FR2658747B1 - Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine. - Google Patents

Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine.

Info

Publication number
FR2658747B1
FR2658747B1 FR9002290A FR9002290A FR2658747B1 FR 2658747 B1 FR2658747 B1 FR 2658747B1 FR 9002290 A FR9002290 A FR 9002290A FR 9002290 A FR9002290 A FR 9002290A FR 2658747 B1 FR2658747 B1 FR 2658747B1
Authority
FR
France
Prior art keywords
machine
roding
track
variable pitch
pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9002290A
Other languages
English (en)
Other versions
FR2658747A1 (fr
Inventor
Gougouyan Yves
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CICE SA
Original Assignee
CICE SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CICE SA filed Critical CICE SA
Priority to FR9002290A priority Critical patent/FR2658747B1/fr
Priority to ES90403811T priority patent/ES2114859T3/es
Priority to DE69032248T priority patent/DE69032248T2/de
Priority to EP90403811A priority patent/EP0443285B1/fr
Priority to US07/648,287 priority patent/US5131190A/en
Priority to PT96846A priority patent/PT96846B/pt
Priority to JP3028641A priority patent/JPH0557604A/ja
Publication of FR2658747A1 publication Critical patent/FR2658747A1/fr
Application granted granted Critical
Publication of FR2658747B1 publication Critical patent/FR2658747B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
FR9002290A 1990-02-23 1990-02-23 Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine. Expired - Fee Related FR2658747B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR9002290A FR2658747B1 (fr) 1990-02-23 1990-02-23 Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine.
DE69032248T DE69032248T2 (de) 1990-02-23 1990-12-31 Läppmaschine und Läppscheibe hierfür mit einem veränderbaren Spiralrillenabstand
EP90403811A EP0443285B1 (fr) 1990-02-23 1990-12-31 Machine à roder, et plateau de rodage à sillon à pas variable pour une telle machine
ES90403811T ES2114859T3 (es) 1990-02-23 1990-12-31 Maquina de lapeado, y plato de lapeado con surco de paso variable para dicha maquina.
US07/648,287 US5131190A (en) 1990-02-23 1991-01-31 Lapping machine and non-constant pitch grooved bed therefor
PT96846A PT96846B (pt) 1990-02-23 1991-02-21 Maquina de polir e disco de polidura de sulco de passo variavel para a referida maquina
JP3028641A JPH0557604A (ja) 1990-02-23 1991-02-22 ラツプ盤及び不定ピツチ溝付きラツプ台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9002290A FR2658747B1 (fr) 1990-02-23 1990-02-23 Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine.

Publications (2)

Publication Number Publication Date
FR2658747A1 FR2658747A1 (fr) 1991-08-30
FR2658747B1 true FR2658747B1 (fr) 1992-07-03

Family

ID=9394085

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9002290A Expired - Fee Related FR2658747B1 (fr) 1990-02-23 1990-02-23 Machine a roder, et plateau de rodage a sillon a pas variable pour une telle machine.

Country Status (7)

Country Link
US (1) US5131190A (fr)
EP (1) EP0443285B1 (fr)
JP (1) JPH0557604A (fr)
DE (1) DE69032248T2 (fr)
ES (1) ES2114859T3 (fr)
FR (1) FR2658747B1 (fr)
PT (1) PT96846B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE37997E1 (en) 1990-01-22 2003-02-18 Micron Technology, Inc. Polishing pad with controlled abrasion rate
JP3009565B2 (ja) * 1993-08-18 2000-02-14 洋 橋本 研削具
US6561964B1 (en) 1994-07-22 2003-05-13 Ranpak Corp. Cushioning conversion machine and method
US5690540A (en) * 1996-02-23 1997-11-25 Micron Technology, Inc. Spiral grooved polishing pad for chemical-mechanical planarization of semiconductor wafers
US5645469A (en) * 1996-09-06 1997-07-08 Advanced Micro Devices, Inc. Polishing pad with radially extending tapered channels
US6273806B1 (en) 1997-05-15 2001-08-14 Applied Materials, Inc. Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus
US5921855A (en) * 1997-05-15 1999-07-13 Applied Materials, Inc. Polishing pad having a grooved pattern for use in a chemical mechanical polishing system
US6203407B1 (en) 1998-09-03 2001-03-20 Micron Technology, Inc. Method and apparatus for increasing-chemical-polishing selectivity
US6238271B1 (en) 1999-04-30 2001-05-29 Speed Fam-Ipec Corp. Methods and apparatus for improved polishing of workpieces
US6837779B2 (en) * 2001-05-07 2005-01-04 Applied Materials, Inc. Chemical mechanical polisher with grooved belt
US6783436B1 (en) * 2003-04-29 2004-08-31 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with optimized grooves and method of forming same
TWI449597B (zh) * 2008-07-09 2014-08-21 Iv Technologies Co Ltd 研磨墊及其製造方法
TWI532565B (zh) * 2011-03-21 2016-05-11 智勝科技股份有限公司 研磨方法以及研磨系統
US9469012B1 (en) 2015-07-22 2016-10-18 Pieter le Blanc Spherical lapping machine

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US783086A (en) * 1904-04-07 1905-02-21 John Kerwin Stewart Grinding-machine.
US2762172A (en) * 1953-12-15 1956-09-11 Marine Pumps Inc Rotary lapping machine
BE547473A (fr) * 1955-05-03
US3457682A (en) * 1966-11-25 1969-07-29 Speedfam Corp Lapping machine
US3921342A (en) * 1973-12-17 1975-11-25 Spitfire Tool & Machine Co Inc Lap plate
DE3023937A1 (de) * 1980-06-26 1982-01-14 Ideal-Standard Gmbh, 5300 Bonn Laepp- und poliereinrichtung zum bearbeiten von ebenen werkstuecken
JPS60242975A (ja) * 1984-05-14 1985-12-02 Kanebo Ltd 平面研磨装置
US4996798A (en) * 1989-05-31 1991-03-05 Moore Steven C Ultra-precision lapping apparatus
US5020283A (en) * 1990-01-22 1991-06-04 Micron Technology, Inc. Polishing pad with uniform abrasion

Also Published As

Publication number Publication date
PT96846A (pt) 1992-12-31
DE69032248T2 (de) 1998-08-13
FR2658747A1 (fr) 1991-08-30
EP0443285B1 (fr) 1998-04-15
JPH0557604A (ja) 1993-03-09
EP0443285A1 (fr) 1991-08-28
US5131190A (en) 1992-07-21
PT96846B (pt) 1998-08-31
DE69032248D1 (de) 1998-05-20
ES2114859T3 (es) 1998-06-16

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Legal Events

Date Code Title Description
ST Notification of lapse