勝科技股份有限公司 研磨方法以及研磨系統
US9469012B1 (en) 2015-07-22 2016-10-18 Pieter le Blanc Spherical lapping machine

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US783086A (en) * 1904-04-07 1905-02-21 John Kerwin Stewart Grinding-machine.
US2762172A (en) * 1953-12-15 1956-09-11 Marine Pumps Inc Rotary lapping machine
BE547473A (de) * 1955-05-03
US3457682A (en) * 1966-11-25 1969-07-29 Speedfam Corp Lapping machine
US3921342A (en) * 1973-12-17 1975-11-25 Spitfire Tool & Machine Co Inc Lap plate
DE3023937A1 (de) * 1980-06-26 1982-01-14 Ideal-Standard Gmbh, 5300 Bonn Laepp- und poliereinrichtung zum bearbeiten von ebenen werkstuecken
JPS60242975A (ja) * 1984-05-14 1985-12-02 Kanebo Ltd 平面研磨装置
US4996798A (en) * 1989-05-31 1991-03-05 Moore Steven C Ultra-precision lapping apparatus
US5020283A (en) * 1990-01-22 1991-06-04 Micron Technology, Inc. Polishing pad with uniform abrasion

Also Published As

Publication number Publication date
FR2658747B1 (fr) 1992-07-03
EP0443285B1 (de) 1998-04-15
EP0443285A1 (de) 1991-08-28
FR2658747A1 (fr) 1991-08-30
PT96846A (pt) 1992-12-31
PT96846B (pt) 1998-08-31
DE69032248T2 (de) 1998-08-13
JPH0557604A (ja) 1993-03-09
US5131190A (en) 1992-07-21
ES2114859T3 (es) 1998-06-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee