DE69020754D1 - Doppelfokusdetektor unter Ausnutzung der chromatischen Aberration. - Google Patents
Doppelfokusdetektor unter Ausnutzung der chromatischen Aberration.Info
- Publication number
- DE69020754D1 DE69020754D1 DE69020754T DE69020754T DE69020754D1 DE 69020754 D1 DE69020754 D1 DE 69020754D1 DE 69020754 T DE69020754 T DE 69020754T DE 69020754 T DE69020754 T DE 69020754T DE 69020754 D1 DE69020754 D1 DE 69020754D1
- Authority
- DE
- Germany
- Prior art keywords
- chromatic aberration
- focus detector
- double focus
- double
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Automatic Focus Adjustment (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1043292A JP2699282B2 (ja) | 1989-02-27 | 1989-02-27 | 色収差を利用した二重焦点検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69020754D1 true DE69020754D1 (de) | 1995-08-17 |
DE69020754T2 DE69020754T2 (de) | 1995-12-07 |
Family
ID=12659720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69020754T Expired - Fee Related DE69020754T2 (de) | 1989-02-27 | 1990-02-22 | Doppelfokusdetektor unter Ausnutzung der chromatischen Aberration. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5026976A (de) |
EP (1) | EP0385272B1 (de) |
JP (1) | JP2699282B2 (de) |
DE (1) | DE69020754T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5200230A (en) * | 1987-06-29 | 1993-04-06 | Dunfries Investments Limited | Laser coating process |
WO1991010110A1 (en) * | 1989-12-28 | 1991-07-11 | Sumitomo Heavy Industries, Ltd. | Composite color illumination method and band light illumination in a double-focus detector utilizing chromatic aberration |
US5072126A (en) * | 1990-10-31 | 1991-12-10 | International Business Machines Corporation | Promixity alignment using polarized illumination and double conjugate projection lens |
TWI370894B (en) * | 2007-02-26 | 2012-08-21 | Corning Inc | Method for measuring distortion |
JP2012216728A (ja) * | 2011-04-01 | 2012-11-08 | V Technology Co Ltd | 露光装置のアライメント装置 |
DE102011018311B4 (de) | 2011-04-20 | 2018-09-13 | Conti Temic Microelectronic Gmbh | Optische Vorrichtung mit Temperaturkompensation, Kraftfahrzeug mit einer derartigen optischen Vorrichtung und Verfahren zur Bildverarbeitung |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57158826A (en) * | 1981-03-27 | 1982-09-30 | Nippon Kogaku Kk <Nikon> | Automatic focusing device for stereoscopical microscope |
JPS57172730A (en) * | 1981-04-17 | 1982-10-23 | Toshiba Corp | Relative location detecting device of mask substrate and wafer |
JPS5895707A (ja) * | 1981-12-02 | 1983-06-07 | Olympus Optical Co Ltd | 内視鏡の自動集点検出機構 |
US4614864A (en) * | 1984-05-29 | 1986-09-30 | The Perkin-Elmer Corporation | Apparatus for detecting defocus |
JPH0744138B2 (ja) * | 1985-09-17 | 1995-05-15 | 株式会社ニコン | 位置合わせ装置 |
JPS6441805A (en) * | 1987-08-07 | 1989-02-14 | Sumitomo Heavy Industries | Position detecting apparatus of two bodies, which are separated by minute distance |
JP2649391B2 (ja) * | 1988-02-10 | 1997-09-03 | 住友重機械工業株式会社 | 色収差を利用した2重焦点検出装置における複色照明方法および帯域光照明方法 |
-
1989
- 1989-02-27 JP JP1043292A patent/JP2699282B2/ja not_active Expired - Fee Related
-
1990
- 1990-02-22 DE DE69020754T patent/DE69020754T2/de not_active Expired - Fee Related
- 1990-02-22 EP EP90103453A patent/EP0385272B1/de not_active Expired - Lifetime
- 1990-02-26 US US07/485,240 patent/US5026976A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0385272A3 (de) | 1991-08-28 |
US5026976A (en) | 1991-06-25 |
DE69020754T2 (de) | 1995-12-07 |
JP2699282B2 (ja) | 1998-01-19 |
EP0385272B1 (de) | 1995-07-12 |
JPH02223806A (ja) | 1990-09-06 |
EP0385272A2 (de) | 1990-09-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3888712D1 (de) | Detektorobjectiv für Rastermikroskope. | |
DE69018101D1 (de) | Optische Abtastvorrichtung. | |
DE68916010D1 (de) | Optischer Messfühler. | |
DE69010594D1 (de) | Optische Verstärker. | |
NO901406L (no) | Stativarrangement. | |
DE69020189D1 (de) | Optisches Bauelement. | |
DE69016919D1 (de) | Optischer Sensor. | |
DE69112532D1 (de) | Transösophagischer Probenschaft. | |
DE69019889D1 (de) | Optische Komponente. | |
DE58906576D1 (de) | Bikonvexe Stablinse. | |
NO905262L (no) | Balanseringsarrangement. | |
DE3873809D1 (de) | Fokusdetektor. | |
DE59000212D1 (de) | Lupenanordnung. | |
DE69014029D1 (de) | Apochromatisches Linsensystem. | |
DE69021484D1 (de) | Optische Verstärker-Photodetektor-Anordnung. | |
DE69022098D1 (de) | Optischer Empfänger. | |
DE68908495D1 (de) | Optischer strahlteiler. | |
NO900455D0 (no) | Transformator. | |
DE69018234D1 (de) | Optischer ablenker. | |
NO902872L (no) | Optisk fiber. | |
DE69020754D1 (de) | Doppelfokusdetektor unter Ausnutzung der chromatischen Aberration. | |
DE69019619D1 (de) | Optischer Stromtransformator. | |
DE69019891D1 (de) | Optischer Transformator. | |
DE3776467D1 (de) | Fokusdetektor. | |
DE69006849D1 (de) | Festkörperringlaser. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |